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DEVELOPMENT OF SCANNING TUNNELING MICROSCOPE CAPABLE OF CHEMICAL ANALYSIS

Research Project

Project/Area Number 11555005
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 表面界面物性
Research InstitutionTHE UNIVERSITY OF TOKYO

Principal Investigator

MAEDA Koji  GRADUATE SCHOOL OF ENG., THE UNIVERSITY OF TOKYO, PROFESSOR, 大学院・工学系研究科, 教授 (10107443)

Co-Investigator(Kenkyū-buntansha) NAGAMURA Toshihiko  UNISOKU INC., RES. HEAD (Researcher), 研究開発部, 部長(研究職)
MERA Yutka  GRADUATE SCHOOL OF ENG., THE UNIVERSITY OF TOKYO, RES. ASSOC., 大学院・工学系研究科, 助手 (40219960)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥13,800,000 (Direct Cost: ¥13,800,000)
Fiscal Year 2001: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2000: ¥8,400,000 (Direct Cost: ¥8,400,000)
Fiscal Year 1999: ¥4,600,000 (Direct Cost: ¥4,600,000)
KeywordsSCANNING TUNNELING MICROSCOOPY / CHEMICAL ANAYSIS / MATERIAL INDENTIFICATION / PHOTOABSORPTION / ELECTRIC-FIELD MODULATION / NANOSCALE RESOLUTION / TIPS / GaAs / 蛍光X線 / 内殻励起 / 電子増倍管 / 電界放射
Research Abstract

In order to develop a scanning tunneling microscopic (STM) system that enables chemical analysis of light elements in the imaged regions, the following issues have been addressed.
(1)Quantitative considerations on a newly devised photoluminescent X-ray excitation electron energy spectroscopy (PXEEES) revealed that element analysis based on the threshold energy of electrons for X-ray generation is possible if a sufficient amount of field emission current is obtained from very sharp STM tips.
(2)To fabricate reproducibly sharp tips necessary for the PXEEES measurements, a novel method of tip fabrication, the ultra-fast current shut-off method, has been developed. The fabricated tips proved to be stable even at high bias voltages up to 500 V.
(3)Preliminary experiments using graphite samples revealed that irradiations of electrons in energies as low as 100eV can cause evaporation of ionic carbons, which led us to conclude that the PXEEES measurements are not possible in some materials vulnerable to such low energy electron radiation damage.
(4)As an alternative method, spatially-resolved photoabsorption spectroscopic measurements on a nanometer scale were found to be possible by using STM. Tests have been done successfully on GaAs samples.
(5)Electric-field modulation spectroscopy coupled with STM revealed to be capable of measuring band structures of semiconductors (low-temperature grown GaAs used as test samples) on nanometer scales.
(6)We have proposed a novel scheme of infrared absorption spectroscopy that utilizes infrared light generated by difference frequency generation due to the non-linear current-voltage relation and the tip-enhanced electromagnetic field in the STM tunneling junctions.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (23 results)

All Other

All Publications (23 results)

  • [Publications] Yoshiaki Nakamura, Yutaka Mera, Koji Maeda: "A Reproducible Method to Fabricate Atomically Sharp Tips for Scanning Tunneling Microscopy"Rev. Sci. Instr.. 70. 3373-3376 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Hida, Y.Mera, K.Maeda: "Photoabsorption Spectroscopy on Nanometer Scale by Scanning Tunneling Microscopy"Solid State Phenomena. 78-79(Invited). 419-424 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Hida, Y.Mera, K.Maeda: "Electric Field Modulation Spectroscopy by Scanning Tunneling Microscopy with a Nanometer-scale Resolution"Appl. Phys. Lett.. 78. 3029-3031 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Hida, Y.Mera, K.Maeda: "Nanometer Scale Measurements of Photoabsorption Spectra of Individual Defects in Semiconductors"Appl. Phys. Lett.. 78. 3190-3192 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Hida, Y.Mera, K.Maeda: "Indentification of Arsenic Antisite Defects with EL2 by Nanospectrosopic Studies of Individual Centers"Physica B. 308-310. 738-741 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Hida, Y.Mera, K.Maeda: "The Strain Field around a Single Point Defect in Semiconductors Spatially Resolved by Electric Field Modulation Scanning Tunneling Spectro-Microscopy"Physica B. 308-310. 1145-1149 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Nakamura et al.: "A Reproducible Method to Fabricate Atomically Sharp Tips for Scanning Tunneling Microscopy"Rev. Sci. Instrum.. 70-8. 3373-3376 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Hida et al.: "Photoabsorption Spectroscopy on Nanometer Scale by Scanning Tunneling Microscopy"Solid State Phenomena. 78-79. 419-424 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Hida et al.: "Electric Field Modulation Spectroscopy by Scanning Tunneling Microscopy with a Nanometer-scale Resolution"Appl. Phys. Lett.. 78-20. 3029-3031 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Hida et al.: "Nanometer Scale Measurements of Photoabsorption Spectra of Individual Defects in Semiconductors"Appl. Phys. Lett.. 78-21. 3190-3192 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Hida et al.: "Indentificaiton of Arsenic Antisite Defects with EL2 by Nanospectrosopic Studies of Individual Centers"Physica B. 308-310. 738-741 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Hida et al.: "Spatially Resolved by Electric Field Modulation Scanning Tunneling Spectro-Microscopy"Physica B. 308-310. 1145-1149 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Hida, et al.: "Photoabsorption Spectroscopy on Nanometer Scale by Scanning Tunneling Microscopy"Solid State Phenomena. 78-79. 419-424 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Nakamura, et al.: "Diffusion of Chlorine Atoms on Si (111)-(7×7) Surface Enhanced by Electron Injection from Scanning Tunneling Microscope Tips"Surf. Sci.. 487. 127-134 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Hida, et al.: "Electric Field Modulation Spectroscopy by Scanning Tunneling Microscopy with a Nanometer-scale Resolution"Appl. Phys. Lett.. 78・20. 3029-3031 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Hida, et al.: "Nanometer Scale Measurements of Photoabsorption Spectra of Individual Defects in Semiconductors"Appl. Phys. Lett.. 78・21. 3190-3192 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Hida, et al.: "The Strain Field around a Single Point Defect in Semiconductors Spatially Resolved by Electric Field Modulation Scanning Tunneling Spectro-Microscopy"Physica B. 308-310. 1145-1149 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Hida, et al.: "Indentification of Arsenic Antisite Defects with EL2 by Nanospectrosopic Studies of Individual Centers"Physica B. 308-310. 738-741 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 前田康二: "電子線で誘起される電子励起原子移動"電子顕微鏡. 35・3. 208-214 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y Nakamura et al.: "In situ Scanning Tunneling Microscopic Study of Polymerization of C_<60> Clusters induced by Electron Injection from the Probe Tips"Appl.Phys.Lett.. 77・18. 2834-2836 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Maeda et al.: "Dislocation Motion in Semiconducting Cystals under the Influence of Electronic Perturbations"J.Phys,: Condens.Matter. 12. 10079-10091 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] A.Hida et al.: "Photoabsorption Spectroscopy on Nanometer Scale by Scanning Tunneling Microscopy"Proc.6^<th> Int.Workshop on Beam Iniection Assessment of Microstructures of Semiconductors. (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y Nakamura: "A Reproducible Method to Fabricate Atomically Sharp Tips for Scanning Tunnel Microscopy"Rev.Sci.Instrum. 70・8. 3373-3376 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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