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A New CVD Method Using DC Plasma above the Liquid Surface

Research Project

Project/Area Number 11305052
Research Category

Grant-in-Aid for Scientific Research (A).

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

SUZUKI Takeyuki  Faculty of Technology, Tokyo University of Agriculture and Technology, Professor, 工学部, 教授 (70092559)

Co-Investigator(Kenkyū-buntansha) WADA Satoshi  Tokyo Institute of Technology, Associate Professor, 大学院・理工学研究科, 助教授 (60240545)
MATSUSHIMA Yuta  Faculty to Technology, Tokyo University of Agriculture and Technology, Assistant, 工学部, 助手 (30323744)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥30,900,000 (Direct Cost: ¥30,900,000)
Fiscal Year 2000: ¥4,600,000 (Direct Cost: ¥4,600,000)
Fiscal Year 1999: ¥26,300,000 (Direct Cost: ¥26,300,000)
KeywordsDC Plasma / Chemical Vapor Deposition / Plasma Jet / Diamond / Titanium Oxide / CVD / Film / Electric Discharge / 液体
Research Abstract

[Purpose] The aim of this research is to develop a new film formation technique assisted by DC plasma1 using liquid as starting materials. The principle lies in generating the gaseous chemical species by sputtering the liquid. 1. Film Formation on Metal Substrate (Electrode)(1) Diamond forming liquid of alcohol-water system was investigated. High quality diamond was deposited at a rate of about 20 micron m/h using 40〜90 mol % methanol and 10〜20 mol % ethanol. (2) Highly (110) oriented rutile-type TiO2 films were formed using dilute aqueous solutions. TiO2 was also formed by immersing the quartz substrate in the plasma which was generated by sputtering the aqueous TiCl3 solution. (3) Sputtering yield of water was found to be about 100〜1000 under the applied voltage of about 1 kV.The yield is two orders of magnitude greater than that of metals. Further investigation is underway. 2. Plasma Jet Generation and its application to Film Formation (1) Conditions for plasma jet generation were investigated separating the liquid chamber and the substrate chamber by a copper nozzle. (2) Diamond film was formed locally by hitting the silicon wafer with the jet. (3) Deposition on a few mm diameter area was successfully demonstrated using one nozzle. Further experiments are planned for larger area deposition using a multi-nozzle system.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] Takeyuki SUZUKI: "Diamond Synthesis by Plasma Jet above the Liquid Surface"Journal of the European Ceramic Society. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takeyuki SUZUKI: "Diamond deposition by DC plasma above the liquid surface of the water-methanal and water-ethanal systems"Journal of Materials Science Letters. 19. 1899-1901 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takeyuki SUZUKI: "Plasma Jet Generation over the liquid Surface and its Application to Diamond Synthesis"Ceramic Engineering and Science Proceedings. 21. 25-30 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 松嶋雄太: "液面上プラズマを用いたエチレングリコール水溶液からのダイヤモンド薄膜合成"プラズマ科学シンポジウム2001/第18回プラズマプロセシング研究会:プロシーディングス. 569-570 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takeyuki SUZUKI: "Sputtering of the aqueous solution of TiCl_3 and the TiO_2 formation"Journal of Materials Science. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takeyuki SUZUKI: "Sputtering of the aqueous solution of TiCl_3 and the TiO_2 formation"Journal of Materials Science. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takeyuki SUZUKI: "Diamond synthesis by plasma jet above the liquid surface"Journal of the European Ceramic Society. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takeyuki SUZUKI: "Diamnod deposition by dc plasma above the liquid surface of the water-methanol and water-ethanol systems"Journal of Materials Science Letters. 19. 1899-1901 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takeyuki SUZUKI: "Plasma jet generation over the liquid surface and its application to diamond synthesis"Ceramic Engineering and Science Proceedings. 21-4. 25-30 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Yuta MATSUSHIMA: "Synthesis of diamond thin-film from aqueous ethalyne-glycol using DC plasma above the liquid surface"Proceedings of Plasma Science Symposium 2001/The 18^<th> Symposium on Plasma Processing. 569-570 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takeyuki Suzuki: "Diamond Synthesis by Plasma Jet above the Liquid Surface"Journal of the European Ceramic Society. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Takeyuki Suzuki: "Diamond deposition by DC plasma above the liguid surface of the water-methanol and water-ethanol systems"Journal of Materials Science letters. 19. 1899-1901 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Takeyuki Suzuki: "Plasma Jet Generation over the liquid Surface and its Application to Diamond Synthesis"Ceramic Engineering and Science Proceedings. 21・4. 25-30 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 松嶋雄太: "液面上プラズマを用いたエチレングリコール水溶液からのダイやモンド薄膜合成"プラズマ科学シンポジウム2001/第18回プラズマプロセシング研究会:プロシーディングス. 569-570 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Takeyuki Suzuki: "Sputtering of the aqueous solution of TiCl_3 and the TiO_2 formation "Journal of Materials Science. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Takeyuki SUZUKI: "Plasma jet generation over the liquid surface and its application to diamond"Proc. of the 24th Annual Cocoa Beach Conference. (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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