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High Power Hydrothermal PZT Film and its Application to Transducers

Research Project

Project/Area Number 11450135
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionTokyo Institute of Technology

Principal Investigator

KUROSAWA Minoru  Department of Advanced Applied Electronics Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology Associate Professor, 大学院・総合理工学研究科, 助教授 (70170090)

Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥13,500,000 (Direct Cost: ¥13,500,000)
Fiscal Year 2000: ¥4,400,000 (Direct Cost: ¥4,400,000)
Fiscal Year 1999: ¥9,100,000 (Direct Cost: ¥9,100,000)
Keywordspiezoelectric material / PZT / PZT thin film / transducer / vibrator / actuator / sensor / vibration verocity
Research Abstract

High intensity vibration characteristics of the hydrothermaly deposited PZT thin film ultrasonic vibrator was examined. It was found that the hydrothermal deposition PZT film transducer had the superior characteristics at high intensity vibration condition. In case of bulk piezoelectric material, the transducer has non linear response against the variation of the frequency. However, the hydrothermal PZT film transduecer had linear response enven in high intensity vibration operation. We fabricated a transducer whose dimenstions were 1 mm wide, 7.8 mm long and 1.2 mm thick, then vibration characteristics was measured. The transducer which was 15 times deposition process and 38 μm PZT thick produced 2.24 m/sec vibration velocity at the driving voltage of 145 Vp-p. This value was more than 2 times of a bulk PZT material for high power application. Moreover, it was close to a crystal piezo material such as litium niobate transducer of 3 m/sec. It seems that the hydrothermal PZT h!
as poly crysital structure, hence it has superior characteristics at high intensity vibariton operation.
we examined the preprocess of the titanium treatment, then the piezoelectric constant was improved up to 2 times of the previouse one. A novel process of elector chemical method was tried. Large amount of deposition was obtained in short time reaction. Farther investigation is required for this point. Sonochemical method was also tried, but it requires deep investigation.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] T.Morita,M.K.Kurosawa and T.Higuchi: "A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4mm in diameter and 5.0 mm long stator transducer)"Sensors and Actuators A. vol.83. 225-230 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Kanda,T.Morita,M.K.Kurosawa,and T.Higuchi: "A flat type touch probe sensor using PZT thin film vibrator"Sensors and Actuators A. vol.83. 67-75 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Morita,M.K.Kurosawa and T.Higuchi: "A cylindrical micro-ultrasonic motor (stator transducer size : 1.4 mm in diameter and 5 mm long)"Ultrasonics. vol.38. 33-36 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 黒澤実: "加振形プローブセンサは今"エレクトロニクス. 46巻,1号. 66-68 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Kanda,M.K.Kurosawa,H.Yasui and T.Higuchi: "Performance of Hydrothermal PZT Film on High Intensity Operation"Sensors and Actuators A. vol.89. 16-21 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Kanda,T.Morita,M.K.Kurosawa,and T.Higuchi: "Estimation of Resolution and Contact Force of a Longitudinally Vibrating Touch Probe Sensor using Lead Zirconate Titanate (PZT) Thin-Film Vibrator"Jpn.J.Appl.Phys.. vol.40,part1,no.5B(to be published). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Morita, M.K.Kurosawa and T.Higuchi: "A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4mm in diameter and 5.0 mm long stator transducer)"Sensors & Actuators. A.. vol.83. 225-230 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Kanda, T.Morita, M.K.Kurosawa, and T.Higuchi: "A flat type touch probe sensor using PZT thin film vibrator"Sensors and Actuators A. vol.83. 67-75 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Morita, M.K.Kurosawa and T.Higuchi: "A cylindrical micro-ultrasonic motor (stator transducer size : 1.4 mm in diameter and 5 mm long)"Ultrasonics. vol.38. 33-36 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Kanda, M.K.Kurosawa, H.Yasui and T.Higuchi: "Performance of Hydrothermal PZT Film on High Intensity Operation"Sensors and Actuators A. vol.89. 16-21 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Kanda, T.Morita, M.K.Kurosawa, and T.Higuchi: "Estimation of Resolution and Contact Force of a Longitudinally Vibrating Touch Probe Sensor using Lead Zirconate Titanate (PZT) Thin-Film Vibrato"Jpn.J.Appl.Phys.. vol.40, part 1, no.5B. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Morita,M.K.Kurosawa and T.Higuchi: "A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4mm in diameter and 5.0 mm long stator transducer)"Sensors and Actuators A. vol.83. 225-230 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Kanda,T.Morita,M.K.Kurosawa,and T.Higuchi: "A flat type touch probe sensor using PZT thin film vibrator"Sensors and Actuators A. vol.83. 67-75 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Morita,M.K.Kurosawa and T.Higuchi: "A cylindrical micro-ultrasonic motor (stator transducer size : 1.4 mm in diameter and 5 mm long)"Ultrasonics. vol.38. 33-36 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 黒澤実: "加振形プローブセンサは今"エレクトロニクス. 46巻,1号. 66-68 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Kanda,M.K.Kurosawa,H.Yasui and T.Higuchi: "Performance of Hydrothermal PZT Film on High Intensity Operation"Sensors and Actuators A. vol.89. 16-21 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Kanda,T.Morita,M.K.Kurosawa,and T.Higuchi: "Estimation of Resolution and Contact Force of a Longitudinally Vibrating Touch Probe Sensor using Lead Zirconate Titanate (PZT) Thin-Film Vibrator"Jpn.J.Appl.Phys.. vol.40,part 1,no.5B(to be published).. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.K.Kurosawa,T.Kanda,T. Higuchi and T.Morita: "Thin Plate Longitudinal Vibrator Touch Probe Sensor using PZT Thin Film"Proc of IEEE Ultrasonic Symposium (発表予定).

    • Related Report
      1999 Annual Research Report
  • [Publications] M.K.Kurosawa,H.Yasui,T.Kanda and T.Higuchi: "Performance of Hydrothermal PZT Film on High Intensity Operation"Proc of Int. Micro Electro Mechanichal Systems Conf.. 56-61 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 神田岳文,森田剛,黒澤実,樋口俊郎: "PZT薄膜による縦振動子を用いた振動形プローブセンサ"電子情報通信学会技術研究報告.〔超音波〕. 99・132. 21-28 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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