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3-Dimensional Element Mapping with X-ray Fluorescence Imaging Microscope

Research Project

Project/Area Number 11305011
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionUniversity of Tsukuba

Principal Investigator

AOKI Sadao  Institute of Applied Physics, Professor, 物理工学系, 教授 (50016804)

Co-Investigator(Kenkyū-buntansha) WATANABE Norio  Institute of Applied Physics, Lecture, 物理工学系, 講師 (80241793)
青田 達也  筑波大学, 物理工学系, 助手 (20292526)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥40,410,000 (Direct Cost: ¥39,000,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2001: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2000: ¥9,500,000 (Direct Cost: ¥9,500,000)
Fiscal Year 1999: ¥24,800,000 (Direct Cost: ¥24,800,000)
Keywordsx-ray fluorescence / x-ray microscope / Wolter mirror / analysis / imaging / CCD camera / synchrotron radiation / 3-dimensional image / x線顕微鏡 / 結像型 / 元素分析 / 3次元 / マッピング / 顕微鏡 / アンジュレーター
Research Abstract

X-ray fluorescence has been used to investigate the composition of materials. The spectrum of x-ray fluorescence defines a specific element. So far, being the lack of x-ray imaging device 3-dimensional element mapping was very difficult. A Wolter mirror which has been developed in the University of Tsukuba enables us to image x-ray fluorescence directly. The x-ray fluorescence imaging microscope(XFIM) consists of an x-ray source (synchrotron radiation), an objective mirror(Wolter mirror) and an x-ray area detector(CCD camera).
Synchrotron radiation facilities we used were the Photon Factory(BL3C2) and the Spring-8(BL39XU). We could obtained x-ray fluorescence images whose atomic numbers are from 20(Ca) to 30(Zn). 3-dimensional element mapping was succeeded from fifty x-ray fluorescence images which were recorded with a CCD camera by rotating a sample. The magnification of the Wolter mirror was 10 and it can image x-ray fluorescence up to 12 keV. The resolving power of the mirror is better than 10 μm. The detection sensitivity of the x-ray fluorescence imaging microscope was better than 1 pg/pixel. Test samples of Fe, Cu and Ni wires were recorded and reconstructed. The inclusions of a synthesized diamond were also recorded and 3-dimensional distribution of Fe, Co and Ni could be obtained.
Dynamical observation of Cu deposition at copper sulfate electrolysis was succeeded, which demonstrated that the microscope has a relatively large depth of view. Many other applications of non-destructive observation will be possible by using an x-ray fluorescence imaging microscope.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] K.Yamamoto: "Elemental Mapping with an X-ray fluorescence imaging microscope"X-Ray Microscopy : Proceeding of the Sixth International Conference AIP. 259-262 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K.Yamamoto: "Mapping of a particular element using an absorption edge with an X-ray fluorescence imaging microscope"J.Synchrotron. Rad.. 7. 34-39 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Takeuchi: "Full-field x-ray fluorescence imaging microscope with a Wolter mirror"Rev. Sci. Instrum. 71. 1279-1285 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N.Watanabe: "X-ray fluorescence microtomography with a Wolter mirror system"Nuclear Instruments and Methods in Physics Research -A. 467-468. 837-840 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Takeuchi: "Hard X-Ray Microtomography Using X-ray Imaging Optics"Jpn. J. Appl. Phys. 40・3A Part I. 1499-1503 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Ohigashi: "Elemental Analysis with a Full-Field X-ray Fluorescence Microscope and a CCD Photon Counting System"J. Synchroton Rad.. (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Takano, K. Yokota, S. Aoki: "Soft X-Ray Dark-Field Imaging Microscope with Welter-Type Grazing-Incidence Mirrors"Jpn.J.Appl.Phys. Vol.38. L1485-L1487 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Takano, S. Aoki: "Development of a Soft X-Ray Dark-Field Imaging Microscope"X-Ray Microscopy:Proceeding of the Six International Conference. AIP. 55-59 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N. Watanabe, S. Aoki, H. Takano, K. Yamamoto, A. Takeuchi, H. Tsubaki, T. Aota: "Phase-Contrast Hard X-Ray Imaging Microscope with Wolter Mirror Optics X-Ray Microscopy"Proceeding of the Six International Conference, AIP. 84-91 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Yamamoto, N. Watanabe, A. Takeuchi, H. Takano, T. Aota, M. Kumegawa, T. Ohigashi, R. Tanoue, H. Yokota, S. Aoki: "Elemental Mappping with an X-Ray Fluorescence Imaging Microscope"X-Ray Microscopy : Proceeding of the Six International Conference, AIP. 259-262 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Yamamoto, N. Watanabe, A. Takeuchi, H. Takano, T. Aota, M. .Fukuda, S. Aoki: "Mapping ofa particular element using an absorption edge with an X-ray fluorescence imaging microscope"Journal of Synchrotron Radiation. Vol.7. 34-39 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Takeuchi, S. Aoki, K. Yamamoto, H. Takano, N. Watanabe, M. .Ando: "Full-field x-ray fluorescence imaging microscope with a Wolter mirror"Rev. Sci. Instrum. Vol.71. 1279-1285 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Takeuchi, Y. Suzuki, K. Uesugi, S. Aoki: "At wavelength focusing properties evaluation of the Wolter type grazing incidence mirror"Nuclear Instruments and Methods in Physics Research. Vol.467-468. 302-304 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N. Watanabe, K. Yamamoto, H. Takano, T. Ohigashi, H. Yokosuka, T. Aota S. Aoki: "X-ray fluorescence microtomogtaphy with a Wolter mirror system"Nuclear Instruments and Methods in Physics Research. Vol. 467-468. 837-840 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Takeuchi, K. Uesugi, Y. Suzuki S. Aoki: "Hard X-Ray Microtomography Using X-Ray Imaging Optics"Jpn.J.AppL Phys. Vol. 40. 1499-1503 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Yokosuka, N. Watanabe, T. Ohshigashi, Y. Yoshida, S. Maeda, S. Aoki, Y. Suzuki, A. Takeuchi, H. Takano: "Zernike-Type Phase-Contrast Hard X-ray Microscope with a Zone Plate at the Photon Factory"Journal of Synchroton Radiation. (to be published). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Ohshigashi, N. Watanabe, H. Yokosuka, T. Aota, H. Takano, A. Takeuchi, S. Aoki: "Elemental Analysis with a Full-Field X-ray Fluorescence Microscope and a CCD Photon Counting System"Journal of Synchroton Radiation. (to be published). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Takano, S. Aoki, M. Kumegawa, N. Watanabe, T. Ohshigashi, T. Aota, K. Yamamoto, H. Yokosuka, R. Tanoue, Y. Tsujita, M. Ando: "X-ray scattering microscope with a Wolter mirror"Rev. Sci. Instrum. (to be published). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Takeuchi: "At wavelength focusing properties evaluation of the Wolter type grazing incidence mirror"Nuclear Instruments and Methods in Physics Research-A. 467-468. 302-304 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Watanabe: "X-ray fluorescence microtomogtaphy with a Wolter mirror system"Nuclear Instruments and Methods in Physics Research-A. 467-468. 837-840 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Takeuchi: "Hard X-Ray Microtomography Using X-Ray Imaging Optics"Jpn.J.Appl.Phys.. 40・3A PartI. 1499-1503 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 高野秀和: "X線暗視野顕微鏡の構築=斜入射光学系を用いた軟X線顕微鏡とその応用"光アライアンス. 12・6. 10-14 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Ohigashi: "Elemental Analysis with a Full-Field X-ray Fluorescence Microscope and a CCD Photon Counting System"Journal of Synchroton Radiation. (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Takano: "Development of a Soft X-ray Dark-Field Imaging Microscope"X-Ray Microscopy : Proceeding of the Sixth International Conference. 55-59 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] N.Watanabe: "Phase-Contrast hard X-ray Imaging Microscope with Wolter Mirror Optics"X-Ray Microscopy : Proceeding of the Sixth International Conference. 84-90 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Yamamoto: "Elemental Mapping with an X-Ray Fluorescence Imaging Microscope"X-Ray Microscopy : Proceeding of the Sixth International Conference. 259-262 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Kimetake Yamamoto,Norio watanabe,Akihisa Takeuchi,Hidekazu Takano,Tatsuya Aota,Masanori Fukuda,Sadao Aoki: "Mapping of Particular Element Using an Absorption Edge with an X-ray Fluorscence Imaging Microscope"J.Synchrotron Rad.. Vol.7. 34-39 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Akihisa Takeuchi,Sadao Aoki,Kimitake Yamamoto,Hidekazu Takano,Norio watanabe,Masami Ando,: "A Full-Field X-ray Fluorescence Imaging Microscope with a Wolter Mirror"Rev.Sci.Instrum.. Vol.71.No.3. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Takano,K.Yokota.S.Aoki: "A Soft X-ray Dark-Field Imaging Microscope with Wolter-Type Grazing Incldence Mirrors"Jpn.J.Appl.Phys.. 38(12A). L1485-L1487 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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