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A new method of position and attitude detection based on an angle sensor

Research Project

Project/Area Number 11305013
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionTohoku University

Principal Investigator

KIYONO Satoshi  Tohoku University, Graduate school of Engineering, Professor, 大学院・工学研究科, 教授 (40005468)

Co-Investigator(Kenkyū-buntansha) SHIMIZU Hiroki  Tohoku University, Graduate school of Engineering, Research Associate, 大学院・工学研究科, 助手 (50323043)
YAMANAKA Masashi  Tohoku University, Graduate school of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (20292229)
GAO Wei  Tohoku University, Graduate school of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (70270816)
OKAZAKI Yuichi  National Institute fo Advanced Industrial Science and Technology, Research Institute of Mechanical Systems Engineering, leader, 機械システム研究部門・ファインファクトリー研究グループ, (研究職)リーダー
張 世宙  東北大学, 大学院・工学研究科, 助手 (30282099)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥36,010,000 (Direct Cost: ¥34,600,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2001: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2000: ¥9,600,000 (Direct Cost: ¥9,600,000)
Fiscal Year 1999: ¥20,300,000 (Direct Cost: ¥20,300,000)
Keywordsposition and attitude detection / multi degrees of freedom / angle information / sensor / angle grid / scanning laser beam / accuracy / self-calibration / 高速工具サーボ
Research Abstract

The objectives of this research is to propose a new multi-degrees-of-freedom encoder system by combining a 2-dimensional angle sensor and a 2-dimensional angle grid on which 2D sinusoidal angle patterns are generated. At first, we developed first prototype of surface encoder system to detect the X- and the Y- directional position/displacement with combining the newly developed angle sensor that could detect the local slope and the angle grid made with Fast tool servo. Second, modified surface encoder employing a scanning laser beam type angle sensor and new position detection method using interpolations of time domain are proposed. By using these, the surface encoder system has the ability of detecting pitch, roll and yaw in addition to the X- and the Y- directional positions : thus, it has been shown that 5DOF motions can be detected by this method. Furthermore, scanning type angle sensor has the merit of reducing the form error of the angle grid. Third, we propose the self-calibration method of the pitch of angle grid and have the result that position detection error can be reduced from 15 μm to 1 μm. Fourth, the new angle sensor that employ multi-spot light source was proposed and it was confirmed this sensor is effective to reduce the affection of form error of angle grid. At last, we combine the methods mentioned above and develop the multi-spot scanning type 2-dimensional angle sensor. With respect to the angle grid, a new method evaluating the form error of angle grid using 2-dimensional FFT has been developed. "Moreover, by applying this method, the form error induced by tool-shape has been reduced definitely. As an application of surface encoder, surface motor driven XYθz stage controlled by output signal of surface encoder was constructed and it is confirmed surface encoder is effective to make compact and simple the stage system.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] 小倉 一朗, 清野 慧, 岡崎 祐一: "2次元角度格子と2次元角度センサを組み合わせた2.変位検出機構の開発"情報工学会誌. 66・2. 272-276 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 清野 慧, 高 偉, 金井 雅也, 星野 唯, 清水 裕樹: "多自由度の位置と姿勢の精密検出法の研究"精密光学会誌. 67・3. 493-497 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 高 偉, 中田 衆得, 出島 秀一, 清野 慧: "サーフェスモータ駆動型多自由度ステージの位置決めの研究-第一報 サーフェスエンコーダを用いた位置検出システムの構築-"精密光学会誌. 67・12. 1981-1986 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 高 偉, 星野 唯, 清水裕樹, 清野 慧: "マルチスポット光源を用いたサーフェスエンコーダの研究"精密光学会誌. 68・1. 69-74 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Ichiro Ogura, Satoshi Kiyono, Yuichi Okazai: "Development of 2-D Displacement Sensors by Using 2-D Angle Grid and 2-D Angle Sensors"Journal of Japan Society For Precision Engineering. 66-2. 272-276 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Satoshi Kiyono, Wei Gao, Masaya Kanai, Tadashi Hoshino, Yuki Shimizu: "A New Method of Position Detection Using an Optical Scanning Angle Sensor"Journal of Japan Society For Precision Engineering. 67, 3. 493-497 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Wei Gao, Tomonori Nakada, Shuichi Dejima, Satoshi Kiyono: "Precision Positioning of a Surface Motor-driven Multi-axis Stage Using a Surface Encoder"Journal of Japan Society For Precision Engineering. 67, 12. 1981-1986 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Wei Gao, Tadashi Hoshino, Yuki Shimizu, Satoshi Kiyono: "A Surface Encoder with a Multi-Spot Light Source"Journal of Japan Society For Precision Engineering. 68, 1. 69-74 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Yuki Shimizu, Wei Gao, Satoshi Kiyono: "A new surface encoder for multi-axis position detection"Proceedings of American society for precision engineering, 2001 annual meeting. 25. 333-336 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Wei Gao, Tomonori Nakada, Satoshi Kiyono: "Precision positioning of a surface motor-driven XYθz stage using a surface encoder"Initiatives of precision engineering at the beginning of a millennium, Proceedings of 10th International Conference on Precision Engineering. 569-573 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 高 偉, 中田 衆得, 出島 秀一, 清野 慧: "サーフェスモータ駆動型多自由度ステージの位置決めの研究 -第一報 サーフェスエンコーダを用いた位置検出システムの構築-"精密工学会誌. 67・12. 1981-1986 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 高 偉, 星野 唯, 清水裕樹, 清野 慧: "マルチスポット光源を用いたサーフェスエンコーダの研究"精密工学会誌. 68・1. 69-74 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 出島 秀一, 矢内 宏明, 高 偉, 清野 慧: "サーフェスモータ駆動型多自由度ステージの位置決めの研究 -第2報 微小位置決め制御について-"2001年度精密工学会秋季大会学術講演会講演論文集. 536 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 矢内 宏明, 出島 秀一, 高 偉, 清野 慧: "サーフェスモータ駆動型多自由度ステージの位置決めの研究"2001年度精密工学会東北支部学術講演会講演論文集. 117-118 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Ping Cai,Satoshi Kiyono,Wei Gao,and Liangming Lin: "Analysis on the calibration of angle function in angle grid"Proceedings of of SPIE Vol.4222, In-Process Control and Inspection for Industry. 378-382 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Wei Gao,Satoshi Genda and Satoshi Kiyono: "In-process force monitoring in diamond turning of micro-patterns"Proceedings of of SPIE Vol.4222, In-Process Control and Inspection for Industry. 412-416 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 高偉,須藤正守,清野慧: "2次元角度格子製作システムの開発(第2報)角度格子製作の高精度化"日本機械学会2000年度年次大会講演論文集. 519-520 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 清水裕樹,高偉,清野慧: "角度情報をベースとする多自由度位置・姿勢検出法の研究-デジタルオシロスコープによる高速サンプリング-"精密工学会東北支部学術講演会. 59-60 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 荒木武,高偉,清野慧: "2次元角度格子の高精度創成に関する研究"日本機械学会東北支部第36期総会・講演会. (発表予定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 星野唯,高偉,清野慧: "角度情報をベースとする多自由度位置・姿勢検出法の研究-角度格子の格子間隔校正による検出精度の向上-"精密工学会2001年度春季学術講演会. (発表予定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 清野慧,高偉,金井雅也,星野唯,清水裕樹: "多自由度の位置と姿勢の精密検出法の研究"精密工学会誌. (掲載予定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 小倉一朗、清野慧、岡崎祐一: "2次元角度格子と2次元角度センサを組み合わせた面内変位検出機構の開発"精密工学会誌. 66・2. 272-276 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 清野慧、清水裕樹、星野唯、高偉: "角度情報をベースとする多自由度位置・姿勢検出法の研究"2000年度精密工学会春季大会学術講演会講演論文集. (発表予定). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 清野慧、星野唯、高偉: "光スポット走査型角度センサによる位置検出の研究"日本機会学会IIP部門講演会講演論文集. (発表予定). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 清野慧、須藤、正守、高偉: "2次元角度格子製作システムの開発(第1報)"平成11年度日本機会学会東北支部講演会講演論文集. (発表予定). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] Satoshi Kiyono,Tadashi Hoshino and Wei Gao: "A New Method of Position Detection Based on an Optical Angular Sensor System"MECHATRONICS 2000, Warsaw, Poland. (発表予定). (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2017-10-12  

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