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Detection of Mass-and Force at the Atomic Level using a Nanometric Oscillator

Research Project

Project/Area Number 11305003
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionThe University of Tokyo

Principal Investigator

KAWAKATSU Hideki  Institute of Industrial Science, The University of Tokyo, Associate Professor, 生産技術研究所, 助教授 (30224728)

Co-Investigator(Kenkyū-buntansha) HOSHI Yasuo  Institute of Industrial Science, The University of Tokyo, Research Associate, 生産技術研究所, 助手 (80301133)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥45,190,000 (Direct Cost: ¥44,500,000、Indirect Cost: ¥690,000)
Fiscal Year 2001: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2000: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1999: ¥40,100,000 (Direct Cost: ¥40,100,000)
Keywordsafm / spm / Nanocantilever / force spectroscopy / condensed matter / 質量検出 / AFM / 力検出 / 表面物理 / STM / 近接場 / 質量
Research Abstract

An Atomic Force Microscope for nanocantilevers measuring from a few 100 nm to a few ?m in length was implemented. The natural frequencies of the nanocantilevers lie in the range of 1 MHz to 1 GHz, and optical detection schemes adapted to their size and frequency range was selected. A helium neon laser with a beat frequency of 890 MHz was used as the laser source. The beat was shifted to 1090 MHz by an acousto-optical-modulator, and used as the carrier for heterodyne laser Doppler measurement. This enabled velocity measurement up to around 100 MHz. The probe beam of the Doppler interferometer was guided to the nanocantilever by a single mode polarization-maintaining optical fiber terminated by a collimating lens, a quarter wave plate and a focusing lens. Reflected light was collected by the same optics and mixed with the reference beam. Self-excitation of the nanocantilever at its lowest natural frequency was implemented for an amplitude of 1 nmp-p at 36 MHz. The Q factor of the cantilever was 8000. Noise effective amplitude of the Doppler interferometer was smaller than 10 pmp-p above 10 MHz. Frequency detection was possible for a nanowire measuring 100 nm in width.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] H.Kawakatsu et al.: "Millions of cantilevers for atomic force microscopy"review of scientific instruments. march(未定). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Kawakatsu et al.: "A versatile scanning force microscope for a scanning electron microscope"review of scientific instruments. (未定). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Kawakatsu et al.: "Fabrication of Array of Single-Crystal Si Multi-Probe Cantilevers with Several Microns Size for Parallel Operation of Atomic Force Microscope"Sensors and Acturators. (未定). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Kawakatsu et al.: "Towards atomic force microscopy up to 100 MHz"review of scientific instruments. (未定). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Kawakatsu et al.: "Development of a versatile Atomic Force Microscope within a scanning electron microscope"review of scientific instruments. (未定). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Kawakatsu et al.: "Strength measurement and calculations on sillcon based nanometric oscillators for SFM operating in the GHz range"Applied Surface Science. 157. 320-325 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 川合知二 監修: "ナノテクノロジーのすべて"工業調査会. 92-95 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Kawakatsu, D. Saya, S. Kawai, K. Fukushima, H. Toshiyoshi, and H. Fujita: "Millions of cantilevers for atomic force microscopy"Ref. Sci. Instrum.. 2002.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] D. Saya, K. Fukushima, H. Toshiyoshi, H. Fujita, G. Hashiguchi, and H. Kawakatsu: "Fabrication of silicon-based filliiform neched nanometric oscillators"Jpn. J. Appl. Phys.. 39. 3793 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Kawakatsu, H. Toshiyoshi, D. Saya, K. Fukushima and H. Fujita: "Fabrication of a siilicon based nanometric oscillator with a tip form mass for scanning force microscopy operating in the GHz range."J. Vac. Sci. Technol.. B16. 607 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Kawakatsu, et al.: "Millions of cantilevers for atomic force microscopy"review of scientific instruments. march(accepted). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Kawakatsu, et al.: "A versatile scanning force microscope for a scanning electron microscope"review of scientific instruments. (accepted). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] D.Saya, H.Kawakatsu, et al.: "Fabrication of Array of Single-Crystal Si Multi-Probe Cantilevers with Several Microns Size for Parallel Operation of Atomic Force Microscope"

    • Related Report
      2001 Annual Research Report
  • [Publications] D.Saya,H.Kawakatsu et al.: "Fabrication of silicon-based filiform-necked nanometric oscillators"Jpn.J.Appl.Phys.. 39. 3793-3798 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Kawakatsu et al.: "Strength Measurement and Calculations on Silicon Based Nanometric Oscillators for Scanning Force Microcopy Operating up to the GHz Range"Applied surface science. 157. 320-325 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Kawakatsu et al.: "Fabrication of silicon based nanometric oscillator with a tip form mass for scanning force microscopy operating in the GHz range"J.Vac.Sci.Technol.. B18. 607-611 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Kawakatsu et al: "Development of a Versatile Atomic Force Microscope within a Scanning Force Microscope"Jpn.J.Appl.Phys.. 39. 3747-3749 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H. Kawakatsu et al.: "Fabrication techniques of Sillicon Based Nanomertric Oscillators for Scanning Force Microcopy Operating in the GHz Range"J. Vac. Sci. Technol.. March. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Kawakatsu et al.: "A silicon based nanometric oscillator for SFM operating in the 100 NHz range"Jpn. J. Appl. Phys. 38. 3962-3965 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Kawakatsu et al.: "Feasibility studies on a nanometric oscillator fabricated by surface diffusion for use as a force detector in SFM"Jpn. J. Appl. Phys. 38. 3954-3957 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Kawakatsu et al.: "Strength Measurement and Calculations on Silicon Based Nanometric Oscillators for Scanning Force Microcopy Operating up to the GHz Range"Applied surface science. March. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 川勝英樹: "走査型プローブ顕微鏡と関連のある可視化技術"電気学会E分冊. June. (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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