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Development of picosecond AFM and its application to the surface of semiconductors

Research Project

Project/Area Number 11555225
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field 工業分析化学
Research InstitutionThe University of Tokyo

Principal Investigator

SAWADA Tsuguo  The University of Tokyo, Graduate School of Frontier Sciences, Professor, 大学院・新領域創成科学研究科, 教授 (90011105)

Co-Investigator(Kenkyū-buntansha) KATAYAMA Kenji  The University of Tokyo, Graduate School of Frontier Sciences, Research Associate, 大学院・新領域創成科学研究科, 助手 (00313007)
YUI Hiroharu  The University of Tokyo, Graduate School of Frontier Sciences, Research Associate, 大学院・新領域創成科学研究科, 助手 (20313017)
FUJINAMI Masanori  The University of Tokyo, Graduate School of Frontier Sciences, Associate Professor, 大学院・新領域創成科学研究科, 助教授 (50311436)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥13,700,000 (Direct Cost: ¥13,700,000)
Fiscal Year 2000: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1999: ¥10,300,000 (Direct Cost: ¥10,300,000)
Keywordspositron / nanospace / defects / electron momentum / defect-impurity complex / Doppler broadening / oxygen / silicon / 時間分解 / ポンプープローブ法 / 半導体表面 / 近接場光 / 格子欠陥 / 過渡反射格子 / ピコ秒
Research Abstract

The aim of this research project is to develop the time-resolved scanning probe microscope (SPM) and to apply it to the surface of semiconductors. To achieve the picosecond time-resolved measurement, the combination of the pump-probe technique and SPM is required. In this project, fast thermalization process of carrier in Si has been investigated using a wavelength-selective transient reflecting grating method. Dynamics of photo-excited carriers in Si involves carrier-carrier scattering, carrier-lattice scattering, recombination, diffusion, and trap into defect energy level. By analyzing wavelengh dependency in the transient reflecting grating response, it has been found that the relaxation process in several picosecond is attributed to change in dielectric constant at the Si surface and that one in 200 picosecond to thermally process induced by photo-excited carriers. This information is very useful to investigate fast phenomena of photo-excited carriers at the Si surface.
To combine the pump-probe methods with SPM, scanning near-field optical microscope (SNOM) with the fiber probe was chosen. We have realized the measurement of photothermal effect in SNOM configuration. The introduction of pump laser to the sample was used the evanescent light from the fiber probe. And then the absorption of light induced the change of refractive index, or the thermal lens, which was detected by deflection of probe laser. In this work, the dye molecules were excited by 532nm pump laser emitted from the fiber probe, and the thermal lens induced were detected by the 633nm probe laser transmitted from the fiber one. This is the first time to detect the thermal lens by evanescent excitation in SNOM configuration. We have a plan to develop the picosecond time-resolved SNOM to detect the photothremal phenomena by introducing the pulse laser to the fiber probe and to apply it to the surface in semiconductors.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] A.C.Kruseman: "Oxygen implanted silicon investigated by positron annihilation spectroscopy"Nuclear Instrument & Methods in Physics Research,B. 148. 294-299 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Katayama: "Ultrafast Two-step Thermalization Processes of Photo-excited Electrons at Gold Surface : Application of New Wavelength-selective Transient Reflecting Grating Mehthod"Physical Review B. 61. 7332-7335 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Morishita: "Femtosecond transient reflecting grating methods and analysis of the ultrafast carrier dynamics on Si(111) surfaces"Analytical Sciences. 16. 403-406 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Shibamoto: "Detection using transient reflecting grating spectroscopy for the ultrafast interaction between photoexcited electrons and adsorbed molecules at a gold surface"Analytical Sciences. (in press). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Inagaki: "Direct measurement of non-equilibrium carrier diffusion at a Si surface"Analytical Sciences. (in press). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Fujinami: "Defects in semiconductors"Material Science Forum. (in press). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.C.Kruseman, H.Schut, A.van Veen, and M.Fujinami: "Oxygen implanted silicon investigated by positron annihilation spectroscopy"Nuclear Instrument & Methods in Physics Research. B148. 294-299 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Fujinami, R.Suzuki, T.Ohdaira, and T.Mikado: "Characterization of H-related defects in H-implanted Si with slow positrons"Applied Surface Science. 149. 199-192 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Katayama, Y.Inagaki, and T.Sawada: "Ultrafast two-step thermalization processes of photoexcited electrons at a gold surface : Application of a wavelength-selective transient reflecting grating method"Physical Review B. 61. 7332-7335 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Morishita, A.Hibara, T.Sawada, I.Tsuyumoto, and A.Harata: "Femtosecond transient reflecting grating methods and analysis of the ultrafast carrier dynamics on Si (111) surfaces"Analytical Sciences. 16. 403-406 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Shibamoto, K.Katayama, M.Fujinami, and T.Sawada: "Detection using transient reflecting grating spectroscopy for the ultrafast interaction between photoexcited electrons and adsorbed molecules at a gold surface"Analytical Sciences. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Inagaki, K.Katayama, M.Fujinami, and T.Sawada: "Direct measurement of non-equilibrium carrier diffusion at a Si surfaces"Analytical Sciences. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Fujinami, T.Sawada and T.Akahane: "Defects in semiconductors"Material Science Forum. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.C.Kruseman: "Oxygen implanted silicon investigated by positron annihilation spectroscopy "Nuclear Instrument & Methods in Physics Research,B. 148. 294-299 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Katayama: "Ultrafast Two-step Thermalization Processes of Photo-excited Electrons at Gold Surface : Application of New Wavelength-selective Transient Reflecting Grating Mehthod"Physical Review B. 61. 7332-7335 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Shibamoto: "Detection using transient reflecting grating spectroscopy for the ultrafast interaction between photoexcited electrons and adsorbed molecules at a gold surface"Analytical Sciences . (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Inagaki: "Direct measurement of non-equilibrium carrier diffusion at a Si surfac"Analytical Sciences. (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Fujinami: "Defects in semiconductors"Material Science Forum. (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Morishita: "Ultrafast charge transfer at TiO2/SCN-(aq) interfaces investigated by femtosecond transient reflecting grating method"The Journal of Physical Chemistry B. 103. 5984-5987 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Katayama: "Picosecond energy transfer at gold/electrolyte interfaces using transient reflecting grating method under surface plasmon resonance condition"Bulletin of the Chemical Society of Japan. 72. 2383-2388 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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