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Research on Five-Layer Asymmetric Coupled Quantum Wells and Their Application to Ultra-Fast and Ultra-Low Voltage Optical Modulators and Switches

Research Project

Project/Area Number 11450028
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionYokohama National University

Principal Investigator

TADA Kunio  Yokohama National Univ., Faculty of Engineering, Professor, 工学部, 教授 (00010710)

Co-Investigator(Kenkyū-buntansha) NOH Joo-hyong  Yokohama National Univ., Faculty of Engineering, Research Associate, 工学部, 助手 (50313474)
ARAKAWA Taro  Yokohama National Univ., Faculty of Engineering, Associate Professor, 工学部, 助教授 (40293170)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥14,600,000 (Direct Cost: ¥14,600,000)
Fiscal Year 2000: ¥4,900,000 (Direct Cost: ¥4,900,000)
Fiscal Year 1999: ¥9,700,000 (Direct Cost: ¥9,700,000)
KeywordsPotential-tailored quantum well / Five-layer asymmetric coupled quantum well (FACQW) / Optical modulator / Optical switch / Electrorefractive index change / Molecular beam epitaxy (MBE) / Migration enhanced epitaxy (MEE) / Layer thickness fluctuation / 光変調デバイス / 電界誘起屈折率変化
Research Abstract

The five-layer asymmetric coupled quantum well (FACQW) structure, in contrast to the conventional rectangular quantum well (RQW), can produce very large electrorefractive index change Δn in the transparency wavelength region far from the absorption edge. We theoretically and experimentally studied fabrication of high-quality GaAs/AlGaAs FACQWs and their application to optical modulators and switches.
1. Fabrication and Characterization of the FACQW structures
The FACQWs were grown by molecular beam epitaxy (MBE) with precise shutter control.
Photoluminescence and photocurrent measurements of the samples revealed that the structures were fabricated as designed and their Δn characteristucs were consistent with calculation results.
2. Influence of layer thickness fluctuation on electrorefractive index change of the FACQW
The influence of 1 ML thickness deviations and fluctuations from the designed FACQW structure on Δn was studied theoretically.
i) The thickness variation of the thicker GaAs we … More ll layers in the FACQW has a considerable influence on Δn. The influence of the two thin Al(Ga)As barrier layers is small compared with that of other GaAs well layers.
ii) The ratio of the thicknesses of the two thicker GaAs layers significantly affects the Δn, characteristics of the FACQW.The value Δn does not change as long as the ratio of the thicknesses of the layers is kept constant.
iii) The physical origin of the sharp dip in the Δn-electric field characteristic was studied theoretically. The dip can be removed by changing the position or Al content of the thin AlGaAs barrier layer for potential modification.
iv) The influence of the statistical fluctuation of the layer thickness by 1 ML on the Δn characteristics was discussed. Even when An decreases with the increase of the occurrence probability of a layer being thicker or thinner by 1 ML (the ratio of well area with deviated thicknesses to total area of the layer), the FACQW still maintains a much larger Δn than the conventional rectangular quantum wells (RQWs).
3. Growth of high-quality quantum well structures with migration enhanced epitaxy method
The migration enhanced epitaxy (MEE) method is a promising growth technique that can obtain flatter and steeper heterointerfaces at lower growth temperature than conventional MBE.We introduced the MEE method to growth of high-quality quantum well structures.
i) A computer-controlled system of K-cell shutters was installed for complicated gowth
sequence of MEE.
ii) K-cell shutter sequence for AlGaAs growth was investigated. We found the sequence that after Al and Ga atoms are supplied simultaneously, Ga and As atoms are supplied alternatively can realize flatter heterointerface without Al content fluctuation. Utilizing this sequence, high-quality RQWs were successfully grown at 500℃.
4. Electrorefrative effect in a modified FACQW
A modified FACQW has a slightly different structure from the normal FACQW, and it is expected to obtain very large negative Δn. We theoretically studied in detail electrorefrative effect in the modified FACQW.We discussed the detailed mechanism of large Δn in the modified FACQW.In addition, we found that the modified FACQW has more tolerance of layer thickness fluctuation than the normal FACQW. Less

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (37 results)

All Other

All Publications (37 results)

  • [Publications] K.Tada: "New High-Performance Optical Modulators Based on Potential Tailored Quantum Wells (Invited)"Technical Digest of the Pacific Rim Conference on Lasers and Electro Optics (CLEO/PR'99). Vol.2. 189-190 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada,N.Kurosawa,and T.Arakawa: "Anomalous Dip of Large Electrorefractive Index Change in the Five-Step Asymmetric Coupled Quantum Well (FACQW)"Proc.OSA Annual Meeting. 129 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Suzuki,N.Haneji,K.Tada, et.al.: "ECR Reactive Ion Etching of InP by Cyclic Injection of CH_4/H_2/Ar and O_2"Proc.2nd Japan-Korea Joint Workshop on Short-Wavelength Semiconductor Optoelectronic Devices and Materials. 97 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada: "Potential-Tailored Quantum Well Modulators for High-Speed Optical Fiber Communication (Invited)"Proc.5th Asia-Pacific Conference on Communications/4th Opto-Electronics Communications Conference (ARCC/OECC'99). Vol.2. 1534-1537 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada: "Ultrafast and Low-Voltage Optical Modulators Based on Five-Layer Asymmetric Coupled Quantum Well (FACQW)"Proc.3rd Japan-Germany Joint Workshop on Recent Progress in Advanced Materials, Devices, Processing, and Characterization. Vol.2. 22 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 多田邦雄,荒川太郎,黒澤直樹: "5層非対称結合量子井戸(FACQW)の電界誘起屈折率変化の特異なディップ"第60回応用物理学会学術講演会・予稿集(3a-ZB-9). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 多田邦雄,荒川太郎,黒澤直樹: "5層非対称結合量子井戸(FACQW)の電界誘起屈折率効果の層厚誤差依存性"第60回応用物理学会学術講演会・予稿集(3a-ZB-8). (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada,T.Arakawa,N.Kurosawa,J.H.Noh,and T.Suzuki: "Anomalous Sharp Dip of Large Field-Induced Refractive Index Change in GaAs/AlGaAs Five-Layer Asymmetric Coupled Quantum Well"Proc.Third SANKEN International Symposium. 2-38 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 鈴木達也,盧柱亨,荒川太郎,岡宮由樹,伊藤安弘,多田邦雄: "MEE法の5層非対称結合量子井戸光変調器作製への応用"第61回応用物理学会学術講演会・予稿集(4aZE-2). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 数馬研介,多田邦雄,荒川太郎,盧柱亨: "5層非対称結合量子井戸の層厚ゆらぎを考慮した電界誘起屈折率変化特性の解析"第61回応用物理学会学術講演会・予稿集(4aZE-3). (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 多田邦雄: "ポテンシャル制御量子井戸と高性能光変調デバイス"応用物理. Vol.69,No.11. 1292-1298 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Arakawa,K.Tada,N.Kurosawa,J.-H.Noh: "Anomalous Sharp Dip of Large Field-Induced Refractive Index Change in GaAs/AlGaAs Five-Layer Asymmetric Coupled Quantum Well"Japanese Journal of Applied Physics. Vol.39,No.11. 6329-6333 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada,T.Arakawa,K.Kazuma,N.Kurosawa,and J.-H.Noh: "Influence of One Monolayer Thickness Variation in GaAs/AlGaAs Five-Layer Asymmetric Coupled Quantum Well upon Electrorefractive Index Change"Japanese Journal of Applied Physics. Vol.40,No.2. 656-661 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Kunio Tada,Taro Arakawa,Joo-Hyong Noh,Tatsuya Suzuki: "Ultra-Fast and Low Voltage Optical modulator Based on Five-Layer Asymmetric Coupled Quantum Well"Proc.of The 6th Japan-Taiwan Seminar on Science and Technology Advanced Compound Semiconductor Materials and Devices. 16 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 岡宮由樹,盧柱亨,荒川太郎,鈴木達也,酒井信昭,長谷川怜雄,多田邦雄: "MEE法の5層非対称結合量子井戸光変調器作製への応用(II)"第48回応用物理学関係連合講演会・予稿集(28a-YF-5). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 飯野隆二,数馬研介,荒川太郎,多田邦雄,盧柱亨: "Modified FACQWの層厚ゆらぎを考慮した電界誘起屈折率変化特性の解析"第48回応用物理学関係連合講演会・予稿集(28a-YF-6). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada: "New High-Performance Optical Modulators Based on Potential Tailored Quantum Wells (Invited)"Technical Digest of the Pacific Rim Conference on Lasers and Electro Optics (CLEO/PR '99). Vol.2. 189-190 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada, N.Kurosawa, and T.Arakawa: "Anomalous Dip of Large Electrorefractive Index Change in the Five-Step Asymmetric Coupled Quantum Well (FACQW)"Proc. OSA Annual Meeting. 129 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Suzuki, N.Haneji, K.Tada, M.Sugiyama, Y.Shimogaki, and Y.Nakano: "ECR Reactive Ion Etching of InP by Cyclic Injection of CH_4/H_2/Ar and O_2"Proc. 2nd Japan-Korea Joint Workshop on Short-Wavelength Semiconductor Optoelectronic Devices and Materials. 97 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada: "Potential-Tailored Quantum Well Modulators for High-Speed Optical Fiber Communication (Invited)"Proc. 5th Asia-Pacific Conference on Communications/4th Opto-Electronics Communications Conference (ARCC/OECC '99). Vol.2. 1534-1537 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada: "Ultrafast and Low-Voltage Optical Modulators Based on Five-Layer Asymmetric Coupled Quantum Well (FACQW)"Proc. 3rd Japan-Germany Joint Workshop on Recent Progress in Advanced Materials, Devices, Processing, and Characterization. 22 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada, T.Arakawa, N.Kurosawa, J.H.Noh, and T.Suzuki: "Anomalous Dip of Large Electrorefractive Index Change in Five-Layer Asymmetric Coupled Quantum Well (FACQW)"Proc. Third SANKEN International Symposium. 2-38 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada: "Potential-tailored quantum wells and high-performance optical modulators"OYO BUTURI. Vol.69. 1292-1298 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Arakawa, K.Tada, N.Kurosawa, and J.H.Noh: "Anomalous Sharp Dip of Large Field-Induced Refractive Index Change in GaAs/AlGaAs Five-Layer Asymmetric Coupled Quantum Well"Jpn.J.Appl.Phys.. Vol.39. 6329-6333 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tada, T.Arakawa, K.Kazuma, N.Kurosawa, and J.H.Noh: "Influence of One Monolayer Thickness Variation in GaAs/AlGaAs Five-Layer Asymmetric Coupled Quantum Well upon Electrorefractive Index Change"Jpn.J.Appl.Phys.. Vol.49. 656-661 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Kunio Tada, Taro Arakawa, Joo-Hyong Noh, Tatsuya Suzuki: "Ultra-Fast and Low Voltage Optical modulator Based on Five-Layer Asymmetric Coupled Quantum Well"Proc. of The 6th Japan-Taiwan Seminar on Science and Technology -Advanced Compound Semiconductor Materials and Devices. 16 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Arakawa,K.Tada,N.Kurosawa,J.-H.Noh: "Anomalous Sharp Dip of Large Field-Induced Refractive Index Change in GaAs/AlGaAs Five-Layer Asymmetric Coupled Quantum Well"Japanese Journal of Applied Physics. Vol.39,No.11. 6329-6333 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Tada,T.Arakawa,K.Kazuma,N.Kurosawa,and J.-H.Noh: "Influence of One Monolayer Thickness Variation in GaAs/AlGaAs Five-Layer Asymmetric Coupled Quantum Well upon Electrorefractive Index Change"Japanese Journal of Applied Physics. Vol.40,No.2. 656-661 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Kunio Tada,Taro Arakawa, Joo-Hyong Noh,Tatsuya Suzuki: "Ultra-Fast and Low Voltage Optical modulator Based on Five-Layer Asymmetric Coupled Quantum Well"Proc.of The 6th JAPAN-Taiwan Seminar on Science and Tech-nology Advanced Compound Semiconductor Materials and Devices. 16 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 多田邦雄: "ポテンシャル制御量子井戸と高性能光変調デバイス"応用物理. Vol.69,No.11. 1292-1298 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 鈴木達也,盧柱亨,荒川太郎,岡宮由樹,伊藤安弘,多田邦雄: "MEE法の5層非対称結合量子井戸光変調器作製への応用"第61回応用物理学会学術講演会・予稿集(4aZE-2). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 数馬研介,多田邦雄,荒川太郎,盧柱亨: "5層非対称結合量子井戸の層厚ゆらぎを考慮した電界誘起屈折率変化特性の解析"第61回応用物理学会学術講演会・予稿集(4aZE-3). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Tada: "New High-Performance Optical Modulators Based on Potential Tailored Quantum Wells (Invited)"Technical Digest of the Pacific Rim Conference on Lasers and electro Optics (CLEO/PR '99). Vol. 2. 189-190 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Tada: "Potential-Tailored Quantum Well Modulators for High-Speed Optical Fiber Communication (Invited)"Proc. 5th Asia-Pacific Conference on Communications/4th Opto-Electronics Communications Conference (ARCC/OECC '99). Vol. 2. 1534-1537 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Tada,N.Kurosawa and T.Arakawa: "Anomalous Dip of Large Electrorefractive Index Change in the Five-Step Asymmetric Coupled Quantum Well (FACQW)"Proc. OSA Annual Meeting. 129 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Suzuki,N.Haneji,K.Tada,M.Sugiyama,Y.Shimogaki and Y.Nakano: "New High-Performance Optical Modulators Based on Potential Tailored Quantum Wells (Invited)"Proc. 2nd Japan-Korea Joint Workshop on Short-Wavelength Semiconductor Optoelectronic Devices and Materials. 97 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Tada: "Ultrafast and Low-Voltage Optical Modulators Based on Five-Layer Asymmetric Coupled Quantum Well (FACQW)"To appear in Proc. 3rd Japan-Germany Joint Workshop on Recent Progress in Advanced Materials, Devices, Processing, and Characterization. (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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