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Design and preparation of ferroelectric-metal nano-FGM multi-layer films

Research Project

Project/Area Number 11355027
Research Category

Grant-in-Aid for Scientific Research (A).

Allocation TypeSingle-year Grants
Section展開研究
Research Field Inorganic materials/Physical properties
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

HIRAI Toshio  TOHOKU UNIVERSITY, Institute for Materials Research, Professor, 金属材料研究所, 教授 (50005865)

Co-Investigator(Kenkyū-buntansha) WANG Xin ron  TOHOKU UNIVERSITY, Institute for Materials Research, Research Assistant, 金属材料研究所, 助手 (90301043)
MASUMOTO Hiroshi  TOHOKU UNIVERSITY, Institute for Materials Research, Assistant Professor, 金属材料研究所, 助教授 (50209459)
CHEN Li dong  TOHOKU UNIVERSITY, Institute for Materials Research, Assistant Professor, 金属材料研究所, 助教授 (90280883)
SOMENO Yoshihiro  Touhoku ALPS Co.Ltd., Senior Engineer, 第1機構事業部, 主任技師(研究職)
MIZUZEKI Hiroshi  TOHOKU UNIVERSITY, Institute for Materials Research, Research Assistant, 金属材料研究所, 助手 (00271966)
菊池 俊宏  アルプス電気(株), 第一機構事業部, 研究員
菊地 俊宏  アルプス電気株式会社, 中央研究所, 研究員
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥27,400,000 (Direct Cost: ¥27,400,000)
Fiscal Year 2000: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 1999: ¥24,200,000 (Direct Cost: ¥24,200,000)
Keywordsmulti-layer thin film / optical functional film / functionally gradient materials / titania / silica / gold / nano composite / ferroelectric material / ナノ多層膜 / 金属粒子 / 光機能特性 / 最適化設計 / 屈折率 / 透過率 / 多層膜 / 傾斜機能 / 光学特性
Research Abstract

The dielectric and metal which were used were set to TiO_2, or SiO_2 and Au, respectively, and produced the compound thin film using the Helicon beam sputtering method.
First, TiO_2-SiO_2 thin film was produced as a dielectric-dielectric film based on an functionally graded material design. The obtained thin film showed clearly that it has the narrow-band-pass filter structure which penetrates only the light of the specific wavelength.
Next, the film of a dielectric and metal was produced. It was clealy that it is a film with each flat and smooth and uniform film.
Quntum dot which consists of a dielectric and a metaled multilayer film was made by Helicon plasma sputtering method. Consequently, the grasp of conditions which can check a deposit of a golden fine crystal in a matrix SiO_2 was completed.
By producing the film of multilayer structure, the peculiar absorption in specific wavelength was observed according to the number of laminating.
Multi-effects, such as discovery of a new nonlinear-optics phenomenon and the nonlinear characteristic, are expectable by producing the multilayer film which carried out the laminating of the particle of different metal by turns.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] X.R.Wang: "Microstructure and optical properties of amorphous TiO_2-SiO_2 composite films synthesized by helicon plasma sputtering"Thin Solid Films. 338. 105-109 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 王 新栄: "ヘリコンスパッタ法により作製したTiO_2/SiO_2多層膜の微細構造および光学特性"粉体および粉末冶金. 46. 180-184 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Design and experimental approach of optical reflection filters with graded refractive index profiles"J.Vac.Sci.Technol.. A,17. 206-211 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Fabrication of a 33-layer optical reflection filter with stepwise graded refractive index profiles"J.Mater.Res.. 15. 274-277 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Design and preparation of a 33-layer optical reflection filter of TiO_2-SiO_2 system"Mater.Res.Bull.. 35. 619-628 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Design and synthesis of A33-layer narrow bandpass filter with graded refractive index profiles"Mat.Res.Soc.Symp.Proc.. 597. 63-68 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Microstructure and optical properties of amorphous TiO_2-SiO_2 composite films synthesized by helicon plasma sputtering"Thin Solid Films. 338. 105-109 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] "Optical and structural characterization of TiO_2/SiO_2 multilayer films prepared by helicon plasma sputtering"J.Jpn.Soc.Powd.and Powd.Metallurgy. 46. 180-184 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Design and experimental approach of optical reflection filters with graded refractive index profiles"J.Vac.Sci.Technol., A. 17. 206-211 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Fabrication of a 33-layer optical reflection filter with stepwise graded refractive index profiles"J.Mater.Res.. 15. 274-277 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Design and preparation of a 33-layer optical reflection filter of TiO_2-SiO_2 System"J.Vac.Sci.Technol., A.. 933-937 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Design and synthesis of A33-layer narrow bandpass filter with graded refractive index profiles"Mat.Res.Soc.Symp.Proc.. 597. 63-68 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.R.Wang: "Fabrication of a 33-layer optical reflection filter with stepwise graded refractive index profiles"J.Mater.Res. 15. 274-277 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] X.R.Wang: "Design and preparation of a 33-layer optical reflection filter of TiO_2-SiO_2 system"J.Vac.Sci.Technol.. A. 933-937 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] X.R.Wang: "Design and synthesis of A33-layer narrow bandpass filter with graded refractive index profiles"Mat.Res.Soc.Symp.Proc.. 597. 63-68 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] X.WANG,H.Masumoto,Y.Someno,L.Chen and T.Harai: "Fabrication of a 33-layer optical reflection filter with step-wise graded refrective index profiles"J. Mater. Res.. 15(in press). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] X.WANG,H.Masumoto,Y.Someno,L.Chen and T.Harai: "Design and preparation of a 33-layer optical reflection filter of TiO_2-SiO_2 system"J. Vac. Sci. Technol., A. 18(in press). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] X.Wang,H.Masumoto,Y.Someno and T.Hirai: "Design and experimental approach of optical reflection filters with graded refractive index profiles"J. Vac. Sci. Technol. A. 17(1). 206-211 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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