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Development of Strain-induced ferroerectlic Thin Films Prepared by MOCVD

Research Project

Project/Area Number 11555165
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field Inorganic materials/Physical properties
Research InstitutionTokyo Institute of Technology

Principal Investigator

FUNAKUBO Hiroshi  Tokyo Instituite of Technology Professor, 大学院・総合理工学研究科, 助教授 (90219080)

Co-Investigator(Kenkyū-buntansha) SHINOZAKI Kazuo  Tokyo Institute of Technology Associate Professor, 大学院・理工学研究科, 助教授 (00196388)
MIZUTANI Nobuyasu  Tokyo Insitute of Technology Professor, 大学院・理工学研究科, 教授 (60016558)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥7,000,000 (Direct Cost: ¥7,000,000)
Fiscal Year 2000: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1999: ¥4,900,000 (Direct Cost: ¥4,900,000)
KeywordsMOCVD / Strain-induced / Ferroerectlicity / Pb (Zr, Ti) O_3
Research Abstract

Strain effect on the ferroelectricity of the film was investigated. The degree of c-axis orientation increased when Nb content increased in Pb (Ti, Nb) O_3 film deposited on (100) MgO substrates. Lattice parameter ratio of c- to a-axis (c/a) decreased with increasing Nb content. Increase of the degree of c-axis orientation with decreasing c/a ratio which was commonly observed for Pb (Ti, Nb) O_3, Pb (Ti, Al) O_3 and Pb (Zr, Ti) O_3 films. These can be explained by the stress applied to the film.
Effect of the orientation of the Pb (Zr, Ti) O_3 films on the ferroerectricity was also observed. Polar-axis oriented film, (001) tetragonal-PZT and (111) rhombohedral PZT, showed the largest remnant polarization (Pr). However, the other oriented films, (101) and (111)-oriented tetragonal PZT and (110) and (100)-oriented rhombohedral PZT, showed large Pr value compared with the expected value from the calculation. This phenomena can be explained by the domain structure induced by the stress applied to the film.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] Tomokazu Matsuzaki Hiroshi Funakubo: "Preparation and characterization of Pb(Nb,Ti)O_3 Thin Films by Metal Organic Chemical Vapor Deposition"J.Appl.Phys.. 86(8). 4559-4564 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Aratani,K.Nagashima,T.Iijima,M.Mizuhira and H.Funakubo,: "Preparation of Al-doped PbTiO_3 Thin Films by Metalorganic Chemical Vapor Deposition and Their Characterization"Jpn.J.Appl.Phys.. 39(6A). 3591-3595 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Nagashima,Masanori Aratani and Hiroshi Funakubo,: "Orientation dependencerectricity of epitaxially grown Pb(Zr,Ti)O_3 Thin Film Prepared by Metalorganic Chemical Vapor Deposition"J.Appl.Phys.. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tokita,M.Aratani,T.Ozeki and H.Funakubo,: Key.Eng.Mater.,. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 舟窪浩,荒谷政則: "有機金属化学気相法による強誘電体メモリ薄膜作製"工業材料. 49(3). 65-70 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Tomokazu Matsuzaki Hiroshi Funakubo: "Preparation and characterization of Pb (Nb, Ti) O_3 Thin Films by Metal Organic Chemical Vapor Deposition"J.Appl.Phys.. 86. 4559-4564 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Aratani, K.Nagashima, T.Iijima, M.Mizuhira and H.Funakubo: "Preparation of Al-doped PbTiO_3 Thin Films by Metalorganic Chemical Vapor Deposition."J.Appl.Phys.. 39(6A). 3591-3595

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Nagashima, Masanori Aratani and Hiroshi Funakubo: "Orientation dependencerectricity of epitaxially grown Pb (Zr, Ti) O_3 Thin Film Prepared by Metalorganic Chemical Vapor Deposition."J.Appl.Phys.. in press.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tokita, M.Aratani, T.Ozeki and H.Funakubo: "Electrical Properties of Porycrystalline and Epitaxially Grown PZT Thin Films"Key. Eng. Mater.. in press.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Funakubo and M.Aratani: "Preparation of Ferroelctric Memory Thin Film by MOCVD"Industrial Mater.. 49(3). 65-70 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Aratani,K.Nagashima,T.Iijima,M.Mizuhira and H.Funakubo.: "Preparation of Al-doped PbTiO_3 Thin Films by Metalorganic Chemical Vapor Deposition and Their Characterization","Jpn.J.Appl.Phys.. 39(6A). 3591-3595. (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Nagashma,M.Aratani and H.Funakubo.: "Orientation dependencerectricity of epitaxially grown Pb(Zr,Ti)O_3 Thin Film Prepared by Metalorganic Chemical Vapor Deposition."J.Appl.Phys.. (印刷中).

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Tokita,M.Aratani,T.Ozeki and H.Funakubo: "Electrical Properties of Porycrystalline and Epitaxially Grown PZT Thin Films"Key.Eng.Mater.,. (印刷中).

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Aratani et al.: "Preparation of Al-doped PbTiO_3 Thin Films by Metalorganic Chemical Vapor Deposition and Their Characterization,"Jpn. J. Appl. Phys.. (投稿中).

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Nagashima: "Preparation of Epitaxially Grown Pb(Zr,Ti)O_3 Thin Films Prepared by MOCVD"J. Appl. Phys.. (投稿中).

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Matsuzaki et al.: "Preparation and Characterization of Pb(Nb,Ti)O_3 Thin Films by Metalorganic Chemical Vapor Deposition"J. Appl. Phys.. 86. 4556-4564 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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