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Atomic-scale investigation and its device application for GaN crystal growth

Research Project

Project/Area Number 11355002
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 表面界面物性
Research InstitutionTohoku University

Principal Investigator

SAKURAI Toshio  Tohoku University, Institute for Materials Research, Professor, 金属材料研究所, 教授 (20143539)

Co-Investigator(Kenkyū-buntansha) OHNO Takahisa  National Research Institute of Metals, the head of a laboratory, 金属材料技術研究所・第二研究室, 室長
XUE Q.k.  Tohoku University, Institute for Materials Research, Research Associate, 金属材料研究所, 助手 (90270826)
HASEGAWA Yukio  Tohoku University, Institute for Materials Research, Associate Professor, 物性研究所, 助教授 (80252493)
FUJIKAWA Yasunori  Tohoku University, Institute for Materials Research, Research Associate, 金属材料研究所, 助手 (70312642)
KOBAYASHI Tsutomu  ULVAC-PHI, Inc., Senior Researcher, 主任研究員
中山 幸仁  東北大学, 金属材料研究所, 講師 (50312640)
薛 其貞  東北大学, 金属材料研究所, 助手 (50323093)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥35,200,000 (Direct Cost: ¥35,200,000)
Fiscal Year 2000: ¥5,000,000 (Direct Cost: ¥5,000,000)
Fiscal Year 1999: ¥30,200,000 (Direct Cost: ¥30,200,000)
KeywordsGaN / STM / epitaxy / device fabrication / surface structure / etching / 分子線エピタキシー / ウルツ鉱型GaN / 表面再配列構造 / 塩素よるエッチング
Research Abstract

In this project, we have studied on the following subjects as listed below; (1) establishing the general principles for the surface energy minimization and surface reconstruction of GaN surface by MBE-STM (2) understanding the atomistic process for the dopant incorporation and defect formation in GaN epitaxial layers. (3) clarifying the effect of dopant incorporation on the surface electronic properties (4) clarifying the atomistic process in dry etching and its application for the device fabrication. Based on those results, atomic interaction, growth dynamics, surface energetics, strain, and surface/film electronic properties, etc. which are the fundamental process for device fabrication, have been discussed.
We have performed systematic investigations of surface reconstructions on Wurtzite GaN(0001) by MBE-STM. Various reconstructions on the GaN(0001) surface are studied and based on the comparison between the STM observations and first-principles total energy calculations, we propose an adatom scheme for the basic 2x2 and 4x4 structures, and others as well. Also, in order to understand atomistic process underlying dry etching processes of Wurtzite GaN, which is of great important for device application, we have carried out STM study of thermally activated dry etching of GaN surface by Cl_2 molecules. Our extensive studies show that at low temperature (〜650C) the dominated etching of Ga-rich GaN(0001) is anti-step-flow etching. On the other hand, at the higher temperature(〜700C), triangular etching pits on terraces start to form. Its single-step depth implies the bilayer-by-bilayer etching.

Report

(3 results)
  • 2001 Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (17 results)

All Other

All Publications (17 results)

  • [Publications] Q.Z.Xue: "Atomistic investigation of various GaN(0001) phases on the 6H-SiC(0001) surface"Phys. Rev. B.. 59. 12604-12611 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.K.Xue: "Structures of GaN(0001)-(2x2),-(4x4), and -(5x5) surface reconstructions"Phys. Rev. Lett.. 82. 3074-3077 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.Z.Xue: "Two-step preparation of 6H-SiC(0001) surface for epitaxial growth of GaN thin film"Appl. Phys. Lett.. 74. 2468-2470 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Hasegawa: "Erasable nanometer-scale modification at the Au/Si interface by ballistic electron emission microscopy"Appl. Phys. Lett.. 75. 3668-3670 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] X.G.Qui: "Influence of threading dislocations on the near-bandedge photoluminescence of wurtzite GaN thin films on SiC substrate"Appl. Phys. Lett.. 77. 1316-1318 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.K.Xue: "Xue et al. reply"Phys. Rev. Lett.. 84. 4015 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.K.Xue: "Imaging wurtzite GaN surfaces by olecular beam epitaxy-scanning tunneling microscopy"Thin Solid Films. 367. 149-158 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.Z. Xue: "Atomistic investigation of various GaN(0001) phases on the 6H-SiC(0001) surface"Phys. Rev. B.. 59. 12604-12611 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.K. Xue: "Structures of GaN(0001)-(2x2), -(4x4), and -(5x5) surface reconstructions"Phys. Rev. Lett.. 82. 3074-3077 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.Z. Xue: "Two-step preparation of 6H-SiC(0001) surface for epitaxial growth of GaN thin film"Appl. Phys. Lett.. 74. 2468-2470 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Hasegawa: "Erasable nanometer-scale modification at the Au/Si interface by ballistic electron emission microscopy"Appl. Phys. Lett.. 75. 3668-3670 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.Z. Xue: "Influence of threading dislocations on the near-bandedge photoluminescence of wurtzite GaN thin films on SiC substrate"Appl. Phys. Lett.. 77. 1316-1318 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.Z. Xue, Xue et al.: "reply"Phys. Rev. Lett.. 84. 4015 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.K. Xue: "Imaging wurtzite GaN surfaces by molecular beam epitaxy-scanning tunneling microscopy"Thin Solid Films. 367. 149-158 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Q.Z.Xue: "High quality GaN thin film growth on 6H-SiC (0001) substrate prepared by a two-stop method"Appl. Phys. Lett.. 74. 2468-2470 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Q.Z.Xue: "Structures of GaN (0001) 2x2, 4x4 and 5x5 surface reconstructions"Phys. Rev. Lett.. 82. 3074-3077 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Q.Z.Xue: "Atomistic investigation of various GaN (0001) phases on the 6H-SiC (0001) surface"Phys. Rev. B. 59. 12604-12611 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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