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Development of Manufacturing Technology of Micro Mechano-Electronic Devices by Laser Irradiation / AFM Probe Processing / Electrochemistry

Research Project

Project/Area Number 11355029
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Material processing/treatments
Research InstitutionHOKKAIDO UNIVERSITY

Principal Investigator

TAKAHASHI Hideaki  Hokkaido Univ., Grad. School of Eng., Pro., 大学院・工学研究科, 教授 (70002201)

Co-Investigator(Kenkyū-buntansha) SAKAIRI Masatoshi  Hokkaido Univ., Grad. School of Eng., Inst., 大学院・工学研究科, 助手 (50280847)
相馬 道明  札幌エレクトロプレーティング工業(株), 品質管理リーダ(研究職)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥35,760,000 (Direct Cost: ¥35,100,000、Indirect Cost: ¥660,000)
Fiscal Year 2001: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2000: ¥16,600,000 (Direct Cost: ¥16,600,000)
Fiscal Year 1999: ¥16,300,000 (Direct Cost: ¥16,300,000)
Keywordsmicro patterning / nano patterning / anodizing / aluminum / laser irradiation / AFM / mold / electroplating / 金型
Research Abstract

1) Fabrication of Aluminum Mold for Plastic Injection Structuring
Aluminum mold was fabricated by hard anodizing, laser irradiation, and Ni-P electroless plating. Using the aluminum mold produced, plastic pegs with 20 cm length was obtained with a automatic mold system successfully. In the fabrication procedure, several hundred micrometer thick Ni-P layer was attempted to be deposited only at the laser-irradiated area. It was found that the local deposition of Ni-P is accomplished by forming relatively thick anodic oxide films and then by sealing pores of the oxide films.
2) Fabrication of micro pits and grooves by laser irradiation and electrochemical etching
Aluminum covered with anodic oxide films was irradiated with a pulsed YAG-laser in NaCl solutions on open circuit or during anodic polarization. The laser irradiation on open circuit allowed the production of cone shaped pores, while the laser irradiation during anodic polarization produced hemispherical pores. Micro grooves with 10 … More to 50 micrometer diameter was fabricated successfully by formation of barrier anodic oxide films, laser irradiation, formation of porous anodic oxide films at the laser irradiated area, and dissolution of anodic oxide films.
3) Fabrication of nano groves by AFM probe processing
Aluminum covered with thin anodic oxide films was scratched with AFM probes in solutions. The grooves with several hundred nanometer width were formed successfully on aluminum. The processing rate was found to depend strongly on the solution pH and chemical composition.
4) Fabrication of micro wires by laser irradiation of the aluminum rod
Aluminum rods with 2 - 5mm diameter was anodized to form porous anodic oxide films and then irradiated with a pulsed YAG laser in Ni^<2+> solutions. During laser irradiation, the aluminum rod was rotated and moved upward at a steady rate. After laser irradiation, the rod was cathodically polarized to deposit Ni at the laser irradiated area, and then immesed in a NaOH solution to dissolve the aluminum substrate. A nickel spiral wire with 50 micrometer width could be obtained successfully. Less

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (39 results)

All Other

All Publications (39 results)

  • [Publications] 菊地竜也, しょ松竹, 加藤善大, 坂入正敏, 高橋英明: "Alアノード酸化とレーザー照射を利用した金属微細構造の作製-新LIGAプロセスを目指して"表面技術. 50. 697-704 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Z.Kato, M.Sakairi, H.Takahashi: "Nucleation of Metals on Aluminum by Laser Irradiation and the Effect on Ni-P Electroless Depositon"J. Electrochem. Soc.. 146・8. 2876-2885 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 菊地竜也, 坂入正敏, 高橋英明, 阿部芳彦, 片山直樹: "アルミニウムアノード酸化/レーザー照射/電気めっきを用いた微細回路板の作製"表面技術. 50. 829-835 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Z.Chu, M.Sakairi, H.Takahashi, Z.X.Qiu: "Local Deposition of Ni-P Alloy on Aluminum by Laser Irradiation and Electroless Plating"J. Electrochem. Soc.. 146・8. 537-546 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 高橋英明, 坂入正敏, しょ松竹, 渡辺恵司, 菊地竜也ほか: "アノード酸化を基礎とする新規なアルミニウム表面改質・加工技術-機能性表面の創成を目指して-"軽金属50,544-551. 50. 544-551 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Takahashi, M.Sakairi, Y.Ohira: "Reformation of Anodic Oxide Films on Aluminum After Destructionwith Laser Irradiation in Slutions. -Effects of Anion and pH-"Proc. of Intern. Symp. in Honor of Prof.N. Sato. "Passivity and Localized Corrosion". Vol99-27. 377-386 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Z.Chu.M.Sakairi, H.Takahashi, K.shimamura, Y.Abe: "Local Metal Deposition on aluminum with Laser Irradiation and Electroless Plating"Proc. of the 2nd Intern. Conf. on Aluminum Surface Science and Technology. 169-174 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 高島房生, 三輪浩二, 坂入正敏, 高橋英明: "アルミニウムアノード酸化皮膜成長のIn-Situ AFM観察-皮膜表面の平坦化機構-"表面技術. 51. 625-632 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S, Z, Chu.Sakairi, M.Takahashi, H.Shimizu, K.Abe, Y.: "Laser-assisted Electroless Ni-P Deposition at Selected Area on Al-(Mg, Si, Cu) Alloys"J. Electrochem. Soc.. 147・6. 2181-2189 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 高島房生, 三輪浩二, 坂入正敏, 高橋英明: "アルミニウムアノード酸化皮膜成長のIn-Situ AFM観察-皮膜表面の平坦化機構-"表面技術. 51・6. 625-632 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S, Z, Chu.Sakairi, M.Takahashi, H: "Copper Electroless-plating at Selected Area on Aluminum with Pulsed Nd-YAG Laser"J. Electrochem. Soc.. 147・4. 1423-1434 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Kikuchi, S.Z.Chu, S.Jonishi, M.Sakairi, H.Takahashi: "Local Surface Modification of Aluminum by Laser Irradiation"ELECTROCHIM ACTA 47 (1-2):225-234 Sep.2001. 47・1-2. 225-234 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Z.Kato, M.Sakairi, H.Takahashi: "Fabrication of Grooves on Aluminum Surface with Atomic Force Microscope Probe Processing"J. Electrochem. Soc. 148(II):B473-B481 Nov. 2001. 148・11. B473-B481 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 菊地竜也, 坂入正敏, 高橋英明: "アノード酸化・レーザー照射・電気化学的手法によるアルミニウムの表面マイクロテクノロジー"表面技術52,84-85(2001). 51. 84-85 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 高橋英明, 坂入正敏, 菊地竜也: "アルミニウムのアノード酸化を利用したプリント配線基板の作製"表面科学,22,370-375(2001). 22. 370-375 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Z. Chu, M. Sakairi, H. Takahashi, Z. X. Qui: "Local Deposition of Ni-P Alloy on Aluminum by Laser Irradiation and Electroless-plating"J. Electrochem. Soc.. 146. 537-546 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Z. Chu, M. Sakairi, H. Takahashi: "Nucleation of Metals on Aluminum by Laser Irradiation"J. Electrochem. Soc. Jpn.. 146. 2876-2885 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Kikuchi, M. Sakairi, H. Takahashi, Y. Abe, N. Katayama: "Fabrication of Micro Circuit Board with Anodizing of Aluminum, Laser Irradiation and Electro-Deposition"J. Surf. Fin. Soc. Jpn.. 50. 829-835 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Z. Chu, M. Sakairi, H. Takahashi: "Copper Electroless-plating at Selected Area on Aluminum with Pulsed Nd-YAG Laser"J. Electrochem. Soc.. 147. 1423-1434 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] F. Takashima, K. Miwa, M. Sakairi, H. Takahashi: "In Situ AFM Observation of Growth of Anodic Oxide Films on Aluminum - Mechanism of Flattening of Film Surface"J. Surf. Fin. Soc. Jpn.. 51. 625-632 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Z. Chu, M. Sakairi, H. Takahashi, K. Shimizu, Y. Abe: "Laser-assisted Electroless Ni-P Deposition at Selected Area on Al-(Mg, Si, Cu) Alloy"J. Electrochem. Soc.. 147. 2182-2189 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Kikuchi, M. Sakairi, H. Takahashi: "Micro-Technology on Aluminum Surface with Anodizing, Laser Irradiation, and Electrochemical Technique"J. Sur. Soc. Jpn.. 52. 84-85 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Takahashi, M. Sakairi, T. Kikuchi: "Fabrication of Printed Circuit Board by Anodizing of Aluminum: H. Takahashi, M. Sakairi, and T. Kikuchi"J. Surf. Sci. Soc. Jpn.. 22. 370-375 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Kikuchi, M. Sakairi, H. Takahashi, Y. Abe, N. Katayama: "Fabrication of Micro Pores and Grooves on Aluminum by Laser Irradiation and Electrochemical Technique"J. Electrochem. Soc.. 148. C740-C745 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Z. Kato, M. Sakairi, H. Takahashi: "Fabrication of Grooves on Aluminum Surface with Atomic Force Microscope Probe Processing"J. Electrochem. Soc.. 148. C790-C798 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Kikuchi, S. Z. Chu, S. Jonishi, M. Sakairi, H. Takahashi: "Local Surface Modification of Aluminum by Laser Irradiation"Electrochim. Acta.. 47. 225-234 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Kikuchi, S. Z. Chu, S. Jonishi, M. Sakairi, H. Takahashi: "Local surface modification of aluminum by laser irradiation"Electrochimica Acta. 47. 225-234 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Z. Kato, M. Sakairi, H. Takahashi: "Fabrication of Grooves on Aluminum Surface with Atomic Force Microscope Probe Processing"J. Electrochem. Soc.. 148・11. B473-B481 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 菊地竜也, 坂入正敏, 高橋英明: "アノード酸化・レーザー照射・電気化学的手法によるアルミニウムの表面マイクロテクノロジー"表面技術. 52. 84-85 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 高橋英明, 坂入正敏, 菊地竜也: "アルミニウムのアノード酸化を利用したプリント配線基板の作製"表面科学. 22. 370-375 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Z.Chu: "Copper Electrolees Plating at Selected Areas on Aluminum with Pulsed Nd-YAG laser"J. Electrochem. Soc. 147. 1423-1434 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 高島房生: "アルミニウムアノード酸化皮膜成長のIn-situ AFM観察"表面技術. 51. 625-632 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.E.Chu: "laser -Assisted Electroless Ni-P Deposition at Selected Areas on Al-(Mg, Cu,Si) Allows"J.Electrochem.Soc.. 147. 2181-2189 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 高橋英明: "アノード酸化を基礎とする新規なアルミニウム表面改質・加工技術"軽金属. 55. 544-551 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S. Z. Chu: "Local Deposition of Ni-P Alloys on Aluminum by Laser Irradiation and Electroless Plating"J. Electrochem. Soc.. 146・2. 537-546 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Z. Chu: "Nucleation of Matals on Aluminum by Laser Irradiation and the Effect on Ni-P Electroless Plating"J. Electrochem. Soc.. 146・8. 2876-2885 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Z. Chu: "Copper Electroless Plating at Selected Areas on Aluminum with Pulsed Nd-YAG Laser"J. Electrochem. Soc.. 147・4. accepted (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 菊地 竜也: "Alのアノード酸化とレーザー題材を利用した金属微細構造の作製"表面技術. 50・8. 697-704 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 菊地 竜也: "アルミニウムアノード酸化/レーザー照射/電気めっきを用いた微細回路板の作製"表面技術. 50・9. 829-835 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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