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Development of in-sutu observation system for internal stress fields due to lattice defects using the infrared photoelastic method

Research Project

Project/Area Number 11555162
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field Physical properties of metals
Research InstitutionKYUSHU UNIVERSITY

Principal Investigator

HIGASHIDA Kenji  Kyushu Univ.Dept.Mater.Sci.Eng., Associate Professor, 大学院・工学研究院, 助教授 (70156561)

Co-Investigator(Kenkyū-buntansha) ARAMAKI Masatoshi  Kyushu Univ.Dept.Mater.Sci.Eng., Research Associate, 大学院・工学研究院, 助手 (50175973)
MORIKAWA Tatsuya  Kyushu Univ.Dept.Mater.Sci.Eng., Research Associate, 大学院・工学研究院, 助手 (00274506)
ONODERA Ryuta  Kyushu Univ.Dept.Mater.Sci.Eng., Professor, 大学院・工学研究院, 教授 (40038021)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2000: ¥1,600,000 (Direct Cost: ¥1,600,000)
Keywordsdislocation / crack / lattice defect / photoelasticity / infrared / silicon
Research Abstract

In order to develop high quality silicon wafer with large diameter, it is essential to control lattice defects such as dislocations in those wafers. Polycrystalline silicon has also received much attention recently, but it is inevitable to improve its mechanical property for developing their practical use. In order to investigate such mechanical property and lattice defects of silicon crystals, it is very useful to make direct observation of internal stress fields caused by those crystal defects in crystals.
The essential point in the present research project is to develop the in-sutu observation system for internal stress fields due to lattice defects by using the infrared photoelastic method. By using this system, we made in-situ obaervation of crack tip stress fields developed around a crack tip in compact tension specimen of silicon crystals. The simulation of photoelastic images has been also made, and we have obtained a good agreement with those experimentally observed. In addition, in this research project, we observed the detailed configurations of dislocations generated around a crack tip in silicon thin crystals, which is essential not only to understand the toughness of silicon wafer, but also to study the physical meaning of the photoelastic images obtained by the present system.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (4 results)

All Other

All Publications (4 results)

  • [Publications] K.Higashida, T.Kawamura, T.Morikawa, 他: "HVEM observation of crack tip dislocations in silicon crystals"Materials Science and Engineering A. - (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 東田賢二: "Si結晶中の亀裂先端近傍のHVEM/AFM観察"まてりあ. 第39巻. 980- (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Higashida, T.Kawamura, T.Morikawa, Y.Miura, N.Narita and R.Onodera: "HVEM observation of crack tip dislocations in silicon crystals"Materials Science and Engineering A. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Higashida: "HVEM/AFM observation of a crack tip in silicon crystals"Materia. Vol.39. 980 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary

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Published: 2000-04-01   Modified: 2016-04-21  

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