Precision Magnetic Bearing with Nanometer Rotational Accuracy
| Project/Area Number |
11555049
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| Research Category |
Grant-in-Aid for Scientific Research (B).
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
設計工学・機械要素・トライボロジー
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
SHINSHI Tadahiko Tokyo Institute of Technology, Precision and Intelligence Laboratory, Associate Professor, 精密工学研究所, 助教授 (60272720)
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| Co-Investigator(Kenkyū-buntansha) |
HATA Seiichi Tokyo Institute of Technology, Precision and Intelligence Laboratory, Research Associate, 精密工学研究所, 助手 (50293056)
SATO Kaiji Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Associate Professor, 精密工学研究所, 助教授 (00215766)
SHIMOKOHBE Akira Tokyo Institute of Technology, Precision and Intelligence Laboratory, Professor, 精密工学研究所, 教授 (40016796)
KATAGIRI Sohichi Hitachi, Central Research Laboratory, Chief Researcher, 中央研究所, 主任研究員
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| Project Period (FY) |
1999 – 2000
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| Project Status |
Completed (Fiscal Year 2000)
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| Budget Amount *help |
¥6,800,000 (Direct Cost: ¥6,800,000)
Fiscal Year 2000: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 1999: ¥4,500,000 (Direct Cost: ¥4,500,000)
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| Keywords | Magnetic Bearing / Rotational accuracy / Precision Positioning / Repetitive Control / Runout / 位置決め精度 / 真円度 / ナノメートル |
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| Research Abstract |
The aim of the research is to realize a radial magnetic bearing with the rotational accuracy of several nanometers. In this research, a partial bias current method for driving electromagnets is introduced not only to achieve the high rotational accuracy of the spindle, but also to reduce the heat generation of the electromagnets. Furthermore, an angle domain repetitive controller is applied to eliminate the repeatable runouts caused by the unbalance of the spindle. The experimental results show that the partial bias current method has the merits of fine positioning capability, low heat generation of electromagnets and low rotational resistance. The repetitive controller can cancel the unbalance force and achieve the rotational accuracy of 15.1nm at 1500min^<-1>.
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Report
(3 results)
Research Products
(8 results)
