超高結合回折格子を有する半導体レーザ光源の動特性解明

• Project/Area Number: 10J08973
• Research Category: Grant-in-Aid for JSPS Fellows
• Allocation Type: Single-year Grants
• Section: 国内
• Research Field: Electron device/Electronic equipment
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 進藤 隆彦 東京工業大学, 大学院・理工学研究科(工学系), 特別研究員(DC1)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥2,100,000 (Direct Cost: ¥2,100,000); Fiscal Year 2012: ¥700,000 (Direct Cost: ¥700,000); Fiscal Year 2011: ¥700,000 (Direct Cost: ¥700,000); Fiscal Year 2010: ¥700,000 (Direct Cost: ¥700,000)
• Keywords: 半導体薄膜レーザ / 光配線 / 光電子集積回路 / 低消費電力 / 強光閉じ込め効果 / 横方向電流注入レーザ / 絶縁性基板

Research Abstract

オンチップ光配線の実現に向けた小型・極低消費電力光源として期待される強光閉じ込め効果を用いた極低電流動作半導体薄膜DFBレーザの実現および高速動作化を目的としている。オンチップ光配線用光源に求められる動作特性には、1mW以下の極低消費電力動作に加えチップ内で信号を伝送する上で十分な光出力強度と直接変調帯域が要求される。本年度はまず、これらの要求値を満たす半導体薄膜レーザの実現に向け、理論計算による半導体薄膜レーザの発振特性と高速変調特性の検討と構造設計を行った。その結果、コア層150nm共振器長約40μmの微細共振器を有する半導体薄膜レーザにおいて、0.16mW以上の十分な光出力強度と10Gb/s以上の直接信号伝送帯域を駆動電力1mW以下で実現可能であることを示した。これらの動作特性はオンチップ光配線への応用に向けてその要求値を十分に満たす。また、半導体薄膜レーザなどの微細共振器を有する光デバイスでは、熱伝導率の低い低屈折率材料をクラッド層を有することや微細化に伴う素子抵抗の増大などによって、電流注入駆動による発熱の影響が懸念される。この問題に対し、電流注入による自己発熱の影響を理論的に解析し動作特性への影響を評価した。その結果、半導体薄膜レーザの熱抵抗値を約6100K/Wと試算し、発熱の影響を考慮した半導体薄膜レーザの動作特性解析においても、オンチップ光配線の要求を十分満たす事を示した。
これらの動作特性解析および熱特性解析を踏まえ半導体薄膜レーザの素子試作を行った。理論解析から予想された自己発熱の影響を低減するために熱伝導率の低いBCBの厚さを従来の6μmから2μmに薄膜化し、放熱特性の向上を図った。コア層厚220nm、共振器長700μmの半導体薄膜レーザを試作した結果、しきい値電流値3.5mAの室温連続動作に初めて成功した。比較的大きい共振器サイズにおいて艇しきい値動作化に成功したことから、回折格子等を導入し共振器の結合係数を増大させるとともに50陣以下の微細共振器化を進めることでオンチップ光配線に向けた極艇消費電力レーザの実現が十分可能であると考えられる。

Research Products

• [Journal Article] Carrier-Transport-Limited Modulation Bandwidth in Distributed Reflector Lasers with Wirelike Active Regions (2012)
  • Author(s): D. Takahashi, S. Lee, M. Shirao, T. Shindo, K. Shinno, T. Amemiya, N. Nishiyama, S. Arai
  • Journal Title: IEEE J, Quantum Electron. Volume: Vol. 48 Issue: 5 Pages: 688-695
  • DOI: 10.1109/jqe.2012.2190822
  • Peer Reviewed
• [Journal Article] GalnAsP/InP Lateral Current Injection Laser with Uniformly Distributed Quantum Well Structure (2012)
  • Author(s): M. Futami, T. Shindo, T. Koguchi, K. Shinno, T. Amemiya, N. Nishiyama, S. Arai
  • Journal Title: IEEE Photon. Technol. Lett. Volume: Vol. 24 Issue: 11 Pages: 888-890
  • DOI: 10.1109/lpt.2012.2190053
  • Peer Reviewed
• [Journal Article] Permeability retrieval in InP-based waveguide optical device combined with metamateria (2012)
  • Author(s): T. Amemiya, S. Myoga, T. Shindo, E. Murai, N. Nishiyama, S. Arai
  • Journal Title: Optics Lett. Volume: Vol. 37 Issue: 12 Pages: 2301-2303
  • DOI: 10.1364/ol.37.002301
  • Peer Reviewed
• [Journal Article] Lateral-Current-Injection Distributed Feedback Laser with Surface Grating Structure (2011)
  • Author(s): T.Shindo, T.Okumura, H.Ito, T.Koguchi, D.Takahashi, Y.Atsumi, J.Kang, R.Osabe, T Amemiya, N.Nishiyama, S.Arai
  • Journal Title: IEEE J.Sel.Top.Quantum Electron. Volume: 17 Issue: 5 Pages: 1175-1182
  • DOI: 10.1109/jstqe.2011.2131636
  • Peer Reviewed
• [Journal Article] Low-power-consumption High-eye-margin 10 Gbit/s Operation by GaInAsP/InP Distributed Reflector Lasers with Wirelike Active Regions (2011)
  • Author(s): S.Lee, D.Takahashi, T.Shindo, K.Shinno, T.Amemiya, N.Nishiyama, S.Arai
  • Journal Title: IEEE Photonics Technol.Lett. Volume: 23 Issue: 18 Pages: 1349-1351
  • DOI: 10.1109/lpt.2011.2160938
  • Peer Reviewed
• [Journal Article] Nonunity permeability in metamaterial-based GaInAsP/InP multimode interferometers (2011)
  • Author(s): T.Amemiya, T.Shindo, D.Takahashi, S.Myoga, N.Nishiyama, S.Arai
  • Journal Title: Optics Lett. Volume: 36 Issue: 12 Pages: 2327-2329
  • DOI: 10.1364/ol.36.002327
  • Peer Reviewed
• [Journal Article] Magnetic Interactions at Optical Frequencies in an InP-Based Wavegui de Device with Metamaterial (2011)
  • Author(s): T.Amemiya, T.Shindo, D.Takahashi, N.Nishiyama, S.Arai
  • Journal Title: IEEE J.Quantum Electronics Volume: 47 Issue: 5 Pages: 736-744
  • DOI: 10.1109/jqe.2011.2108268
  • Peer Reviewed
• [Journal Article] Bandwidth enhancement of injection-locked distributed reflector lasers with wirelike active regions (2011)
  • Author(s): S.H.Lee, D.Parekh, T.Shindo, W.Yang, P.Guo, D.Takahahi, N.Nishiyama, C.C.Hasnain, S.Arai
  • Journal Title: Opt.Express Volume: 18 Pages: 16370-16378
  • Peer Reviewed
• [Journal Article] GaInAsP/InP lateral-current-injection distributed feedback laser with a-Si surface grating (2011)
  • Author(s): T.Shindo, T.Okumura, H.Ito, T.Koguchi, D.Takahashi, Y.Atsumi, J.Kang, R.Osabe, T.Amemiya, N.Nishiyama, S.Arai
  • Journal Title: Opt.Express Volume: 19 Pages: 1884-1891
  • Peer Reviewed
• [Journal Article] Magnetic Interactions at Optical Frequencies in an InP-Based Waveguide Device with Metamaterial (2011)
  • Author(s): T.Amemiya, T.Shindo, D.Takahashi, N.Nishiyama, S.Arai
  • Journal Title: IEEE J.Quantum Electronics Volume: 47 Pages: 736-744
  • Peer Reviewed
• [Journal Article] Lateral-Current-Injection Distributed Feedback Laser with Surface Grating Structure (2011)
  • Author(s): T.Shindo, T.Okumura, H.Ito, T.Koguchi, D.Takahashi, Y.Atsumi, J.Kang, R.Osabe, T.Amemiya, N.Nishiyama, S.Arai
  • Journal Title: IEEE J.Sel.Top.in Quantum Electron Volume: In press
  • Peer Reviewed
• [Presentation] Permeability-controlled Optical Modulator with Tri-gate Metamaterial (2013)
  • Author(s): T. Amemiya, T. Kanazawa, A. Ishikawa, S. Myoga, E. Murai, T. Shindo, J. Kang, N. Nishiyama, Y. Miyamoto, T. Tanaka, S. Arai.
  • Organizer: The 4th Int. Topical Meeting on Nanophotonics and Metamaterials (NANOMETA-2013)
  • Place of Presentation: Tirol, Austria
  • Year and Date: 2013-01-04
• [Presentation] Modulation Bandwidth of GalnAsP/InP Lateral-Current-Injection Membrane Laser (2012)
  • Author(s): T. Shindo, M. Futami, K. Doi, T. Amemiya, N. Nishiyama, S. Arai.
  • Organizer: The 23rd IEEE Int. Semiconductor Laser Conf.(ISLC-2012)
  • Place of Presentation: San Diego, USA
  • Year and Date: 2012-10-08
• [Presentation] Thermal Analysis of Self-Heating Effect in GalnAsP/InP Membrane DFB Laser on Si Substrate (2012)
  • Author(s): K. Doi, T. Shindo, M. Futami, T. Amemiya, N. Nishiyama, S. Arai.
  • Organizer: 2012 IEEE Photonics Conference (IPC-2012)
  • Place of Presentation: Burlingame, USA
  • Year and Date: 2012-09-27
• [Presentation] Low-Threshold Operation of LCI-Membrane-DFB Lasers with Be-doped GalnAs Contact Layer (2012)
  • Author(s): M. Futami, T. Shindo, K. Doi, T. Amemiya, N. Nishiyama, S. Arai
  • Organizer: The 24th Int. Conf. Indium Phosphide and Related Materials (IPRM-2012)
  • Place of Presentation: Santa Barbara USA
  • Year and Date: 2012-08-30
• [Presentation] Compact InP-based 1x2 MMI Splitter on Si Substrate with BCB Wafer Bonding for Membrane Photonic Circuits (2012)
  • Author(s): J. Lee, Y. Yamahara, Y. Atsumi, T. Shindo, T. Amemiya, N. Nishiyama, S. Arai
  • Organizer: The 24th Int. Conf. Indium Phosphide and Related Materials (IPRM-2012)
  • Place of Presentation: Santa Barbara, USA
  • Year and Date: 2012-08-27
• [Presentation] Improved Quantum Efficiency of GalnAsP/InP Top Air-Clad Lateral Current Injection Lasers (2012)
  • Author(s): M. Futami, K. Shinno, T. Shindo, K. Doi, T. Amemiya, N. Nishiyama, S. Arai.
  • Organizer: 2012 IEEE Opticl Int. Conf. (OIC-2012)
  • Place of Presentation: Santa Fe, USA
  • Year and Date: 2012-05-22
• [Presentation] 10 Gb/s Operation of GalnAs/InP Top Air-Clad. Lateral Junction Waveguide-type Photodiode (2012)
  • Author(s): T. Shindo, T. Koguchi, M. Futami, K. Shinno, K. Doi, T. Amemiya, N. Nishiyama, S. Arai.
  • Organizer: 2012 IEEE Optical Int. Conf.(CHC-2012)
  • Place of Presentation: Santa Fe, USA
  • Year and Date: 2012-05-22
• [Presentation] Non-unity Permeability in InP-based Mach-Zehnder Interferometer with Metamaterial (2011)
  • Author(s): T.Amemiya, T.Shindo, S.Myoga, N.Nishiyama, S.Arai
  • Organizer: 2011 IEEE Photonics Conference (IPC-2011)
  • Place of Presentation: Airlington, USA
  • Year and Date: 2011-10-13
• [Presentation] ateral Current Injection Laser with Uniformly Distributed Quantum-Well Structure (2011)
  • Author(s): T.Shindo, M.Futami, R.Osabe, T.Koguchi, T.Amemiya, N.Nishiyama, S.Arai
  • Organizer: 2011 IEEE Photonics Conference (IPC-2011)
  • Place of Presentation: Airlington, USA
  • Year and Date: 2011-10-13
• [Presentation] Semiconductor DFB Laser with Plasmonic Metal Layers for Subwavelength Confinement of Light (2011)
  • Author(s): T.Amemiya, T.Shindo, S.Myoga, N.Nishiyama, S.Arai
  • Organizer: IQEC/CLEO Pacific Rim 2011
  • Place of Presentation: Sydney, Australia
  • Year and Date: 2011-08-04
• [Presentation] Stripe Width Dependence of Internal Quantum Efficiency and Carrier Injection Delay in Lateral Current Injection GaInAsP/InP Lasers (2011)
  • Author(s): M.Futami, T.Shindo, T.Okumura, R.Osabe, D.Takahashi, T.Koguchi, T.Amemiya, N.Nishiyama, S.Arai
  • Organizer: The 16th Opto-Electronics and Communication Conference (OECC-2011)
  • Place of Presentation: Kaohsiung, Taiwan
  • Year and Date: 2011-07-07
• [Presentation] Lasing Operation of Lateral -Current-Injection Membrane DFB Laser with Surface Grating (2011)
  • Author(s): T.Shindo, M.Futami, T.Okumura, R.Osabe, T.Koguchi, T.Amemiya, N.Nishiyama, S.Arai
  • Organizer: The 16th Opto-Electronics and Communication Conference (OECC-2011)
  • Place of Presentation: Kaohsiung, Taiwan
  • Year and Date: 2011-07-06
• [Presentation] Low-power Consumption and High-eye-margin 10 Gbit/s operation of Distributed Reflector Laser with Wirelike Active Regions (2011)
  • Author(s): D.Takahashi, S.Lee, T.Shindo, K.Shinno, T.Amemiya, N.Nishiyama, S.Arai
  • Organizer: The 23rd Indium Phosphide and Related Materials (IPRM2011)
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2011-05-24
• [Presentation] Lateral Current Injection Distributed Feedback Laser with Wirelike Active Regions (2011)
  • Author(s): T.Shindo, T.Okumura, M.Futami, R.Osabe, T.Koguchi, T.Amemiya, N.Nishiyama, S.Arai
  • Organizer: The 23rd Indium Phosphide and Related Materials (IPRM2011)
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2011-05-24
• [Presentation] Low-power Consumption and High-eye-margin 10Gbit/s Operation of Distributed Reflector Laser with Wirelike Active Regions (2011)
  • Author(s): D.Takahashi, S.H.Lee, T.Shindo, K.Shinno, T.Amemiya, N.Nishiyama, S.Arai
  • Organizer: The 23rd Indium Phosphide and Related Material (IPRM 2011)
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2011-05-24
• [Presentation] Lateral Current Injection Distributed Feedback Laser with Wirelike Active Regions (2011)
  • Author(s): T.Shindo, T.Okumura, M.Futami, R.Osabe, T.Koguchi, T.Ameiya, N.Nishiyama, S.Arai
  • Organizer: The 23rd Indium Phosphide and Related Material (IPRM 2011)
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2011-05-24
• [Presentation] 細線状活性層を有するGaInAsP/InP横方向電流注入型DFBレーザ (2011)
  • Author(s): 二見充輝、進藤隆彦、奥村忠嗣、長部亮、伊藤瞳、小口貴之、雨宮智宏、西山伸彦、荒井滋久
  • Organizer: 2011年春季第58回応用物理学関係連合講演会
  • Place of Presentation: 神奈川県
  • Year and Date: 2011-03-26
• [Presentation] 横方向電流注入型レーザにおける発振特性のストライプ幅依存性 (2011)
  • Author(s): 進藤隆彦、奥村忠嗣、二見充輝、長部亮、伊藤瞳、小口貴之、雨宮智宏、西山伸彦、荒井滋久
  • Organizer: 2011年春季第58回応用物理学関係連合講演会
  • Place of Presentation: 神奈川県
  • Year and Date: 2011-03-26
• [Presentation] 細線状活性層を有する分布反射型レーザの変調帯域拡大と10Gbit/s低消費電力動作 (2011)
  • Author(s): 高橋大佑、李承勲、進藤隆彦、信野圭祐、雨宮智宏、西山伸彦、荒井滋久
  • Organizer: 2011年 電子情報通信学会総合大会
  • Place of Presentation: 東京都
  • Year and Date: 2011-03-16
• [Presentation] Lateral current injection GaInAsP/InP laser for membrane based photonic circuits (2011)
  • Author(s): S.Arai, N.Nishiyama, T.Okumura, T.Shindo
  • Organizer: SPIE Photonics West Conference 2011
  • Place of Presentation: San Francisco, California, (USA)
  • Year and Date: 2011-01-24
• [Presentation] Lateral Current Injection 1550nm Wavelength DFB Laser with a-Si Surface Grating (2010)
  • Author(s): T.Shindo, T.Okumura, M.Futami, R.Osabe, T.Koguchi, N.Nishiyama, S.Arai
  • Organizer: Technical Report of IEICE, LQE2010
  • Place of Presentation: 東京都
  • Year and Date: 2010-12-17
• [Presentation] Lateral Current Injection Type GaInAsP/InP DFB Laser with a-Si Surface Grating (2010)
  • Author(s): T.Shindo, T.Okumura, H.Ito, T.Koguchi, D.Takahashi, Y.Atsumi, J.Kang, R.Osabe, N.Nishiyama, S.Arai
  • Organizer: The 23rd Annual Meeting of the IEEE Photonics Society
  • Place of Presentation: Denver, Colorado (USA)
  • Year and Date: 2010-11-11
• [Presentation] Metamaterial-based Control of Permeability in GaInAsP/InP Multimode-Interferometers (2010)
  • Author(s): T.Amemiya, T.Shindo, D.Takahashi, N.Nishiyama, S.Arai
  • Organizer: The 23rd Annual Meeting of the IEEE Photonics Society
  • Place of Presentation: Denver, Colorado (USA)
  • Year and Date: 2010-11-09
• [Presentation] 活性層分離型分布反射型レーザの変調特性の構造依存性 (2010)
  • Author(s): 高橋大佑、李承勲、信野圭祐、進藤隆彦、西山伸彦、荒井滋久
  • Organizer: 2010年秋季第29回応用物理学会学術講演会
  • Place of Presentation: 長崎県長崎市
  • Year and Date: 2010-09-16
• [Presentation] GaInAsP/InP細線状活性層を有するDBRの透過反射スペクトル特性 (2010)
  • Author(s): 信野圭祐、李承勲、高橋大佑、進藤隆彦、西山伸彦、荒井滋久
  • Organizer: 2010年秋季第29回応用物理学会学術講演会
  • Place of Presentation: 長崎県長崎市
  • Year and Date: 2010-09-16
• [Presentation] a-Si表面回折格子を用いた横方向電流注入型DFBレーザ (2010)
  • Author(s): 進藤隆彦、奥村忠嗣、伊藤瞳、小口貴之、渥美裕樹、姜〓〓、長部亮、西山伸彦、荒井滋久
  • Organizer: 2010年秋季第29回応用物理学会学術講演会
  • Place of Presentation: 長崎県長崎市
  • Year and Date: 2010-09-16
• [Presentation] SOI基板上集積二重導波路構造レーザの理論検討 (2010)
  • Author(s): 伊藤瞳、奥村忠嗣、李承勲、進藤隆彦、西山伸彦、荒井滋久
  • Organizer: 2010年秋季第29回応用物理学会学術講演会
  • Place of Presentation: 長崎県長崎市
  • Year and Date: 2010-09-16
• [Presentation] Direct Measurements of Characteristics of GaInAsP/InP Bragg Gratings with Periodically Etched Quantum Wells (2010)
  • Author(s): K.Shinno, S.H.Lee, T.Shindo, D.Takahashi, N.Tajima, N.Nishiyama, S.Arai
  • Organizer: The 37th International Symposium on Compound Semiconductors (ISCS 2010)
  • Place of Presentation: 香川県高松市
  • Year and Date: 2010-06-04
• [Presentation] All-optical Switch Consisting of Multimode Interferometer Combined with Metamaterials : Device Design (2010)
  • Author(s): T.Amemiya, T.Shindo, D.Takahashi, N.Nishiyama, S.Arai
  • Organizer: The 22nd Indium Phosphide and Related Material (IPRM 2010)
  • Place of Presentation: 香川県高松市
  • Year and Date: 2010-06-02
• [Presentation] Magnetic Interaction at Optical Frequencies in InP-based Waveguide Device Combined with Metamaterial (2010)
  • Author(s): T.Amemiya, T.Shindo, D.Takahashi, N.Nishiyama, S.Arai
  • Organizer: Conference on Laser and Electro-Optics/Quantum Electronics and Laser Science Conference (CLEO/QELS-2010)
  • Place of Presentation: San Jose, California (USA)
  • Year and Date: 2010-05-21