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Development of New Production Process of Fine Tantalum Powder by Arc-Plasma CVD Method

Research Project

Project/Area Number 11555190
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Metal making engineering
Research InstitutionMuroran Institute of Technology

Principal Investigator

SHIMAKAGE Kazuyoshi  MIT, Faculty of Eng., Professor, 工学部, 教授 (70005346)

Co-Investigator(Kenkyū-buntansha) UEMURA Yoichiro  NIR IM STA, Chief Researcher, 主任研究官
MIURA Yasutaka  Showa Kyaboto LTD, Researcher, 開発部研究員
HIRAI Shinji  MIT, Faculty of Eng., Associate Professor, 工学部, 助教授 (10208796)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥13,100,000 (Direct Cost: ¥13,100,000)
Fiscal Year 2001: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 2000: ¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 1999: ¥6,300,000 (Direct Cost: ¥6,300,000)
KeywordsMetallic Thermal Reduction / Tantalum Oxide / Mg Reduction / Tantalum Powder / Synthesis Process / Electrical Condennsor / Particle Distribution / Na Reduction / 金属熱還元法 / 酸化タンタル / 粒度分布、 / 比表面積、 / コンデンサー / CVD法 / 五塩化タンタル / 水素還元 / 高容量コンデンサー / プロセス / 開発
Research Abstract

Tantalum powder is produced by Na reduction process. However, tantalum powder is cohered each other and its physical property can not be improved by the current production process. From this reason, a new production process of tantalum powder have to be developed by using new raw materials.
In the current investigation, fine tantalum powder has been synthesized by Mg reduction process, in which high purity Ta_2O_5 powder was used as raw materials. In an initial experiment, temperature and time dependences were examined for the production of tantalum powder by the following reduction reaction: Ta_2O_5 (s) + 5Mg(l,g) = 2Ta(s) + 5MgO(s). Mg reduction easily proceeded with an increase in temperature above 900℃. However, specific surface area of tantalum powder prepared was low because tantalum particles were cohered one another. Therefore, iMg reduction of tantalum oxide was carried out at the temperatures of 650℃ and 750℃, and physical properties of tantalum powder synthesized were evaluated by SEM observation, specific surface area measurement and paticle size measurement. As a result, specific surface area of tantalum powder prepared by Mg reduction was more larger than that prepared by Na reduction. Its physical property was improved.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] 嶋影和宜: "熱CVD法によるタンタル薄膜の合成"日本金属学会北海道支部夏季講演集. A14. 18 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 嶋影和宜: "マグネシウムによるNb2O5の金属熱還元挙動"資源素材学会秋期大会講演集. D5-2. 111-112 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 嶋影和宜: "Ta_2O_5およびTaCl_5化合物からのタンタル粉末の合成"日本金属学会北海道支部夏季講演集. A27. 22 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kazuyoshi Shimakage, Shinji Hirai: "Synthesis of Tantalum Fine Film by Thermal Chemical Vapor Deposition Method"Proceedings of Hokkaido Meeting of Japan Institute of Metals. A14. 18-18 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kazuyoshi Shimakage, Shinji Hirai, Takenori Takahashi: "Metallic Thermal Reduction behavior of Niobium Oxide by Magnesium Vapor"Proceedings of Autumn Meeting of the Mining and Materials Processing Institute of Japan. D5-2. 111-112 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kazuyoshi Shimakage, Shinji Hirai, Mitsuo Takada, Yukio Oda: "Synthesis of Tantalum Powder from Ta_2O_5 and TaCl_5 compounds"Proceedings of Hokkaido Meeting of Japan Institute of Metals. A27. 22-22 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 嶋影和宜: "熱CVD法によるタンタル薄膜の合成"日本金属学会北海道支部夏季講演集. A14. 18 (1999)

    • Related Report
      2001 Annual Research Report
  • [Publications] 嶋影和宜: "マグネシウムによるNb_2O_5の金属熱還元挙動"資源素材学会秋期大会講演集. D5-2. 111-112 (2000)

    • Related Report
      2001 Annual Research Report
  • [Publications] 嶋影和宜: "Ta_2O_5およびTaCl_5化合物からのタンタル粉末の合成"日本金属学会北海道支部夏季講演集. A27. 22 (2000)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Shimakage S.Hirai: "Synthesis of La_2S_3 and Its Thermoelectronic Properties"Pro.Second Inter.Conf.Pro.Mater.Property,San Fransico,USA. 925-928 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 嶋影和宜: "マグネシウムによるNb_2O_5の金属熱還元挙動"日本金属学会北海道支部夏期講演集. A02. 8 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 嶋影和宜: "熱CVD法によるタンタル薄膜の合成"日本金属学会北海道支部夏期講演集. A14. 18 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 嶋影和宜: "マグネシウムによるNb_2O_5の金属熱還元挙動"資源素材関係協会合同秋季大会講演集素材プロセッシング. D5-2. 111-112 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 嶋影和宜: "Ta_2O_5およびTaCl_5化合物からタンタル粉末の合成"日本金属学会北海道支部夏期講演集. A27. 22 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 嶋影 和宜: "ゾル/ゲル法によるアルミニウムへの耐化学性および親水性被覆"日本金属学会誌. 第64巻 第3号. 195-201 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 嶋影 和宜: "ホタテガイ加工残さの有効利用システムの開発"廃棄物学会誌. 第10巻 第4号. (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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