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Study on Micro Flow Behavior and Applications to Micro Systems of Electrorheological Fluids

Research Project

Project/Area Number 11450097
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionYamagata University

Principal Investigator

NAKANO Masami  Yamagata University, Dept. of Mechanical Systems Engineering, Professor, 工学部, 教授 (40147947)

Co-Investigator(Kenkyū-buntansha) SATOU Akira  Yamagata University, Dept. of Mechanical Systems Engineering, Research Associate, 工学部, 助手 (40333992)
VIEIRA L.Sheila  Yamagata University, Dept. of Mechanical Systems Engineering, Research Associate, 工学部, 助手 (70302304)
MATSUSHITA Koichi  Yamagata University, Dept. of Electrical Engineering, Professor, 工学部, 教授 (70124625)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥13,800,000 (Direct Cost: ¥13,800,000)
Fiscal Year 2001: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 2000: ¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 1999: ¥9,000,000 (Direct Cost: ¥9,000,000)
KeywordsElectrorheological Fluid / Micro System / Flow mode / Micro Flow Behavior / Flow Rate Control Characteristics / 3-Ports Micro Valve / Micro Actuator / Piezoelectric Micro Pump / 分散系ER流体 / 回転せん断流れ / スクイーズ流れ / マイクロ流動 / ERマイクロアクチュエータ / PWM制御 / ER圧電マイクロポンプ / フォトリソグラフィ / 各種流れモード / 3ポートERバルブ / ERマイクロポンプ / 駆動法 / マイクロERバルブ / DC電圧制御 / クラスター / フォトレジスト法
Research Abstract

ER fluids are one of an exciting family of functional fluids, which show dramatic and reversible rheplogical changes in several milliseconds when the electric field is applied. Therefore, for example, in the ER fluid hydraulic circuit systems, it is possible to control the pressure and flow rate using an ER valve consisting of only electrodes with no moving parts. In this research, featuring the possibility of miniaturization of ER mechanical elements such as clutch, brake, damper and valve due to their construction using only electrodes, the following investigations have been done in order to develop micro systems utilizing electrorheological fluids as working oils.
(1) The flow fields frequently used in the ER micro systems are classified into three flow modes such as a pressure flow, a shear flow and a squeeze flow. For three kinds of ER fluids, the micro flow characteristic in these three flow modes with an about 0.1-0.3mm micro gap was clarified by flow visualization observation in … More close relation to each ER characteristic, and the ER fluid suitable for the ER micro system and the optimal design concept for applications were shown.
(2) As some examples of micro systems, the 3-ports micro ER valve and the micro-actuator consisting of two ER valves and a diaphragm drive part were fabricated by the photolithography method. The flow rate control characteristics for the 3-ports micro ER valve and the diaphragm response characteristics for the micro-actuator in open loop control and PID position feedback control were evaluated.
(3) A piezoelectric micro pump for ER fluids actuated by a piece of PVDF piezdelectric-film diaphragm for supplying ER fluid to the above micro-actuator was developed. A normalized method for evaluating the behaviors of a circular unimorph piezoelectric diaphragm was deduced and the diaphragm deformation for the input voltage and the pumping flow rate were analyzed, and the piezoelectric diaphragm pump of 10mm diameter was actually constructed, and the pumping performance was evaluated. Less

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (62 results)

All Other

All Publications (62 results)

  • [Publications] M.Nakano: "Dynamic viscoelasticity in oscillatory slit flow of an ER suspension containing sulfonated polymer particles"International Journal of Modern Physics B. Vol.13. 1870-1877 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nakano: "Dynamic viscoelasticity of a magnetorheological fluid in oscillatory slit flow"International Journal of Modern Physics B. Vol.13. 2068-2076 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nakano: "PWM flow rate control of ER valve and its application to ER actuator control"International Journal of Modern Physics B. Vol.13. 2168-2175 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Yamamoto: "Dynamic viscoelasticity and its mechanical model of an MR suspension in oscillatory slit flow mode"Journal of Intelligent Material Systems and Structures. Vol.10. 658-665 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 松下浩一: "高真空中接触角測定法によるGaAs表面状態の「その場」観察"電子情報通信学会論文誌C. Vol.J84-C. 136-143 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.L.Vieira: "Transient behavior of microstructure of electrorheological fluids in shear flow mode"International Journal of Modern Physics B. Vol.15. 695-703 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.L.Vieira: "Mechanical properties of an ER fluid in tensile, compression and oscillatory squeeze tests"International Journal of Modern Physics B. Vol.15. 714-722 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] R.Aizawa: "Hysteresis phenomenon in flow-curves of ER fluids containing sulfonated polymer particles"International Journal of Modern Physics B. Vol.15. 1070-1077 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K.Matsushita: "Characterization of Pure Water Treated GaAs Surfaces by Measuring Contact Angles of Water Droplets"Journal of Electrochemical Society. Vol.148. G401-G405 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K.Matsushita: "Observation of GaAs Surface in High Vacuum by Contact Angle Measurement"Electronics and Communications in Japan, Part2. Vol.84. 51-59 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 山本英樹: "MR流体の圧力流れモードにおけるレオロジー特性とその動的機械モデル"日本レオロジー学会誌. 第30巻. 83-88 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nakano: "ER properties and flow-induced microstructures of an ER fluid between two parallel disk electrodes in squeeze flow mode"International Journal of Modern Physics B. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Nishiyama: "Numerical simulation of M fluids damping characteristics using modified Bingham model"International Journal of Modern Physics B. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nakano: "Three-ports micro ER valve for ER suspension fabricated by photolithography"Journal of Intelligent Material Systems and Structures. (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 中野政身-分担執筆-: "電気粘性(ER)流体の開発"シーエムシー. 288 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 中野政身-分担執筆-: "機能性流体の油空圧機器への応用に関する研究委員会研究成果報告書"日本フルードパワーシステム学会. 227 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakano: "Dynamic viscoelasticity in oscillatory slit flow of an ER suspension containing sulfonated polymer particles"Int. J. of Modern Physics B. 13-14,15 &16. 1870-1877 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakano: "Dynamic viscoelasticity of a magnetorheological fluid in oscillatory slit flow"Int. J. of Modern Physics B. 13-14,15&16. 2068-2076 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakano: "PWM flow rate control of ER valve and its application to ER actuator control"Int. J. of Modern Physics B. 13-14,15&16. 2168-2175 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Yamamoto: "Dynamic viscoelasticity and its mechanical model of an MR suspension in oscillatory slit flow mode"J. of Intelligent Material Systems and Structures. 10-8. 658-665 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakano: "Narrow slit flow of an electrorheological fluid"Proc. of 7th Int. Conf. On Er fluids and MR Suspensions. 72 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.L. Vieira: "Visualization of ER fluid microstructure in oscillatory slit flow"Proc. of 4th JHPS Int. Symp. On Fluid Power. 371-376 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Matsushita: "In-situ observation of GaAs surface in high vacuum by contact angle measurement"Journal of Society of Electronics and Communications in Japan. J84C-2. 136-143 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.L. Vieira: "Transient behavior of microstructure of electrorheological fluids in shear flow mode"Int. J. of Modern Physics B. 15-6&7. 695-703 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.L. Vieira: "Mechanical properties of an ER fluid in tensile, compression and oscillatory squeeze tests"Int. J. of Modern Physics B. 15-6&7. 695-703 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] R. Aizawa: "Hysteresis phenomenon in flow-curves of ER fluids containing sulfonated polymer particles"Int. J. of Modern Physics B. 15-6&7. 1070-1077 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Matsushita: "Characterization of pure water treated GaAs surfaces by measuring contact angles of water droplets"J. of Electrochemical Society. 148-8. G401-G405 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Matsushita: "In-situ observation of GaAs surface in high vacuum by contact angle measurement"Electronics and Communications in Japan, Part 2. 84-11. 51-59 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakano: "Hysteresis phenomenon and related microstructures of ER fluids between two relatively rotating parallel disks"Proc. of the first Int. Symp. On Advanced Fluid Information (AFI-2001). 498-501 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Yamamoto: "Rheological properties and dynamic mechanical model of a magnetorheological suspension in pressure flow mode"J. of Soc. of Rheology, Japan. 30-2. 83-88 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakano: "ER properties and flow-induced microstructures of an ER fluid between two parallel disk electrodes in squeeze flow mode"Int. J. of Modern Physics B. (in press). 2002

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Nishiyama: "Numerical simulation of MR fluids damping characteristics using modified Bingham model"Int. J. of Modern Physics B. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakano: "Three-ports micro ER valve for ER suspension fabricated by photolithography"J. of Intelligent Material Systems and Structures. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakano: "Development of Electro-Rheological Fluid"CMC Publishing. 288 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakano: "Report of Research Committee on the Applications of Functional Fluids to Hydraulic and Pneumatic Systems"Japan Fluid Power System Society. 227 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nakano: "Transient behavior of microstructure of electrorheological fluids in shear flow mode"International Journal of Modern Physics B. 15・6&7. 695-703 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Nakano: "Mechanical properties of an ER fluid in tensile,compression and oscillatory squeeze tests"International Journal of Modern Physics B. 15・6&7. 714-722 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] R.Aizawa: "Hysteresis phenomenon in flow-curves of ER fluids containing sulfonated polymer particles"International Journal of Modern Physics B. 15・6&7. 1070-1077 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 山本英樹: "MR流体の圧力流れモードにおけるレオロジー特性とその動的機械モデル"日本レオロジー学会誌. 30・2. 83-88 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Nakano: "ER properties and microstructure of an ER fluid between two parallel disk electrodes in squeeze flow mode"Proceedings of 8^<th> Int.Conf.on ER fluids and MR suspensions. D-2 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Nakano: "Three-ports micro ER valve fabricated by photolithography"Proceedings of 8^<th> Int.Conf.on ER fluids and MR suspensions. PA-9 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Nakano: "Hysteresis phenomenon and related microstructures of ER fluids between two relatively rotating parallel disks"Proceedings of the first international symposium on advanced fluid information(AFI-2001). 498-501 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Matsushita: "Characterization of Pure Water Treated GaAs Surfaces by Measuring Contact Angles of Water Droplets"Journal of Electrochemical Society. 148・8. G401-G405 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Matsushita: "In-Situ Observation of GaAs Surface in High Vacuum by Contact Angle Measurement"Electronics and Communications in Japan,Part2. 84・11. 51-59 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 加藤輝雄: "フォトリソグラフィ法によって製作した分散系ER流体用3ポートマイクロERバルブ"JSME第79期流体工学部門講演会CD-ROM版講演論文集. No.01-3・論文No.511. 1-4 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 中野政身: "分散系ER流体のスクイーズ流れモードにおけるER効果とマイクロ流動特性"JSME第79期流体工学部門講演会CD-ROM版講演論文集. No.01-3・論文No.512. 1-4 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 中野 政身 (編集・分担執筆): "機能性流体の油空圧機器への応用に関する研究委員会研究成果報告書"日本フルードパワーシステム学会. 227 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Nakano: "Transient behavior of microstructure of electrorheological fluids in shear flow mode"Proc.of 7^<th> Int.Conf.on ER fluids and MR Suspensions (World Scientific Publishing). 152-160 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Nakano: "Mechanical properties of an ER fluid in tensile, compression and oscillatory squeeze tests"Proc.of 7^<th> Int.Conf.on ER fluids and MR Suspensions (World Scientific Publishing). 171-179 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] R.Aizawa: "Hysteresis phenomenon in flow-curves of ER fluids containing sulfonated polymer particles"Proc.of 7^<th> Int.Conf.on ER fluids and MR Suspensions (World Scientific Publishing). 595-602 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 中野政身: "分散系ER流体のマイクロスリット流れとER効果"JSME2000年次大会講演論文集. No.IV. 287-288 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 長田稔生: "ER流体のスクイーズ流れモードにおけるER効果"JSME2000年次大会講演論文集. No.IV. 289-290 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 松下浩一: "超高真空中接触角測定法によるGaAs基板表面の『その場』観察"電子情報通信学会論文誌C. Vol.J84-C,No.2. 136-143 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Nakano: "Dynamic viscoelasticity in oscillatory slit flow of an ER suspension containing sulfonated polymer particles"International Journal of Modern Physics B. Vol.3,No.14,15&16. 1870-1877 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Nakano: "PWM flow rate control of ER valve and its application to ER actuator control"International Journal of Modern Physics B. Vol.3,No.14,15&16. 2168-2175 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Nakano: "Narrow slit flow an Electrorheological fluid"Abstracts of 7th Int. Conf. On ERF and MRS. 72-72 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.L.Vieira: "Visualiation of ER fluid microstructure in oscillatory slit flow"Proc. Of 4th JHPS Int.Symp.on Fluid Power. 371-376 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.L.Vieira: "Mechanical properties of an ER fluid in tensile, compression and oscillatory squeeze tests"International Journal of Modern Physics B. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] R.Aizawa: "Hysteresis phenomenon in flow-curves of ER fluids containing sulfonated polymer particles"International Journal of Modern Physics B. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.L.Vieira: "Transient behavior of microstructure of electrorheological fluids in shear flow mode"International Journal of Modern Physics B. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 松下浩一: "超高真空中接触角測定法によるGaAs基板表面の『その場』観察"電子情報通信学会技術研究報告. CPM-99-50. 19-24 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 中野政身: "電気粘性(ER)流体の開発"シーエムシー. 288 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2021-12-14  

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