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Development of Compound-Semiconductor-Based Nonlinear Optical Devices Using Sublattice Reversal Epitaxy

Research Project

Project/Area Number 11355004
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Applied optics/Quantum optical engineering
Research InstitutionThe University of Tokyo

Principal Investigator

KONDO Takashi  The University of Tokyo, Graduate School, School of Engineering, Associate Professor, 大学院・工学系研究科, 助教授 (60205557)

Co-Investigator(Kenkyū-buntansha) KOH Shinji  The University of Tokyo, Graduate Scool, School of Engineering, Research Associate, 大学院・工学系研究科, 助手 (50323663)
SHIRAKI Yasuhiro  The University of Tokyo, Graduate Scool, School of Engineering, Professor, 大学院・工学系研究科, 教授 (00206286)
ITO Ryoichi  Meiji University, School of Science and Technology, Professor, 理工学部, 教授 (40133102)
OKAYAMA Hideaki  Oki Electric Industry Co. Ltd., Optical Components Company, Researcher, 光エレクトロニクス研究所, 研究員
徐 長青  沖電気, 光エレクトロニクス研究所, 研究員
XU Chang-Qing  Oki Electric Industry Co. Ltd., Optical Components Company, Researcher
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥36,610,000 (Direct Cost: ¥35,200,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2001: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2000: ¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 1999: ¥25,700,000 (Direct Cost: ¥25,700,000)
KeywordsNonlinear optics / Wavelength conversion / Optical parametric effect / Difference-frequency generation / Compound semiconductor / Polarization inversion / Quasi phase matching / Molecular beam epitaxy / 疑似位相整合 / 光第2高調波発生 / 導波路型デバイス / 非線形工学
Research Abstract

1. Design and optimization of GaAs/AlGaAs nonlinear optical devices
We have designed DFG devices for 1.55 μm band wavelength conversion bearing in mind the application to OXCs on future DWDM photonic network. AlGaAs QPM waveguids are expected to be polarization-independent and high-performance devices with conversion efficiencies as large as 700 %/W/cm^2. Estimated 3 dB bandwidth for 10-mm-long devices (30 % for 100 mW punp input) is 40 nm which covers the C band. On the other hand, GaAs QPM OPG/OPA/OPOs are expected to be usable in the finger-print wavelength region when fabricated with QPM periods of 〜 10 μm.
2. Fabrication process of GaAs/AlGaAs QPM devices
We have developed a device fabrication process for the AlGaAs/GaAs QPM wavelength conversion devices. The process consists of the GaAs/Ge/GaAs sablattice reversal epitaxy, flattening of the template by chemical etching or CMP, and regrowth techniques using MBE or MOVPE which maintain the vertical domain wall.
3. Fabrication and characterization of AlGaAs QPM DFG devices
We have fabricated 3rd-order QPM AlGaAs waveguiding DFG device for 1.55 μm band as a first prototype device. The flattening was achieved by the chemical etching. QPM SHG was achieved with a reasonable efficiency taking into account of the residual corrugation and the resulting propagation loss. Improved 1st order QPM devices with low propagation losses achieved by the CMP flattening process have been fabricated and the characterization of the wavelength conversion performance is now in progress.
4. GaAs QPM optical parametric devices
GaAs QPM waveguiding parametric devices have been fabricated. A parametric fluorescence experiment using a Nd : YAG laser as a punp source is now underway.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (33 results)

All Other

All Publications (33 results)

  • [Publications] S.Koh, T.Kondo, M.Ebihara, T.Ishiwada, H.Sawada, H.Ichinose, I.Shoji, R.Ito: "GaAs/Ge/GaAs Sublattice Reversal Epitaxy on GaAs (100) and (111) Sub-strate for Nonlinear Optical Devices"Jpn. J. Appl. Phys.. 38. L508-L511 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Koh, T.Kondo, T.Ishiwada, H.Sawada, H.Ichinose, I.Shoji, R.Ito: "Characterization of Sublattice-Reversed GaAs by Reflection High Energy Diffraction and Transmission Electron Microscopy"Physica. E. 7. 876-880 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Nakatani, S.Kusano, T.Takahashi, K.Hirano, S.Koh, T.Kondo, R.Ito: "Study of Sublattice Inversioon in GaAs/Ge/GaAs(OO1) Crystal by X-ray Diffraction"Appl. Surf. Sci.. 159-160. 256-259 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 近藤高志, 黄晋二, 伊藤良一: "AlGaAs系擬似位相整合デバイス-化合物半導体の副格子交換エピタキシー-"応用物理. 69. 543-547 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Kondo, S.Koh, R.Ito: "Sublatice Reversal Epitaxy : A Novel Technique for Fabricating Domain Inverted Compound Semiconductor Structures"Sci. Tech. Advanced Materials. 1. 173-179 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N.Usami, Y.Azuma, T.Ujihara, G.Sazaki, K.Nakajima, N.Yakabe, T.Kondo, S.Koh, Y.Shiraki, B.Zhang, Y.Segawa, S.Kodama: "SiGe Bulk Crystal as a Lattice-Matched Substrate to GaAs for Solar Cell Applications"Appl. Phys. Lett.. 77. 3565-3567 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Koh, T.Kondo, Y.Shiraki, R.Ito: "GaAs/Ge/GaAs Sublattice Reversal Epitaxy and its Application to Non-linear Optical Devices"J. Cryst. Growth. 227-228. 183-192 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N.Usami, Y.Azuma, T.Ujihara, G.Sazaki, K.Nakajima, Y.Yakabe, T.Kondo, K.Kawaguchi, S.Koh, Y.Shiraki, B.P.Zhang, Y.Segawa, S.Kodama: "Molecular Beam Epitaxy of GaAs on Nearly Lattice-Matched SiGe Substrates Grown by the Multicomponent Zone-Melting Method"Semicond. Sci. Technol.. 16. 699-703 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] I.Shoji, T.Kondo, R.Ito: "Second-Order Susceptibilities of Various Dielectric and Semiconductor Materials"Opt. Quantum Electron.. (印刷中). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Koh, T. Kondo, M. Ebihara, T. Ishiwada, H. Sawada, H. Ichinose, I. Shoji, and R. Ito: "GaAs/Ge/GaAs Sublattice Reversal Epitaxy on GaAs (100) and (111) Substrate for Nonlinear Optical Devices"Jpn. J. Appl. Phys.. 38. L508-L511 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Koh, T. Kondo, T. Ishiwada, H. Sawada, H. Ichinose, I. Shoji, and R. Ito: "Characterization of Sublattice-Reversed GaAs by Reflection High Energy Diffraction and Transmission Electron Microscopy"Physica E. 7. 876-880 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Nakatani, S. Kusano, T. Takahashi, K. Hirano, S. Koh, T. Kondo, and R. Ito: "Study of Sublattice Inversion in GaAs/Ge/GaAs(001) Crystal by X-ray Diffraction"Appl. Surf. Sci.. 159-160. 256-259 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Kondo, S. Koh, and R. Ito: "AlGaAs Quasi-Phase-Matching Devices Sublattice Reversal Epitaxy of Compound Semiconductors"OYO BUTURI. 69(in Japanese). 543-547 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Kondo, S. Koh, and R. Ito: "Sublatice Reversal Epitaxy : A Novel Technique for Fabricating Domain Inverted Compound Semiconductor Structures"Sci. Tech. Advanced Materials. 1. 173-179 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N. Usami, Y. Azuma, T. Ujihara, G. Sazaki, K. Nakajima, Y. Yakabe, T. Kondo, S. Koh, Y. Shiraki, B. Zhang, Y. Segawa, and S. Kodama: "SiGe Bulk Crystal as a Lattice-Matched Substrate to GaAs for Solar Cell Applications"Appl. Phys. Lett.. 77. 3565-3567 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Koh, T. Kondo, Y. Shiraki, and R. Ito: "GaAs/Ge/GaAs Sublattice Reversal Epitaxy and its Application to Nonlinear Optical Devices"J. Cryst. Growth. 227-228. 183-192 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N. Usami, Y. Azuma, T. Ujihara, G. Sazaki, K. Nakajima, Y. Yakabe, T. Kondo, K. Kawaguchi, S. Koh, Y. Shiraki, B. P. Zhang, Y. Segawa, and S. Kodama: "Molecular Beam Epitaxy of GaAs on Nearly Lattice-Matched SiGe Substrates Grown by the Multicomponent Zone-Melting Method"Semicond. Sci. Technol.. 16. 699-703 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] I. Shoji, T. Kondo, and R. Ito: "Second-Order Susceptibilities of Various Dielectric and Semiconductor Materials"Opt. Quantum Electron.. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Koh, T.Kondo, Y.Shiraki, R.Ito: "GaAs/Ge/GaAs Sublattice Reversal Epitaxy and its Application to Non-linear Optical Devices"J. Cryst. Growth. 227-228. 183-192 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Usami, Y.Azuma, T.Ujihara, G.Sazaki, K.Nakajima, Y.Yakabe, T.Kondo, K. Kawaguchi, S.Koh, Y.Shiraki, B.P.Zhang, Y.Segawa, S.Kodama: "Molecular Beam Epitaxy of GaAs on Nearly Lattice-Matched SiGe Sub-strates Grown by the Multicomponent Zone-Melting Method"Semicond. Sci. Technol.. 16. 699-703 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 近藤高志: "非線形光学効果を用いた波長変換"レーザ熱加工学会誌. 8. 139-143 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] I.Shoji, T.Kondo, R.Ito: "Second-Order Susceptibilities of Various Dielectric and Semiconductor Materials"Opt. Quantum Electron. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Koh,T.Kondo,T.Ishiwada,H.Sawada,H.Ichinose,I.Shoji,and R.Ito: "Characterization of Sublattice-Reversed GaAs by Reflection High Energy Diffraction and Transmission Electron Microscopy"Physica E. 7. 876-880 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Nakatani,S.Kusano,T.Takahashi,K.Hirano,S.Koh,T.Kondo,and R.Ito: "Study of Sublattice Inversioon in GaAs/Ge/GaAs(001)Crystal by X-ray Diffraction"Appl.Surf.Sci.. 159-160. 256-259 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 近藤高志,黄晋二,伊藤良一: "AlGaAs系擬似位相整合デバイス-化合物半導体の副格子交換エピタキシー-"応用物理. 69. 543-547 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Kondo,S.Koh,and R.Ito: "Sublatice Reversal Epitaxy : A Novel Technique for Fabricating Domain Inverted Compound Semiconductor Structures"Sci.Tech.Advanced Materials. 1. 173-179 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] N.Usami,Y.Azuma,T.Ujihara,G.Sazaki,K.Nakajima,Y.Yakabe,T.Kondo,S.Koh,Y.Shiraki,B.Zhang,Y.Segawa,and S.Kodama: "SiGe Bulk Crystal as a Lattice-Matched Substrate to GaAs for Solar Cell Applications"Appl.Phys.Lett.. 77. 3565-3567 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Koh,T.Kondo,Y.Shiraki,and R.Ito: "GaAs/Ge/GaAs Sublattice Reversal Epitaxy and its Application to Nonlinear Optical Devices"J.Cryst.Growth. (印刷中). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] S. Koh, T. Kondo, M. Ebihara, T. Ishiwada, H. Sawada, H. Ichinose, I. Shoji, and R. Ito: "GaAs/Ge/GaAs Sublattice Reversal Epitaxy on GaAs (100) and (111) Substrate for Nonlinear Optical Devices"Jpn. J. Appl. Phys.. 38. L508-L511 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] I. Shoji, H. Nakamura, K. Ohdaira, T. Kondo, R. Ito, T. Okamoto, K. Tatsuki, and S. Kubota: "Absolute Measurement of Second-Order Nonlinear-Optical Coefficients of β-BaB_2O_4 for Visible to Ultraviolet Second-Harmonic Wavelengths"J. Opt. Soc. Am. B. 16. 620-624 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] E. Nishina, R. Katayama, T. Kondo, R. Ito, J.-C. Kim, T. Watanabe, and S. Miyata: "Design and Fabrication of Organic Waveguiding Devices for Quasi-Phase-Matched Second-Harmonic Generration"Nonlinear Opt.. 22. 433-436 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Koh, T. Kondo, T. Ishiwada, H. Sawada, H. Ichinose, I. Shoji, and R. Ito: "Characterization of Sublattice-Reversed GaAs by Reflection High Energy Diffraction and Transmission Electron Microscopy"Physica E. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Nakatani, S. Kusano, T. Takahashi, K. Hirano, H. Koh, T. Kondo, and R. Ito: "Study of Sublattice Inversion in GaAs/Ge/GaAs (001) Crystal by X-ray Diffraction"(印刷中). (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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