| Project/Area Number |
11555018
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| Research Category |
Grant-in-Aid for Scientific Research (B).
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Applied physics, general
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| Research Institution | Hokkaido University |
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Principal Investigator |
MATSUDA Osamu Graduate School of Engineering, Hokkaido University, Associate Professor, 大学院・工学研究科, 助教授 (30239024)
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| Co-Investigator(Kenkyū-buntansha) |
INAGAKI Katsuhiko Graduate School of Engineering, Hokkaido University, Instructor, 大学院・工学研究科, 助手 (60301933)
MUTO Shunichi Graduate School of Engineering, Hokkaido University, Professor, 大学院・工学研究科, 教授 (00114900)
WRIGHT Oliver,b Graduate School of Engineering, Hokkaido University, Professor, 大学院・工学研究科, 教授 (90281790)
YAMAMOTO Noritaka Seiko Instruments Inc., Researcher, 基盤技術部, 研究員
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| Project Period (FY) |
1999 – 2000
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| Project Status |
Completed (Fiscal Year 2000)
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| Budget Amount *help |
¥12,300,000 (Direct Cost: ¥12,300,000)
Fiscal Year 2000: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1999: ¥8,900,000 (Direct Cost: ¥8,900,000)
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| Keywords | scanning probe microscopy / ultrasonic force microscopy / local elasticity / viscosity / cantilever dynamics / force curve / UFM / work of adhesion |
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| Research Abstract |
In this research, we develop the scanning ultrasonic probe microscope with lateral resolution < 1 nm and study the physics involved in it. The contributions of elasticity, viscosity, surface energy at the sample-tip interface to the sample and cantilever dynamics are analyzed distinctively in order to carry out the quantitative measurement on the surface and subsurface local complex elasticity.
A commercial AFM is modified by attaching the PZT transducer at the cantilever base or on the scanner to make the scanning ultrasonic probe microscopy which is capable to apply the ultrasonic vibration to the cantilever or the sample. At various frequency below and above the cantilever resonance frequency and at various ultrasonic amplitude, we carry out the force curve measurement on Si and GaAs single crystals. The vibration amplitude is calibrated with Michelson enterferomenter. The obtained force curve has the following common features : 1)In case of no applied vibration, small "jump-in" in the approach phase and large "jump-out" in the retraction phase are observed. 2)Within creasing the vibration amplitude, the "jump-out" position rapidly approaches to the "jump-in" position. 3)At above certain vibration amplitude, a new "repulsive jump' is observed for both approach and retraction phase.
These results are analyzed by considering the cantilever motion numerically with the finite difference method. In the analysis, we give the elasticity of the tip and sample, damping, adhesion, and assume the JKR model for the tip-sample interaction. The result explains the features 1)and 2)quantitively and proves the validity of the analysis.
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