| Budget Amount *help |
¥13,800,000 (Direct Cost: ¥13,800,000)
Fiscal Year 2000: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1999: ¥12,400,000 (Direct Cost: ¥12,400,000)
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| Research Abstract |
In this project, we tried the development of analytical technique and apparatus, for a nano-scale three-dimensional analysis. For this development, it is needed to develop and make clear the several items as follows ;
(1) Development of an ultra fine ion beam (primary ion beam), whose diameter is several nano-meter,
(2) Development of a stability beam scanning technique during long time measurements,
(3) Development of a high accurate data system for three-dimensional analysis,
(4) Clarify the shape and chemical composition of the cross-section by a gallium focused ion beam (Ga-FIB)
Items of 1 and 2 : We developed the ultra fine ion beam (primary ion beam) and a stability beam scanning system. By using the developed secondary ion mass spectrometry (SIMS) apparatus, we obtained the ion induced secondary electron image of a vacuum-evaporation gold film on a carbon prate. Judging from these results, it was clear that the lateral resolution of this system was less than 10 nm. Thus, we can concl
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ude that the three-dimensional analysis with high spatial resolution was realized by using this apparatus.
Item of 3 : The high accurate data system is very important for the tree-dimensional analysis as a destructive local analysis. We have investigated the cause of an uncertainty in the SIMS analysis. From the experiments, the uncertainty based on a single-channel detection system, which was the composite uncertainty based on the reproducibility of the magnetic field and the changes of the analyzed surface with time, was calculated to be 12.1%〜19.1%. Thus, we conclude that the multi-elements measurement system improves the analytical reliability by 12.1%〜19.1%.
Item of 4 : In order to clarify the shape of a cross-section by using a Ga-FIB, the computer simulations of cross-sectioning process were performed. The simulation revealed that the shape depend on a beam diameter and current density, and the cross-sectioning speed. We conclude that an ultra fine ion beam is effective for obtaining the accurate cross-section. Less
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