• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Rltraprecision Machinig of Optical Materials for Deep Ultra Violet Lasers of High Brightness and Improvement of Optical Performancs

Research Project

Project/Area Number 11450063
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionCHUBU UNIVERSITY

Principal Investigator

OHNISHI Naoyuki  Chubu University, Dept.Mechanical Engineering, Associate Professor, 工学部, 助教授 (60201977)

Co-Investigator(Kenkyū-buntansha) NAMBA Yoshiharu  Chubu University, Dept.Mechanical Engineering, Professor, 工学部, 教授 (40029129)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥14,800,000 (Direct Cost: ¥14,800,000)
Fiscal Year 2001: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 2000: ¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 1999: ¥9,100,000 (Direct Cost: ¥9,100,000)
KeywordsAtomic surface structure analysis / Float polishing / Calcium fluoride / Deep ultra violet laser / Laser induced damage threshold / Micro lithography / フロートポリシング / 超精密加工 / 表面原子構造 / フッ化物結晶 / 超精密研削 / 超精密ダイヤモンド切削 / 透過率
Research Abstract

Deep Ultra Violet (DUV) lasers of high brightness are expected as a light source for the next generation micro lithography, laser micro processing due to photo-chemical reaction and laser fusion. However, there are serious problems such as the limitation of optical materials to be transmitted, lack of experience of machining on the optical materials in high precision and laser induced damages of the materials. This research work is intended to propose the flat optical components for DUV lasers of high brightness in high precision, high transmittance, high Laser Induced Damage Threshold (LIDT) and high reliability.
The (111) surfaces of high purity calcium fluoride (CaF_2) single crystals for DUV were polished and 0.16nm rms in surface roughness was obtained on the float polished surface, measured with an atomic force microscope (AFM). From the observation with a high voltage transmission electron microscope (HVTEM), it was clarified that the float polished surface shows perfect (111) lattice and small atomic steps and there are no damage on the subsurface. We obtained a fourth harmonic laser of 266nm in wavelength by using nonlinear crystals of KDP and CLBO from Nd:YAG lasers. From the irradiation of the laser on the GaF_2 crystals, LIDT was measured. The LIIDT numbers are different among the CaF_2 crystals in various benders, surface finish and laser irradiation number.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (31 results)

All Other

All Publications (31 results)

  • [Publications] Y.NAMBA: "Fracture Strength of Zero-Thermal Expansion Glass-Ceramics for Ultra-Precision Components"Annals of the CIRP. 50・1. 239-242 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 難波義治: "紫外光学材料の精密加工技術"光学. 30・12. 801-807 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 宇野義幸: "プラスチックのレーザフォーミングに関する研究-試料厚さが変形特性に及ぼす影響-"精密光学会誌. 68・3. 466-471 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Ekkard Brinksmeier: "Initiatives of Precision Engineering at the Beginning of a Millennium"Kliwer Academic Publishers. 977 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Katagiri, Y.Namba: "Optical Surface Generation of KDP Inorganic Nonlinear optical Crystals by Ultraprecision Surface Grinding"J.JSPE. 65,6. 888-892 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Namba, H.Kobayashi, H.Suzuki, K.Yamashita: "Ultraprecision Surface Grinding of Chemical Vapor Deposited Silicon Carbide for X-Ray Mirrors Using Resinoid-Bonded Diamond Wheels"Annals of the CIRP. 48,1. 277-280 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Namba, T.Katayama: "Three Dimensional Thermal Elastic-Plastic Analysis of Laser Forming Process"J.JSPE. 65,9. 1330-1334 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Namba: "Development of Ultraprecision Machining Technology for Functional Optical Materials"Review of Laser Engineering. 27,9. 599-604 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Namba, J.Yu, J.M.Bennet, K.Yamashita: "Modeling and Measurements of Atomic Surface Roughness"Appl.Opt.. 39,16. 2705-2718 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Okamoto, Y.Uno, K.Ohta, T.Shibata, S.Kubota, Y.Namba: "Study on Precision Laser Forming of Plastic with YAG Laser"J.JSPE. 66,6. 891-895 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] L.He, Y.Namba, Y.Narita: "Wavelength Optimization for Machining Metals with the Harmonic Generations of a Short Pulsed Nd:YAG Laser"Prec.Eng.. 24,3. 245-250 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] L.He, Y.Namba: "Spectroscopic Analysis for Machining of Inorganic Materials with the Harmonics of a Nd:YAG Laser"Prec.Eng.. 24,4. 357-363 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Namba, H.Takehara, Y.Nagano: "Fracture Strength of Zero-Thermal Expansion Glass-Ceramics for Ultra-Precision Components"Annals of the CIRP. 50,1. 239-242 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Namba: "Precision Machining of Optical Materials for UV Applications"Jpn.J.Optics. 30,12. 801-807 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Uno, Y.Okamoto, T.shibata, M.Ohkubo, Y.Namba: "Study on Laser Forming of Plastic by YAG Laser"J.JSPE. 68,3. 466-471 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.NAMBA: "Fracture Strength of Zero-Thermal Expansion Glass-Ceramics for Ultra-Precision Components"Annals of the CIRP. 50・1. 239-242 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 難波義治: "紫外光学材料の精密加工技術"光学. 30・12. 801-807 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 宇野義幸: "プラスチックのレーザフォーミングに関する研究 -試料厚さが変形特性に及ぼす影響-"精密工学会誌. 68・3. 466-471 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Ekkard Brinksmeier: "Initiatives of Precision Engineering at the Beginning of a Millennium"Kliwer Academic Publishers. 977 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Namba: "Modeling and Measurements of Atomic Surface Roughness"Appl.Opt.. 39巻16号. 2705-2718 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 岡本康寛: "プラスチックの精密レーザフォーミングに関する研究"精密工学会誌. 66巻6号. 891-895 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] L.He: "Wavelength Optimization for Machining Metals with the Harmonic Generations of a Short Pulsed Nd : YAG Laser"Prec.Eng.. 24巻3号. 245-250 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] L.He: "Spectroscopic Analysis for Machining of Inorganic. Materials with the Harmonics of a Nd : YAG Laser"Prec.Eng.. 24巻4号. 357-363 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Namba: "Fracture Strength of Zero-Thermal-Expansion Glass-Ceramics for Ultra-Precision Components"Annals of the CIRP. 50巻1号. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大西直之: "ゼオライト結晶-HREM像、SAEDパターンの定量解析によるアプローチ"バウンダリー. 15・8. 3-9 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 片桐匡教: "超精密平面研削による無機非線形光学結晶KDPの光学面創成"精密工学会誌. 65・6. 888-892 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Namba: "Ultraprecision Surface Grinding of Chemical Vapor Deposited Silicon Carbide for X-Ray Mirrors Using Resinoid-Bonded Diamond Wheels"Annals of the CIRP. 48・1. 277-280 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 難波義治: "レーザ・フォーミングの三次元熱弾塑性解析"精密工学会誌. 65・9. 1330-1334 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 難波義治: "機能性光学材料の超精密加工"レーザー研究. 27・9. 599-604 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Yu: "Surface Roughness Limit for Super-Machined Mirrors Measured with Scanning Probe Microscopy"Proc.ASPE 14ty Annual Meeting. 368-371 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 佐々木泰三: "X線結像光学"培風館. 309 (1999)

    • Related Report
      1999 Annual Research Report

URL: 

Published: 1999-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi