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Development of in situ manufacturing and mechanical evaluation system for micromaterials

Research Project

Project/Area Number 11355007
Research Category

Grant-in-Aid for Scientific Research (A).

Allocation TypeSingle-year Grants
Section展開研究
Research Field Materials/Mechanics of materials
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

KOMAI Kenjiro  Kyoto University, Faculty of Engineering Professor, 工学研究科, 教授 (70025948)

Co-Investigator(Kenkyū-buntansha) SENDAI Tomoko  Mitsubishi Electric Corp., Researcher, 産業システム研究所, 主任研究員(研究職)
TANAKA Kazuto  Kyoto University, Faculty of Engineering Research associate, 工学研究科, 助手 (50303855)
MINOSHIMA Kohji  Kyoto University, Faculty of Engineering Associated Professor, 工学研究科, 助教授 (50174107)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥26,800,000 (Direct Cost: ¥26,800,000)
Fiscal Year 2000: ¥6,200,000 (Direct Cost: ¥6,200,000)
Fiscal Year 1999: ¥20,600,000 (Direct Cost: ¥20,600,000)
KeywordsMicromaterials / Micromachine / Mechanical properties / Fracture / Fatigue / Electric discharge machining / Non-contact strain measurement / Metal Thin Film / マイクロマシーン
Research Abstract

In order to develop a reliable micromachine in a service operation, much care must be taken to micro mechanical evaluation, i.e., mechanical properties of μm-sized microelements including fatigue behavior. However, the evaluation method has not been well established yet. In this study, the evaluation system of metallic foil is developed, including in situ specimen machining, chucking and non-contact strain measurement. Using an electric discharge machine (PX-05 : Mitsubishi Co.Ltd.), micro specimens of stainless steel foil were machined and a suitable machining condition was found to minimize the roughness of machined surface : the minimum of the maximum roughness was 1.0μm. The micro specimen for tensile testing was designed to make easily handle and testing, which has the specimen supporting part and the specimen chucking part. To measure the strain of microelements, for which strain gages on the market are too large and strong, a laser speckle strain measurement method was applied, and non-contact strain measurement system for microelements was developed. Integrating these machining system and non-contact strain measurement system, tensile and fatigue tests of micro specimens of stainless steel foil (thickness : 50 μm, width : 1 mm) was successfully conducted, and the influence of anisotropy and machining method on the mechanical and fatigue strength was investigated. The elongation at break and fracture morphology of tensile tests were affected by specimen orientation, but fatigue strength was not.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (13 results)

All Other

All Publications (13 results)

  • [Publications] 駒井謙治郎: "金属薄膜微小素子の非接触ひずみ測定と引張・疲労破壊特性"日本機械学会関西支部第75期定時総会講演会 講演論文集. No.004-1. 11-25-11-26 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 駒井謙治郎: "金属薄膜の非接触ひずみ測定と引張・疲労破壊特性に及ぼす加工法・異方性の影響"日本材料学会 第1回マイクロマテリアルシンポジウム講演論文集. 64-65 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Minoshima: "Influence of Nanometre-Sized Notch and Water on the Fracture Behavior of Single Crystal Silicon Microelements"Fatigue & Fracture of Engineering Materials and Structures. 23・12. 1035-1042 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Minoshima: "Submicrometer Notch Machining by FIB and Fracture and Fatigue Behavior in Silicon Microelements,"Proc.of 3^<rd> International Micro Materials Conference "Micromat 2000". 566-569 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Komai, M.Minoshima, K.Tanaka and T.Sugai: "Strain Measurements by Laser Speckle Method and Evaluation of Mechanical Properties of Metallic Microelement"Proceeding of the 75th Annual Meeting of JSMS Kansai, Japan. No.004-1. 11-25-11-26 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Komai, M.Minoshima, K.Tanaka, T.Sugai and T.Sakamoto: "Non-contact Strain Measurements and Influence of Machining and Specimen Direction on Mechanical Properties of Metallic Foil"Proceeding of The 1St Symposium on micromaterials, The Society of Materials Science Japan. 41-42 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Minoshima, T.Terada and K.Komai: "Influence of Nanometre-Sized Notch and Water on the Fracture Behavior of Single Crystal Silicon Microelements"Fatigue & Fracture of Engineering Materials and Structures. 23-12. 1035-1042 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Minoshima, T.Terada and K.Komai: "Submicrometer Notch Machining by FIB and Fracture and Fatigue Behavior in Silicon Microelements"Proc.of 3^<rd> International Micro Materials Conference "Micromat 2000". 566-569 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 駒井謙治郎: "金属薄膜の非接触ひずみ測定と引張・疲労破壊特性に及ぼす加工法・異方性の影響"日本材料学会 第1回マイクロマテリアルシンポジウム講演論文集. 64-65 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Minoshima: "Influence of Nanometre-Sized Notch and Water on the Fracture Behaviour of Single Crystal Silicon Microelements"Fatigue & Fracture of Engineering Materials and Structures. 23・12. 1035-1042 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Minoshima: "Submicrometer Notch Machining by FIB and Fracture and Fatigue Behavior in Silicon Microelements"Proc.of 3rd International Micro Materials Conference "MicroMat2000". 566-569 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 駒井謙治郎: "金属薄膜微小素子の非接触ひずみ測定と引張・疲労破壊特性"日本機械学会関西支部第75期定時総会講演会講演論文集. N0.004-1. (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 箕島弘二: "アラミド単繊維の疲労強度に及ぼす応力波形・湿潤環境効果"日本機械学会関西支部第75期定時総会講演会講演論文集. N0.004-1. (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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