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半導体ナノ構造の量子伝導物性とその応用

Research Project

Project/Area Number 11212202
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionOsaka University

Principal Investigator

冷水 佐壽 (2001-2003)  大阪大学, 大学院・基礎工学研究科, 教授 (50201728)

濱口 智尋 (1999-2000)  大阪大学, 大学院・工学研究科, 教授 (40029004)

Co-Investigator(Kenkyū-buntansha) 蒲生 健次  大阪大学, 名誉教授 (70029445)
中島 尚男  兵庫大学, 経済情報学部, 教授 (20198071)
濱口 智尋  大阪大学, 名誉教授 (40029004)
家 泰弘  東京大学, 物性研究所, 教授 (30125984)
古屋 一仁  東京工業大学, 工学部, 教授 (40092572)
冷水 佐寿  大阪大学, 大学院・基礎工学研究科, 教授 (50201728)
Project Period (FY) 1999 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥47,900,000 (Direct Cost: ¥47,900,000)
Fiscal Year 2003: ¥9,700,000 (Direct Cost: ¥9,700,000)
Fiscal Year 2002: ¥9,700,000 (Direct Cost: ¥9,700,000)
Fiscal Year 2001: ¥10,000,000 (Direct Cost: ¥10,000,000)
Fiscal Year 2000: ¥9,200,000 (Direct Cost: ¥9,200,000)
Fiscal Year 1999: ¥9,300,000 (Direct Cost: ¥9,300,000)
Keywords量子細線 / 磁気トンネル法 / 単電子トランジスタ / 量子ドット / ホットエレクトロ / GaAs / AlAs超格子 / ストライプ層 / ホットエレクトロン / 選択ドーピング / 半導体超格子 / 多層量子ホール系 / カイラル表面伝導 / 複合フェルミオン / ホットエレクトロン波 / 共鳴トンネルダイオード / 空間変調磁場 / シリコンナノデバイス / 電子波干渉デバイス / 電子電子ウムクラップ散乱 / 巨大ステップ
Research Abstract

(221)A CaAs基板上の分子線エピタキシャル成長でInGaAs表面に形成される周期36nm、振幅1.8nmのコラゲーションを利用した世界で最も高均一の自己形成型InGaAs/GaAs量子細線層を40層積層した。12Kで880nmに観測されたホトルミネッセンス(PL)ピークの半値幅は7.2meVで、量子細線層一層のPL半値幅6.6meVに比較して殆ど増加せず、体積あたりの密度の高い量子細線が作製できることが明らかになった。(冷水)半導体量子ドットにおける電子輸送現象を自己無撞着に解く方法について研究を行った.量子ドット構造における電子の波動関数と電位分布を自己無撞着に解き.電子伝導が量子ドットの数や大きさに依存することを定量的に示した.(濱口)GaAs(100)基板上に成長したZnSe表面上に自己形成型CdSe量子ドットを分子線成長法で作製し、数十nmの空間分解能を持った近接場光学顕微鏡を用いて孤立したCdSe量子ドットからのイメージ、および、2次元島を反映するイメージを得た。(中島)集束MnイオンビームプロセスによりGaAs基板にMnを局所注入した領域の磁性をより明確にするため、磁気力顕微鏡による測定を行なった結果、Mn注入領域に強磁性層の存在を示唆する像が観測され、本プロセスが局所強磁性層の形成に有効であることを示した。(蒲生)固体中のホットエレクトロンに対して二重スリット干渉観測を達成した。50meV以上熱平衡から外れて一方向に高速走行する電子に対するものであること、25nm間隔という極めて狭い間隔の二重スリットによること、の二点で従来にない達成である。これによりフーリエ変換演算のような波動性に基づく機能を用いるデバイス創成へ道を拓いた。バリスティック走行を最大限利用するホットエレクトロントランジスタの動作を達成した。さらに、コレクタベース間容量を最小化できる埋込金属コレクタHBTを作製し動作を得た。(古屋)ABリングに量子ドットを埋め込んだ系におけるFano効果を詳細に調べ,量子ドットを通過する電子の位相コヒーレンスの様子を明らかにした.2次元電子系のアンチドット格子におけるAB振動およびAAS振動の温度依存性を調べそれぞれのデコヒーレンス機構を議論した.空間変化磁場下の量子細線においてスネーク軌道に起因する非対称伝導を観測し,電子電子散乱と境界散乱の複合効果として解釈した.(家)VLSI互換プロセスを用いたシリコンドット形成法を改良し,直径約2nmのシリコン量子ドットをチャネル中に有する単正孔トランジスタの作製に成功した.このトランジスタは,室温において山谷比40という巨大なクーロンブロッケード振動を示す.また,共鳴トンネルによる巨大な負性微分コンダクタンス(山谷比11.8)も示す.(平本)磁場によるミニバンド伝導消失に関して最近ノッティンガム大学のEaves教授のグループらにより系統的な測定が行わた.そこで,本年度は,非平衡グリーン関数法を用いて,測定結果との比較検討を行い,良い一致を得た.また,シュタルク・サイクロトロン共鳴と共鳴光学フォノン散乱とが超格子の電気伝導特性に与える影響について,実験的・理論的に調べた.(森)

Report

(5 results)
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (42 results)

All Other

All Publications (42 results)

  • [Publications] Y.Ohno: "Polarization control of a vertical cavity surface emitting lasers using self-organized quantum wires grown on (775)B-oriented GaAs substrate by molecular beam epitaxy"J.Vac.Sci.Technol.B. (in press). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Kitada: "Photoreflectance characterization of GaAs/AlAs quantum wells with (411)A super-flat interfaces grown by molecular beam epitaxy"Physica E. 21. 722-726 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Kobayashi: "Electrontransport in quantum dot arrays : Self-consistent modeling"Physica E. 19. 188 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] N.Mori: "Nonequilibrium Green's function approach to resonant transport in semiconductor superlattices"Physica E. (印刷中). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Itou: "Maskless Mn implantation in GaAs using focused Mn ion beam"Nucl.Instr.and Meth.. 91・21. 216803-1-216803-4 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] F.Wakaya: "Contact Resistance of Multiwall Carbon Nanotubes"Microelectric Engineering. 67-68. 853-857 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Furuya: "Young's Double-Slit Interference Observation of Hot Electrons in Semiconductors"Physical Review Letters. 91・21. 216803-1-216803-4 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Yokoyama: "Fabrication of GaInAs/InP Heterojunction Bipolar Transistors with a Single Tungsten Wire as Collector Electrode"Jpn.J.Appl.Phys.. 42,Pt2,12B. L1501-L1503 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Hiramoto: "Quantum effects and single-electron charging effects in nano-scale silicon MOSFETs at room temperature"Materials Science and Engineering B. 101・1-3. 24-27 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Saitoh: "Room-Temperature Observation of Negative Differential Conductance Dueto Large Quantum Level Spacing in Silicon Single-Electron Transistor"Jpn.J.Appl.Phys.. 43・2A. L210-L213 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Kobayashi: "Mesoscopic Fano Effect in a uantum Dot Embedded in an Aharonov-Bohm Ring"Phys.Rev.B. B68. 235304 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] A.Endo: "Anisotropic Transport of Unidirectional Lateral Superlattice in High Landau Levels"Physica E. 18. 111-113 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Kanamori: "Room Temperature oscillation of self-organized In_<0.2>Ga_<0.8>As/GaAs quantum wire lasers grown on(221)A GaAs substrates by molecular beam epitaxy"J.Vac.Sci.Technol.. B20・4. 1493-1495 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Kitada: "Single-particle relaxation times in a psueudomorphic In_<0.7>Ga_<0.3> AS/In_<0.52>As_<0.48>As QW-HEMT structure with (411)A super-flat interfaces grown by MBE"Physica E. 13. 657-662 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Mori: "Magneto-tunneling spectroscopy of quantum structures"Microelectronic Engineering. 63. 667-670 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Mori: "Transport in quantum dot arrays"Physica E. 13. 667-670 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yasuhiro Murase: "The effect of upper barrier layer growth on self-assembled CdSe quantum dots"Phys. Stat. Sol. (b). 229. 457-461 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Kenzo Maehashi: "Relaxation mechanisms of electronic states in CdSe/ZnSe quantum dots studied by selectively excited photoluminescence measurements"Jpn. J. Appl. Phys. 41. L1446-L1448 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] F.Wakaya: "Position control of carbon nanotube using patterned electrode and electric field"Microelectronic Engineering. 63. 27-31 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Machida: "Phase coherence and temperature dependence of current-voltage characteristics at low-current and low-voltage region of double-barrier resonant-tunneling diode"41・7A. 4469-4473 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Kobayashi: "Tuning of the fano effect through quantum dot in an Aharonov-Bohm interferometer"Phys. Rev. Lett. 88. 256806-1-4 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.Endo: "Anisotropic transport in a unidirectional lateral superlattice around half filling of the second Landau level"Phys. Rev. B. 66. 075333-1-5 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Saitoh: ""Observation of current staircase due to large quantum level spacing in a silicon single-electron transistor with low parasitic series resistance"Journal of Applied Physics. 91・10. 6725-6728 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Masumi Saitoh: "Effects of oxidation process on the tunneling barrier structures in room-temperature operating silicon single-electron transistors"IEEE Transactions on Nanotechnology. 1・4. 6725-6728 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Mori: "Main Monte Carlo simulation of miniband conduction in Landau-quantized superlattices"Physica B. 298. 329-332 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Mori: "Transport in quantum dot arrays"Physica E. (to be published). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Machida: "Coherent hot-electron emitter"Japanese Journal of Applied Physics. 44. 64 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Nagase: "Phase-braking effect appearing in the current -voltage characteristics of double-barrier resonant-tunneling diodes -Theoretical fitting over four orders of magnitude-"Japanese Journal of Applied Physics. 40. 3018 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Saitoh: "Large Electron Addition Energy above 250 meV in the Silicon Quantum Dot in a Single Electron Transistor"Japanese Journal of Applied Physics. 40・pt.13. 2010-2012 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Saitoh: "Transport spectroscopy of the ultrasmall silicon quantum dot in a single-electron transistor"Applied Physics Letters. 79. 2025-2027 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Endo,S.Katsumoto,and Y.Iye: "Envelope of commensurability magnetoresistance oscillation in unidirectional lateral superlattices"Physical Review B. 62. 16761-16767 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] A.Endo and Y.Iye: "Novel structures near ν=9/2 in short period lateral superlattices"Solid State Communication. 117. 249-254 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] N.Machida and K.Furuya: "Numerical simulation of hot electron interference in a solid state biprism : Conditions for interference observation"Journal of Applied Physics. 88. 2885-2891 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] N.Machida and K.Furuya: "Coherent hot electron emitter"Japanese Journal of Applied Physics. 40. 64-68 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Kobayashi,T.Ota,K.Maehashi H.Nakashima,Y.Ishiwata,S.Shin: "Photoluminescence inner core excitation in semiconductor quantum structures"Physica E. 7. 595-599 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] F.Wakaya,S.Mandai,S.Nakamichi,S.Iwabuchi,and K.Gamo: "Resistively-coupled single-electron transistor using tunnel gate resistor"Superlattices and Microstructures. 27. 603-606 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] L. Eaves, H. M. Murphy, A. Nogaret S. T. Stoddart, P. C. Main, M. Henini, N. Mori, and C. Hamaguchi: "Magnetic field quenching of miniband conduction in quasi-one-dimensional superlattices"Physica B. 272. 190-193 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Torii, K. Bando, B. R. Shim, K. Maehashi and H. Nakashima: "Transmission electron microscopy and photoluminescence characterization of InAs quantum wires on vicinal GaAs (110) substrates by molecular beam epitaxy"Japanese Journal of Applied Physics. 38. 4673-4675 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] F. Wakaya, S. Iwabuchi, H. higurashi, Y. Nagaoka, and K. Gamo: "Possible control method for single electron tunneling based on environmental impedance modulation"Applied Physics Letters. 74. 135-137 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] L. -E. Wernersson, M. Suhara, N. Carlsson, K. Furuya, B. Gustafson, A. L.- itwin, L. Samuelson, and W. Seifer: "Lateral confinement in a resonant tunneling transistor with a buried metallic gate"Applied Physics Letters. 74. 311-313 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Kato, A. Endo, M. Sakairi, S. Katsumoto, and Y. Iye: "Electron-electron Umklapp process in two-dimensional electron gas undedr a spatially alternating magnetic field"Japanese Journal of Applied Physics. 68. 1492-1495 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Ishikuro and T. Hiramoto: "On the origin of tunneling barriers in silicon single electron and single hole transis*"Applied Physics Letters. 74. 1126-1128 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2018-03-28  

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