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Studies on selective productions of radicals using electron temperature controlled plasmas

Research Project

Project/Area Number 11305004
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionNagoya University

Principal Investigator

GOTO Toshio  Nagoya University, Graduate school of Eng., Professor, 工学研究科, 教授 (50023255)

Co-Investigator(Kenkyū-buntansha) ITO Masafumi  Wakayama University, Faculty of Systems Eng., Associate Professor, システム工学部, 助教授 (10232472)
HORI Masaru  Nagoya University, Graduate school of Eng., Associate Professor, 工学研究科, 助教授 (80242824)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥10,310,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2001: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2000: ¥5,500,000 (Direct Cost: ¥5,500,000)
Keywordsplasma / electron temperature / radical / selective production / etching / CVD / process / gas phase reaction
Research Abstract

We have achieved selective productions of radicals by combining feed gases and various plasma sources as follows ;
1. We have clarified that nitrogen radical density can be controlled through controlling the electron beam energy and current of electron-beam excited N_2 plasma, which is a promising high-density nitrogen radical source under ultra low operating pressures. Moreover, we have developed a novel compact EBEP source and applied to not only high-density radical sources but also to processes of diamond-like carbon deposition and surface cleaning of glass substrates. In the deposition process of diamond-like carbon, we have successfully synthesized the diamond-like carbon films on electrically floating substrates.
2. We have successfully synthesized nano-crystalline diamond at the low operating pressure of 1.3Pa for the first time by producing CH_3, H, and OH radicals selectively rather than C atoms and by controlling the ratio of neutral radicals to ionic radicals.
3. We have realized silane/hydrogen plasmas with very low electron temperature of 0.5 eV by using ultra-high frequency (UHF, 500MHz) power supply and found that the ratio of Si atom to H atom can be controlled by using pulse modulation of the plasma. Moreover, we have found that the crystallinity and orientation of deposited microcrystallin silicon film can be controlled by controlling Si/H atom ratio and SiH_3/H radical ratio.
4. We have found that the nitrogen atom density in UHF N_2/H_2/NH_3 plasma can be selectively enhanced compared to that in RF (13.56MHz) N_2/H_2/NH_3 plasma and realized the very fine anisotropic etching of low dielectric organic films.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (60 results)

All Other

All Publications (60 results)

  • [Publications] H.Ito, K.Teii, M.Ishikawa, M.Ito, M.Hori, T.Takeo, T.Kato, T.Goto: "Diamond deposition and behavior of atomic carbon species in a low pressure inductively coupled plasma"Jpn. J. Appl. Phys.. 38・7B. 4504-4507 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nakamura, M.Hori, T.Goto, M.Ito, N.Ishii: "Spatial distribution of absolute CFx radical densities and its formation mechanism in high-density fluorocarbon plasmas using novel system of single-path infrared laser absorption spectroscopy combined with laser-induced fluorescence spectroscopy"J. Appl. Phys.. 38・12A. L1469-L1471 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K.Teii, H.Ito, M.Hori, T.Takeo, T.Goto: "Kinetics and role of C, O, and OH in low-pressure nanocrystalline diamond growth"J. Appl. Phys.. 87・9. 4572-4579 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Tada, S.Takashima, M.Ito, M.Hori, T.Goto, Y.Sakamoto: "Measurement and control of absolute nitrogen atom density in an electron-beam-excited plasma using vacuum ultraviolet absorption spectroscopy"J. Appl. Phys.. 88・4. 1756-1759 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Ito, K.Teii, H.Funakoshi, M.Hori, T.Goto, M.Ito, T.Takeo: "Loss kinetics of carbon atoms in low-pressure high density plasmas"J. Appl. Phys.. 88・8. 4537-4541 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K.Murata, Y.Mizutani, E.Iwasaka, S.Takashima, M.Hori, T.Goto, S.Samukawa T.Tsukada: "Growth of preferentially oriented microcrystalline silicon film using pulse-modulated ultrahigh-frequency plasma"Jpn. J. Appl. Phys.. 40・1A/B. L4-L6 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Takashima, M.Hori, T.Goto, K.Yoneda: "Behavior of hydrogen atoms in ultrahigh-frequency silane plasma"J. Appl. Phys.. 89・9. 4727-4731 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K.Teii, M.Hori, T.Goto: "Dual-electrode biasing for controlling ion-to-adatom flux ratio during ion-assisted deposition of diamond"J. Appl. Phys.. 89・9. 4717-4718 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Ohta, A.Nagashima, M.Hori, T.Goto: "Effect of ions and radicals on formation of silicon nitride gate dielectric films using plasma chemical vapor deposition"J. Appl. Phys.. 89・9. 5083-5087 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Takashima, S.Arai, M.Hori, T.Goto, A.Kono, M.Ito, K.Yoneda: "Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas"J. Vac. Sci & Technol.. A19・2. 599-602 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Ohta, M.Hori, T.Goto: "Ultrathin fluorinated silicon nitride gate dielectric films formed by remote plasma enhanced chemical vapor deposition employing NH_3 and SiF_4"J. Appl. Phys. 90・4. 1955-1961 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nakamura, M.Hori, T.Goto, M.Ito, N.Ishii: "Spatial distribution of the absolute densities of CF_x radicals in fluorocarbon plasmas determined from single-path infrared laser absorption and laser-induced fluorescence"J. Appl. Phys.. 90・2. 580-586 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 高島成剛, 堀 勝, 後藤俊夫: "マイクロプラズマを光源に用いた真空紫外吸収分光法による原子密度計測"真空. 44・9. 802-807 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 堀 勝, 後藤俊夫: "赤外半導体レーザ吸収分光法による半導体プロセスモニタリング"日本赤外線学会誌. 11・1. 2-4 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nakamura, M.Hori, T.Goto, M.Ito, N.Ishii: "Spatial distributions of the absolute CF and CF_2 radical densities in high-density plasma employing low global warming potential fluorocarbon gases and precursors for film formation"J. Vac. Sci. & Technol.. A19・5. 2134-2141 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Takashima, M.Hori, T.Goto, A.Kono, K.Yoneda: "Absolute concentration and loss kinetics of hydrogen atom in methane and hydrogen plasmas"J. Appl. Phys.. 90・11. 5497-5503 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Nagai, S.Takashima, M.Hiramatsu, M.Hori, T.Goto: "Behavior of atomic radicals and their effects on organic low dielectric constant film etching in high density N_2/H_2 and N_2/NH_3 plasmas"J. Appl. Phys.. 91・5. 2615-2621 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Ito, K.Kamiya, M.Hori, T.Goto: "Subsurface reactions of silicon nitride in a highly selective etching process of silicon oxide over silicon nitride"J. Appl. Phys.. 91・5. 3452-3458 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ito, K. Teii, M. Ishikawa, M. Ito, M. Hori, T. Takeo, T. Kato, T. Goto,: "Diamond deposition and behavior of atomic carbon species in a low pressure inductively coupled plasma"Jpn. J. Appl. Phys.. 38, Part1(7B). 4504-4507 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakamura, M. Hori, T. Goto, M. Ito, N. Ishii: "Spatial distribution of absolute CFx radical densities and its formation mechanism in high-density fluorocarbon plasmas using novel system of single-path infrared laser absorption spectroscopy combined with laser-induced fluorescence spectroscopy __________"J. Appl. Phys.. 38, Part2(12A). L1469-L1471 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Teii, H. Ito, M. Hori, T. Takeo, T. Goto: "Kinetics and role of C, O, and OH in low-pressure nanocrystalline diamond growth"J. Appl. Phys.. 87(9). 4572-4579 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Tada, S. Takashima, M. Ito, M. Hori, T. Goto, Y. Sakamoto: "Measurement and control of absolute nitrogen atom density in an electron-beam-excited plasma using vacuum ultraviolet absorption spectroscopy"J. Appl. Phys.. 88(4). 1756-1759 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ito, K. Teii, H. Funakoshi, M. Hori, T. Goto, M. Ito, T. Takeo: "Loss kinetics of carbon atoms in low-pressure high density plasmas"J. Appl. Phys.. 88(8). 4537-4541 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Murata, Y. Mizutani, E. Iwasaka, S.Takashima, M. Hori, T. Goto, S. Samukawa and T. Tsukada: "Growth of preferentially oriented macrocrystalline silicon film using pulse-modulated ultrahigh-frequency plasma"Jpn. J Appl. Phys.. 40, Part2(1A/B). L4-L6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Takashima, M. Hori,T. Goto, and K. Yoneda: "Behavior of hydrogen atoms in ultrahigh-frequency silane plasma"J. Appl. Phys.. 89,9. 4727-4731 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Teii, M. Hori, and T. Goto: "Dual-electrode biasing for controlling ion-to-adatom flux ratio during ion-assisted deposition of diamond"J. Appl. Phys.. 89(9). 4714-4718 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohta, A. Nagashima, M. Hori, and T. Goto: "Effect of ions and radicals on formation of silicon nitride gate dielectric films using plasma chemical vapor deposition"J. Appl. Phys.. 89(9). 5083-5087 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Takashima, S. Arai, M. Hori, T. Goto, A. Kono, M. Ito, and K. Yoneda: "Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas"J. Vac. Sci. & Technol.. A19(2). 599-602 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohta, M. Hori, and T. Goto: "Ultrathin fluorinated silicon nitride gate dielectric films formed by remote plasma enhanced chemical yapor deposition employing NH_3 and SiF_4"J. Appl. Phys.. 90(4). 1955-1961 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakamura, M. Hori, T. Goto, M. Ito, and N. Ishii: "Spatial distribution of the absolute densities of CF_x radicals in fluorocarbon plasmas determined from single-path infrared laser absorption and laser-induced fluorescence"J. Appl. Phys.. 90(2). 580-586 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Takashima, M. Hori, T. Goto: "Measurement of atomic density by ultraviolet absorption spectroscopy using micro-plasma as a light source"Vacuum. 44(9). 802-807 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Hori, T. Goto: "Monitoring of semicondoctor processing by using infrared diode laser absorption spectroscopy"The Japan society of infrared science and technology. 11(1). 2-4 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakamura, M. Hori, T. Goto, M. Ito, and N. Ishii: "Spatial distributions of the absolute CF and CF_2 radical densities in high-density plasma employing low global wanning potential fluorocarbon gases and precursors for film formation"J. Vac. Sci. & Technol.. A19(5). 2134-2141 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Takashima, M. Hori, T. Goto, A. Kono, and K. Yoneda: "Absolute concentration and loss kinetics of hydrogen atom in methane and hydrogen plasmas"J. Appl. Phys.. 90(11). 5497-5503 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Nagai, S. Takashima, M. Hiramatsu, M. Hori, and T. Goto: "Behavior of atomic radicals and their effects on organic low dielectric constant film etching in high density N_2/H_2 and N_2/NH_3 plasmas"J. Appl. Phys.. 91(5). 2615-2621 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Ito, K. Kamiya, M. Hori, T. Goto: "Subsurface reactions of silicon nitride in a highly selective etching process of silicon oxide over silicon nitride"J. Appl. Phys.. 91(5). 3452-3458 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Takashima: "Behavior of Hydrogen Atoms in Ultrahigh-frequency Silane Plasma"J. Appl. Phys. 89. 4727-4731 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K. Teii: "Dual-Electrode Biasing for Controlling Ion-to Adatom Flux Ratio during Ion-Assisted Deposition of Diamond"J. Appl. Phys.. 89. 4714-4718 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H. Ohta: "Effect of Ion and Radicals on Formation of Silicon Nitride Gate Dielectric Film Using Plasma Chemical Vapor Deposition"J. Appl. Phys.. 89. 5083-5087 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S. Takashima: "Development of Vacuum Ultraviolet Absorption Spectroscopy Technique Employing Nitrogen Molecule Microdischarge Hollow Cathode Lamp for Absolute Density Measurements of Nitrogen Atoms in Process Plasma"J. Vac. Sci. Technol.. A19・2. 599-602 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M. Nakamura: "Measurement of Spatial Distribution of SiF_4 and SiF_2 Densities in High Density SiF_4 Plasma Using Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique"J. Appl. Phys. 90・4. 1955-1961 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H. Ohta: "Ultrathin Fluorinated Silicon Nitride Gate Dielectric Films Formed by Remote Plasma Enhanced Chemical Vapor Deposition Employing NH_3 and SiF_4"J. Appl. Phys.. 90・2. 580-586 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 高島成剛: "マイクロプラズマを光源に用いた真空紫外吸収分光法による原子密度計測"真空. 44・9. 802-807 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 堀 勝: "赤外半導体レーザ吸収分光法による半導体プロセスモニタリング"日本赤外線学会誌. 11・1. 2-14 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M. Nakamura: "Spatial Distribution of the Absolute CF and CF_2 Radical Densities in High-Density Plasma Employing Low Global Warming Potential Fluorocarbon Gases and Precursors for Film Formation"J. Vac. Sci. Technol.. A19・5. 2134-2141 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S. Takashima: "Absolute Concentration and Loss Kinetics of Hydrogen Atom in Methane and Hydrogen Plasma"J. Appl. Phys.. 90・11. 5497-5503 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H. Nagai: "Behavior of Atomic Radicals and their Effects on Organic Low Dielectric Constant Film Etching in High Density N_2/H_2 and N_2/NH_3 Plasmas"J. Appl. Phys. 91・5. 2615-2621 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] M. Ito: "Subsurface Reaction of Silicon Nitride in a highly Selective Etching Process Silicon Oxide over Silicon Nitride"J. Appl. Phys.. 91・5. 3452-3458 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Nakamura: "Spatial Distribution Measurement of Absolute Densities of CF and CF_2 Radicals i n a High Density Plasma Reactor Using Combination of single Path Infrared Diode Laser Absorption and Laser-Induced Fluorescence Technigue"Jpn.J. Appl.Phys.. 38. L1469-1471 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Ito: "Diamond Deposition and Behavior of Atomic carbon species in a Low-Pressure Inductively Coupled Plasma"Jpn.J.Appl.phys.. 38. 4504-4507 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Teii: "Kinetics and Role of C.O and OH in Low-Pressure Nanocrystalline Diamond Growth"J.Appl.Phys.. 87. 4572-4579 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Tada: "Measurement and Contol of Absolute Nitrogen Atom Density in an Electron Beam Exited Plasma Using Vacuum Ultraviolet Absorption Spectroscopy"J.Appl.phys.. 88. 1756-1759 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Ito: "Loss Kinetics of carbon Atoms in Low-pressure High Density Plasmas"J.Appl.phys.. 88. 4537-4541 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Murata: "Growth of Preferentially Oriented Microcrystalline Silicon Film Using Pulse-Modulated Ultrahigh-Frequency Plasma"Jpn.J.AMll.phys.. 40. L4-L6 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Seigou Takashima: "Characteristics of H_2 Micro Hollow cathode Plasma and Its Application for Vacuum Ultraviolet Absorption Spectroscopy"Proc.of International Symposium on Electron-Molecule Collisions and Swarm. 99-100 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Seigou Takashima: "Development of Vacuurm Ultraviolet Absorption Spectroscopy using High Pressure H_2 Microdischarge Hollow Cathode Lamp for Measurement of H_2 Atom Density in Plasmas"Bulletin of the American Physical Society: The 52ND Annual Gaseous Electronics Conference. 16 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Seigou Takashima: "Measuremant of Atomic Species in High Density Reactive Plasmas using Ultraviolet Absorption Spectroscopy with High Pressure Microdischarge Hollow Cathode Lamp"Bulletin of the American Physical Society: The 52ND Annual Gaseous Electronics Conference. 35 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Masafumi Ito: "Diagnostics of ultra high frequency SiH_4/H_2 plasmas for synthesizing polycrystalline silicon thin film at low substrate temperatures"Bulletin of the American Physical Society: The 52ND Annual Gaseous Electronics Conference. 54 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Nakamura: "Spatial Distribution Measuremant of Absolute Densities of CF and CF_2 Radicals in a High Density Plasma Reactor Using a Combination of Single Path Infrared Diode Caser Absorption Spectroscopy and laser-Induced Fluorescence Technique"Jpn.J.Appl. Phys.. 38・12A. 1469-1471 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Ito: "Diamond Formation Using a Low-Pressure Inductively Coupled Plasma"Proc.of.46th International Symposium of American Vacuum Society. 46. 54 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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