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Fabrication and Charcterization of All Oxide-semiconductor PIN Diodes

Research Project

Project/Area Number 11450124
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionOsaka University

Principal Investigator

KOBAYASHI Takeshi  Osaka University, Professor, 大学院・基礎工学研究科, 教授 (80153617)

Co-Investigator(Kenkyū-buntansha) MAKI Tetsuro  Osaka University, Res.Associate, 大学院・基礎工学研究科, 助手 (80273605)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥14,200,000 (Direct Cost: ¥14,200,000)
Fiscal Year 2000: ¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 1999: ¥10,700,000 (Direct Cost: ¥10,700,000)
Keywordsoxide / ferroelectric / oxide semiconductor / ZnO / SrTiO3 / BaTiO3 / senser / PLD / レーザーアブレーション / ダイオード / 薄膜 / 誘導体
Research Abstract

By virtue of variety of intrinsic functions involing in, the oxide materials have been used in wide fields so far from the electronic to the magnetic and optical fields. Recent progress of the semiconducting technologies have pushed the oxide materials to the most front in the electronics.
If some doping method for the oxide materials would be in our hand, they could serve as electronic materials more powerful than the existing semiconductors. This kind of dream is now coming true in our present research. Namely, the valence control of the oxide material has been established just like for the ordinary semiconductors. Now, the doped oxides can be called as the oxide semiconductors. First demonstration of the PIN diode prepared with all oxide semiconductors has been done by our group.
The first obstacle we faced was the trap (defects arising from the lattice imperfection) existing in all oxide layeres. In other words, it means that the oxide films grown by the PLD (pulsed laser deposition) method contained a number of defects. Now, the trap density was reduced down to <10E17/cm3, which can be favorably compared with the starting value of as high as >10E19. In the work, we proposed a new measuring method of trap density using the PIN diode structure.
We inserted the ferroelectric BaTiO3 and emissive (excitonic) ZnO layer as the i-layer of the PIN diode and explored the ferroelectricity during the minority carrier injection and injection luminescence, respectively. The outstanding result is the formation of ZnO film which provides the excitonic luminescence free from the deep level emission. This success was obtained from a new finding such that the film-interface precision control can be achieved by a combination of ZnO/LaSrTiO3.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] M.Sugiura,Y.Nakashima,and T.Kobayashi: "PLD Growth of p-NiO/i-ZnO/n-(La,Sr)TiO3 Double Heterostructure and Application to Injection Luminescence Devices"Int.Conf.on Crystal Growth (ICCG-2001). (採択). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 小林猛,秋吉秀樹,杉浦正典: "酸化物半導体の新しい薄膜作成法"ファインケミカル. 29,11. 15-21 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Tachiki,T.Hosomi and T.Kobayashi: "Room-Temperature Heteriepitaxial Growth of NiO Thin Films using Pulsed Laser Deposition"Jpn.J.Appl.Phys.. 39,4A. 1817-1820 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.Fang,M.Tachiki and T.Kobayashi: "Preparation of SrRuO3 thin film by chemical reactive pulsed laser deposition"Thin Solid Films. 368. 227-230 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Ito,K.Tsuji,T.Hosomi,T.Maki and T.Kobayashi: "Improved stability of Metal-Insulator-Diamond Semiconductor Interface by Employing CaF2/thin BaF2 Composite Insulator Film"Jpn.J.Appl.Phys.. 39,8. 4755-4756 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 小林猛,秋吉秀樹,佐藤一成: "アブレーションプラズマ生成・制御1(レーザー)"プラズマ・核融合学会誌. 76,11. 1145-1150 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 小林猛: "「材料と評価の最前線」日本材料学会記念出版"オーム社出版. 350- (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 小林猛: "応用物理ハンドブック"丸善出版. 600- (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Sugiura, Y.Nakashima and T.Kobayashi: "PLD Growth of p-NiO/i-ZnO/n-(La, Sr)TiO3 Double Heterostructure and Application to Injection Luminescence Devices"Int.Conf.on Crystal Growth. (ICCG-2001).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Kobayashi, H.Akiyoshi and M.Sugiura: "A New Thin Film Technology for Oxide Semiconductors Using The Laser Ablation"Fine-Chemical. Vol.-29, No.-11. 15-21 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Tachiki, T.Hosomi and T.Kobayashi: "Room-temperature Heteroepitaxial Growth of NiO Thin Films using Pulsed Laser Deposition"Jpn.J.Appl.Phys.. Vol.-39, No.-4A. 1817-1820 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] X.Fang, M.Tachiki and T.Kobayashi: "Preparation of SrRuO3 thin films by chemical reactive pulsed laser deposition"Thin Solid Films. Vol.-368. 227-230 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Ito, K.Tsuji, T.Hosomi, T.Maki and T.Kobayashi: "Improved Stability of Metal-insulator-Diamond Semiconductor Interface by Employing CaF2/thin BaF2 Composite Insulator Film"Jpn.J.Appl.Phys.. Vol.-39, No.-8. 4755-4756 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Kobayashi, A.Akiyoshi and I.Satoh: "Generation and Manipulation of Laser Ablation Plasma (Laser-1)"J.of Inst.Plasma and Nuclear Fusion. Vol.-76, No.-11. 1145-1150 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Sugiura,Y.Nakashima,T.Nakasaka and T.Kobayashi: "PLD Growth of p-NiO/i-ZnO/n-(La,Sr)TiO3 Double Heterostructure and Application to Injection Luminescence Devices"Int.Conf.on Crystal Growth(ICCG-2001). (採択). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 小林猛,秋吉秀樹,杉浦正典: "酸化物半導体の新しい薄膜作成法"ファインケミカル. 29,11. 15-21 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Tachiki,T.Hosomi and T.Kobayashi: "Room-Temperature Heteriepitaxial Growth of NiO Thin Films using Pulsed Laser Deposition"Jpn.J.Appl.Phys.. 39,4A. 1817-1820 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Xiaodong Fang,Minoru Tachiki and Takeshi Kobayashi: "Preparation of SrRuO3 thin film by chemical reactive pulsed laser deposition"Thin Solid Films. 368. 227-230 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] A.Ito,K.Tsuji,T.Hosomi,T.Maki and T.Kobayashi: "Improved Stability of Metal-Insulator-Diamond Semiconductor Interface by Employing CaF2/thin BaF2 Composite Insulator Film"Jpn.J.Appl.Phys.. 39,8. 4755-4756 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 小林猛,秋吉秀樹,佐藤一成: "アブレーションプラズマ生成・制御1(レーザー)"プラズマ・核融合学会誌. 76,11. 1145-1150 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 小林猛: "「材料と評価の最前線」日本材料学会記念出版"オーム社出版. 350 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 小林猛: "応用物理ハンドブック"丸善出版. 600 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] T. Kobayashi,M. tachiki &C. Cai: "Proposal of New PLD "Eclipse-Aurora Method" and its application to NiO/YBCO Josephson Junction Formation Suitable for Low-Noise SOUID"Int. Supercon. Electronics Conference (Berkeley). 497-499 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] X. Fang,M. Tachiki & T. Kobayashi: "Preparation of SrRuO3 thin film by chemical reactive pulsed laser deposition"1999 Asian CVD Conference (Invited Paper). (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Tachiki and T. Kobayashi: "Manipulation of Laser ablation Plume by Magnetic Field Application"Jpn. J. Appl. Phys.. 38-6A. 3642-3645 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Sugiura,M. Tachiki & T. Kobayashi: "Highly Smooth Surface of Perovskite-Type Oxide Thin Films Grown by Advanced Laser Ablation Method"Int. Conference on Perfect Surface 1999. (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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