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Development of Microactuators Using Temperature Dependence of Surface Tension

Research Project

Project/Area Number 11555058
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Thermal engineering
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

YOSHIDA Hideo  Dept. of Mechanical Eng., Kyoto Unversity, Professor, 工学研究科, 教授 (50166964)

Co-Investigator(Kenkyū-buntansha) SATO Makoto  Kyoto University, Technical Manager, フォトニクス事業本部, 技術部長
SAITO Motohiro  Dept. of Mechanical Eng., Kyoto Unversity, Res. Associate, 工学研究科, 助手 (90314236)
HORIE Mikio  Tokyo Inst. Tech., Prec. Lab., Professor, 精密工学研究所, 教授 (00126327)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥13,700,000 (Direct Cost: ¥13,700,000)
Fiscal Year 2001: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2000: ¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 1999: ¥5,500,000 (Direct Cost: ¥5,500,000)
Keywordsmicro actuator / surface tension / Marangoni effect / micropump
Research Abstract

As is widely known, in the dimensions of micro electro mechanical systems (MEMS), surface forces are much more prevalent than body forces. This is because the former are proportional to the square power of length scales, while the latter are proportional to the cubic power.Therefore, we propose a new type of micropump system driven by surface tension, namely, the Marangoni effect using thermoelectric elements as temperature controllers. We distribute thermoelectric elements inside a channel, and trap an appropriate amount of gas between the elements ; the gas-liquid interfaces formed between the elements are the source of the pumping power. Each thermoelectric element has two junctions which absorb and discharge heat according to the Peltier effect. Since heat transfer from these junctions to the working liquid imposes temperature gradients along the gas-liquid interfaces, the flow from the hot-liquid side to the cold-liquid one is induced by the Marangoni effect. In order to boost the flow, many thermoelectric elements are distributed along the flow circuit. The features of this system are as follows : - The system does not contain any movable parts, and has a very simple structure. - There is no flow pulsation unlike the positive displacement pump. - There is no limitation on the electrical conductivity of the working liquid as encountered in EHD pumps. - Flow is easily controlled by the electric voltage applied to the thermoelectric elements. As a basic study of the present micropump system, a numerical simulation was made for twodimensional temperature and flow fields taking the electrical characteristics of the thermoelectric elements into account. Also, we tried to manufacture several micropumps, but operations were not successful because the deformation of gas-liquid interface induced unexpected eddies driven by free convection. However, a further trial based on micro fabrication techniques is currently in progress.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (4 results)

All Other

All Publications (4 results)

  • [Publications] Hideo Yoshida, Motohiro Saito, Hirotake Toda, Rintaro Haraguchi: "Performance analysis on Micropump System Driven by Marangoni Effect"Proc. 12th International Heat Transfer Conference, Grenoble, France. (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Hideo YnshiHa. Motohiro Salto. Hirotake Toda, Rintaro Haraguchi: "Performance Analysis on Micropump System Driven by Marangoni Effect"Prbc. 12th International Heat Transfer Conference, Grenoble, France. (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Hideo Yoshida, Motohiro Saito, Hirotake Toda, Rintaro Haraguchi: "Performance Analysis on Micropump System Driven by Marangoni Effect"Proc. 12th International Heat Transfer Conference, Grenoble, France. (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 吉田英生: "熱電素子によるマランゴニ効果を用いたマイクロアクチュエータ"第36回日本伝熱シンポジウム講演論文集. III. 755-756 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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