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DEVELOPMENT OF HIGH SENSITIVE THIN-FILM MAGNETIC SENSORS BY APPLYING THE IMPURITY REDULATED SPUTTERING PROCESS

Research Project

Project/Area Number 11555105
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field Measurement engineering
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

TSUNODA Masakiyo  TOHOKU UNIV., GRADUATE SCHOOL OF ENGINEERING, ASSOCIATE PROFESSOR, 大学院・工学研究科, 助教授 (80250702)

Co-Investigator(Kenkyū-buntansha) UNEYAMA Kazuhiro  SHARP CO., PRECISION TECHNOLOGY DEVELOPMENT CENTER, RESEARCHER, 精密技術開発センター, 研究員
TAKAHASHI Migaku  TOHOKU UNIV., GRADUATE SCHOOL OF ENGINEERING, PROFESSOR, 大学院・工学研究科, 教授 (70108471)
采山 和弘  シャープ(株), 精密技術開発センター, 研究員
うね山 和弘  シャープ株式会社, 精密技術開発センター, 研究員
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥13,600,000 (Direct Cost: ¥13,600,000)
Fiscal Year 2000: ¥6,800,000 (Direct Cost: ¥6,800,000)
Fiscal Year 1999: ¥6,800,000 (Direct Cost: ¥6,800,000)
KeywordsMETALLIC MULTILAYER / THIN FILMS / MAGNETORESISTANCE / MAGNETIC SENSOR / IMPURITY GASES / ULTRA HIGH VACUUM / SPUTTERING / センサー
Research Abstract

The giant magnetoresistance(GMR)effect in metallic multilayer has been actively investigated to be applied to magnetic sensors. Key technical factors to obtain sensitive MR response are 1)flat interfaces of multilayers to retain large MR ratio and 2)soft magnetic properties of ferromagnetic layers, such as Co iud Co-Fe. These two factors are realized with controlling impurities in fabrication process. Introducing oxygen into the sputtering atmosphere during the deposition is an effective way to improve the interfacial flatness, which has been demonstrated for Co/Cu multilayers by the present authors. Nitrogen and boron are well-know additives to make magnetic softering of Co-Fe films. In the present study, in order to clarify the role of oxygen on GMR more precisely, Co/Cu multilayers were fabricated under different sputtering atmospheres in which the impurity oxygen content was changed dramatically from 0.1 ppm to 0.1 % within processing Ar gas. The correlation between the MR ratio and microstructure of the multilayers, especially the interfacial roughess, was investigated as a function of the partial pressure of oxygen introduced into the sputtering chamber. The MR ratio drastically increased from less than 20 % to 54 % when the content of impurity oxygen was slightly increased from 20 ppm to 80 ppm, then nearly varished when the content become more than 200 ppm. In the former region where the MR ratio steeply increased, the root mean square rougtness of the multilayers decreased from 6.5 Å to 4.5 Å accompanied by a reduction of in grain size as the oxygen content was increased. The partial oxidation of the multilayers is the most probable mechanism by which the flattening of the interfaces in the multilayer can be explained.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (14 results)

All Other

All Publications (14 results)

  • [Publications] 角田匡清: "極清浄雰囲気中で作製したAg-Co薄膜の構造とGMR効果(Cu-Co薄膜との比較)"日本応用磁気学会誌. 23. 1341-1344 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Miura: "Drastic change of giant magnetoresistance of Co/Cu multilayers by decreasing residual impurities in sputtering atmosphere"Journal of Applied Physics. 85. 4463-4465 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 三浦聡: "微量酸素添加スパッタ雰囲気中で作製したCo-Fe/Cu多層膜のGMR効果"日本応用磁気学会誌. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Miura: "Role of oxygen in the film growth and giant magnetoresistance of Co/Cu multilayers"Journal of Applied Physics. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Tsunoda: "Microstructure and giant magnetoresistance of Ag-Co films fabricated by means of an extremely clean sputtering process(Compared with Cu-Co films)"J.Magn.Soc.Japan. 23. 1341-1344 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Miura: "Drastic change of giant magnetoresistance of Co/Cu multilayers by decreasing residual impurities in sputtering atmosphere"J.Appl.Phys.. 85. 4463-4465 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Miura: "GMR in Co-Fe/Cu multilayers fabricated under sputtering atmosphere with a small oxygen impurity introduced"J.Magn.Soc.Japan. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Miura: "Role of oxygen in the film growth and giant magnetoresistance of Co/Cu multilayers"J.Appl.Phys. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 角田匡清: "極清浄雰囲気中で作製したAg-Co薄膜の構造とGMR効果(Cu-Co薄膜との比較)"日本応用磁気学会誌. 23. 1341-1344 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Miura: "Drastic change of giant magnetoresistance of Co/Cu multilayers by decreasing residual impurities in sputtering atmosphere"Journal of Applied Physics. 85. 4463-4465 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] 三浦聡: "微量酸素添加スパッタ雰囲気中で作製したCo-Fe/Cu多層膜のGMR効果"日本応用磁気学会誌. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Miura: "Role of oxygen in the film growth and giant magnetoresistance of Co/Cu multilayers"Journal of Applied Physics. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 角田匡清: "極清浄雰囲気中で作製したAg-Co薄膜の構造とGMR効果(Cu-Co薄膜との比較)"日本応用磁気学会誌. 23. 1341-1344 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Miura: "Drastic change of giant magnetoresistance of Co/Cu multilayers by decreasing residual impurities in sputtering atmosphere"Journal of Applied Physics. 85. 4463-4465 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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