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Preparation of Transparent, Tick Films by the Sol-Gel Method and Their Application to Micro-Pattrening

Research Project

Project/Area Number 11555239
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field 無機工業化学
Research InstitutionOsaka Prefecture University

Principal Investigator

MINAMI Tsutomu  Osaka Prefecture Univ., Prof., 工学研究科, 教授 (80081313)

Co-Investigator(Kenkyū-buntansha) MATSUDA Atsunori  Osaka Prefecture Univ., Lecturer., 工学研究科, 講師 (70295723)
TADANAGA Kiyoharu  Osaka Prefecture Univ., Res.Prof., 工学研究科, 助教授 (90244657)
TATSUMISAGO Masahiro  Osaka Prefecture Univ., Prof., 工学研究科, 教授 (50137238)
MAEDA Koichi  Nippon Sheet Glass Co.Ltd., Lab.Maneger, 技術研究所, センター長(研究職)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥5,500,000 (Direct Cost: ¥5,500,000)
Fiscal Year 2000: ¥5,500,000 (Direct Cost: ¥5,500,000)
KeywordsSol-gel method / Transparent / Thick film / Micro-patterning / Organic-inorganic hybrid / Micro-particles / Photo-polymerization / Hydrophobic-hydrophilic / ゾル-ゲル法 / 撥水-親水 / 有機-無機複合
Research Abstract

1. transparent, thick films have been successfully prepared using benzyltriethoxysilane-derived particles in the electrophoretic sol-gel deposition and the successive heat treatment. In addition, photo-polymerizable inorganic-organic hybrid films and the inorganic-organic hybrid films with high refractive indexes have been synthesized for their application to photolithographic and embossing micro-patterning, respectively.
2. The thickness of the methylsilsequioxane-phenylsilsesquioxane films which can be formed on the substrates without cracking was maximized at around the mole ratio of methy group : phenyl group=1 : 1. The optimum film hardness and the adequate timing for emboss micro-patterning were clarified. The refractive index of the phenylsilsesquioxane and benzylsilsesquioxane films increased with increasing the amount of titania added.
3. Optical waveguides have been photolithographically fabricated on glass substrates using vinyltrimethoxysilane-derived inorganic-organic hybrid films. Micro-lens arrays have been newly formed on hydrophobic-hydrophilic patterned substrates based on the difference in the surface free energy and fuluidity of the phenylsilsesquioxane and benzylsilsesquioxane at temperatures higher than their glass transition temperatures.
4. The shapes of the fabricated optical waveguides and micro-lens arrays were evaluated using SEM, AFM and 3D-surface profilometer. Fabricated micro-lens arrays showed good focusing properties.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (54 results)

All Other

All Publications (54 results)

  • [Publications] K.Azuta: "Water and Oxygen Permeability of Silica Thin Films Containing Organic Polymers Coated on Poly(Ethylene Terephthalate)Substrate by the Sol-Gel Method"J.Ceram.Soc.Jopn.. 107・[3]. 293-296 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Hasegawa: "Preparation of Thick Films by Electrophoretic Deposition Using Surface Modified Silica Particles Derived from Sol-Gel Method"J.Sol-Gel Sci.Tech.. 15・[3]. 243-249 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Application of Composites Composed of Phosphoric Acid-Doped Silica Gel and Styrene-Ethylene-Buthylene-Styrene Elastomer to Electric Double-Layer Capacitors" Korean J.Ceramics. 5・[4]. 353-356 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Hirata: "Preparation and Characterization of Highly Proton-Conductive Composites Composed of Phosphoric Acid-Doped Silica Gel and Styrene-Etyhylen-Butylene-Styrene Elastomer"J.Sol-Gel Sci.Tech.. 17・[1]. 61-69 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A. Matsuda: "Proton-Conductive Composities Composed of Phosphoric Acid-Doped Silica Gel and Organic Polymers with Sulfo Groups"J.Ceram.Soc.Jpn.. 108・[1]. 45-50 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Hasegawa: "Effect of Heat Treatment on the Morphology and Transparency of Thick Inorganic-Organic Hybrid Films Prepared by the Electrophoretic Sol-Gel Deposition of Polyphenylsilsesquioxane Particles" Korean J.Ceramics. 6・[1]. 15-20 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Structural Changes during Thermally Induced Polymerisation of Ormosil Films from Trimethoxysilylpropylmethacrylate and Zirconium-N-Propoxide Modified with Methacrylic Acid" The Inter.Symposium on Sol-Gel Optics V-SPIE,Proceedings. 3943. 228-235 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Superhydropholic-Superhydrophilic Micropatterning on Flowerlike Alumina Coating Film by the Sol-Gel Method"Chem.Materials. 12・[3]. 590-592 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Influences of Preparation Conditions of Sols on Hardening Behaviors of Silica Gel Films for Micro-Patterning" J.Ceram.Soc.Jpn.. 108・[6]. 604-606 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Thermal Softening Behavior of Poly(phenylsilsesquioxane)and Poly(benzylsilsesquioxane)Particles"J.Ceram.Soc.Jpn.. 108・[9]. 830-835 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 松田厚範: "ゾルーゲル法による透明厚膜の作製と微細パターニングへの応用(総説)"セラミックス. 35・[10]. 874-877 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Izumi: "Coatings of Composite Films Prepared from CH_3Si(OC_2H_5)_3 and Various Oxide Powders on Stainless Steel Sheets"J.Ceram.Soc.Jpn.. 108・[10]. 937-940 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Izumi: "Coatings of Hybrid Films Prepared from CH_3Si(OC_2H_5)_3 and Blocked Isocyanate on Stainless Steel Sheets"J.Ceram.Soc.Jpn.. 108・[11]. 1016-1019 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 忠永清治: "低温における超撥水・超親水コーティング膜の作製(総説)"マテリアルインテグレーション. 13・[12]. 69-72 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Micropatterning on Methylsilsesquioxane-Phenylsilsequioxane Thick Films by the Sol-Gel Method"J.Am.Cerm.Soc.. 83・[12]. 3211-3213 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Formation of Superhydrophobic-Superhydrophilic Pattern on Flowerlike Alumina Thin Film by the Sol-Gel Method"J.Sol-Gel Sci.Tech.. 19・[1-3]. 211-214 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Near-and Mid-Infrared Spectroscopy of Sol-Gel Derived Ormosil Films for Photonics from Tetramethoxysilane and Trimethoxysilylpropylmethacrylate"J.Sol-Gel Sci.Tech.. 19・[1-3]. 687-690 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Fine Patterning of Transparent, Conductive SnO_2 Thin Films by UV-Irradiation"J.Sol-Gel Sci.Tech.. 19・[1-3]. 791-794 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 松田厚範: "セラミックデータブック2000"工業製品技術協会. 256 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Azuta: "Water and Oxygen Permeability of Silica Thin Films Containing Organic Polymers Coated on Poly(Ethylene Terephthalate)Substrate by the Sol-Gel Method"J.Ceram.Soc.Jpm.. 107・[3]. 293-296 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Hasegawa: "Preparation of Thick Films by Electrophoretic Deposition Using Surface Modified Silica Particles Derived from Sol-Gel Method"J.Sol-Gel Sci.Tech.. 15・[3]. 243-249 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Application of Composites Composed of Phosphoric Acid-Doped Silica Gel and Styrene-Ethylene-Buthylene-Styrene Elastomer to Electric Double-Layer Capacitors"Korean J.Ceramics. 5・[4]. 353-356 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Hirata: "Preparation and Characterization of Highly Proton-Conductive Conposites Composed of Phosphoric Acid-Doped Silica Gel and Styrene-Ethylene-Butylene-Styrene Elastomer"J.Sol-Gel Sci.Tech.. 17・[1]. 61-69 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Proton-Conductive Composites Composed of Phosphoric Acid-Doped Silica Gel and Organic Polymers with Sulfo Groups"J.Ceram.Soc.Jpn.. 108・[1]. 45-50 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Hasegawa: "Effect of Heat Treatment on the Morphology and Transparency of Thick Inorganic-Organic Hybrid Films Prepared by the Electrophoretic Sol-Gel Deposition of Polyphenylsilsesquioxane Particles"Korean J.Ceramics. 6・[1]. 15-20 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Structural Changes during Thermally Induced Polymerisation of Ormosil Films from Trimethoxysilylpropylmethacrylate and Zirconium-N-Propoxide Modified with Methacrylic Acid"The Inter.Symposium on Sol-Gel Optics V-SPIE, Proceedings. 3943. 228-235 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Superhydropholic-superhydrophilic Micropatterning on Flowerlike Alumina Coating Film by the Sol-Gel Method"Chem.Materials. 12・[3]. 590-592 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Influences of Preparation Conditions of Sols on Hardening Behaviors of Silica Gel Films for Micro-Patterning"J.Ceram.Soc.Jpn.. 108・[6]. 604-606 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Thermal Softening Behavior of Poly(phenylsilsesquioxane)and Poly(benzylsilsesquioxane)Particles"J.Ceram.Soc.Jpn.. 108・[9]. 830-835 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Preparation of Transparent, Thick Films by the Sol-Gel Method and Their Application to Micro-Patterning"Ceramics. 35・[10]. 874-877 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Izumi: "Coatings of Composite Films Prepared from CH_3Si(OC_2H_5)_3 and Various Oxide Powders on Stainless Steel Sheets"J.Ceram.Soc.Jpn.. 108・[10]. 937-940 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Izumi: "Coatings of Hybrid Films Prepared from CH_3Si(OC_2H_5)_3 and Blocked Isocyanate on Stainless Steel Sheets"J.Ceram.Soc.Jpn.. 108・[11]. 1016-1019 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Preparation of Superhydrophobic-Superhydrophilic Coating Films at Low Temperatures"Materials Integration. 13・[12]. 69-72 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Micropaterning on Methylsilsesquioxane-Phenylsilsesquioxane Thick Films by the Sol-Gel Method"J.Am.Ceram.Soc.. 83・[12]. 3211-3213 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Formation of Superhydrophobic-Superhydrophilic Pattern on Flowerlike Alumina Thin Film by the Sol-Gel Method"J.Sol-Gel Sci.Tech.. 19・[1-3]. 211-214 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Near-and Mid-Infrared Spectroscopy of Sol-Gel Derived Ormosil Films for Photonics from Tetramethoxysilane and Trimethoxysilylpropylmethacrylate"J.Sol-Gel Sci.Tech.. 19・[1-3]. 687-690 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Tadanaga: "Fine Patterning of Transparent, Conductive SnO_2 Thin Films by UV-Irradiation"J.Sol-Gel Sci.Tech.. 19・[1-3]. 791-794 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] A.Matsuda: "Ceramic Data Book 2000"Kogyo-seihin-gijutsu-kyokai. 256 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Hasegawa: "Effect of Heat Treatment on the Morphology and Transparency of Thick Inorganic-Organic Hybrid Films Prepared by the Electrophoretic Sol-Gel Deposition of Polyphenylsilsesquioxane Particles"Korean J.Ceramics. 6・[1]. 15-20 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Tadanaga: "Structural Changes during Thermally Induced Polymerisation of Ormosil Films from Trimethoxysilylpropylmethacrylate and Zirconium-N-Propoxide Modified with Methacrylic Acid"The Inter. Symposium on Sol-Gel Optics V-SPIE, Proceedings. 3943. 228-235 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Tadanaga: "Superhydropholic-Superhydrophilic Micropatterning on Flowerlike Alumina Coating Film by the Sol-Gel Method"Chem.Materials. 12・[3]. 590-592 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] A.Matsuda: "Influences of Preparation Conditions of Sols on Hardening Behaviors of Silica Gel Films for Micro-Patterning"J.Ceram.Soc.Jpn.. 108・[6]. 604-606 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 松田厚範: "ゾル-ゲル法による透明厚膜の作製と微細パターニングヘの応用(総説)"セラミックス. 35・[10]. 874-877 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Izumi: "Coatings of Composite Films Prepared from CH_3Si(OC_2H_5)_3 and Various Oxide Powders on Stainless Steel Sheets"J.Ceram.Soc.Jpn.. 108・[10]. 937-940 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Izumi: "Coatings of Hybrid Films Prepared from CH_3Si(OC_2H_5)_3 and Blocked Isocyanate on Stainless Steel Sheets"J.Ceram.Soc.Jpn.. 108・[11]. 1016-1019 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 忠永清治: "低温における超撥水・超親水コーティング膜の作製(総説)"マテリアルインテグレーション. 13・[12]. 69-72 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] A.Matsuda: "Micropatterning on Methylsilsesquioxane-Phenylsilsesquioxane Thick Films by the Sol-Gel Method"J.Am.Ceram.Soc.. 83・[12]. 3211-3213 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Tadanaga: "Formation of Superhydrophobic-Superhydrophilic Pattern on Flowerlike Alumina Thin Film by the Sol-Gel Method"J.Sol-Gel Sci.Tech.. 19・[1-3]. 211-214 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Tadanaga: "Fine Patterning of Transparent, Conductive SnO_2 Thin Films by UV -Irradiation"J.Sol-Gel Sci.Tech.. 19・[1-3]. 791-794 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 松田厚範: "セラミックデータブック2000"工業製品技術協会. 256 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K. Azuta: "Water and Oxygen Permeability of silica Thin Films Containing Organic Polymers Coated on PET Substrate by the Sol-Gel Method"J. Ceram. Soc. Jpn.. 107・[3]. 293-296 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K. Hasegawa: "Preparation of Trick Films by Electrophoretic Deposition Using Surface Modified Silica Particles Derived from Sol-Gel Method"J. Sol-Gel Sci. Tech.. 15・[3]. 243-249 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] A. Matsuda: "Application of Composites Composed of Phosphoric Acid-Doped Silica Gel and Styrene-Ethylene-Buthylene-Styrene Elastomer to Electric Double-Layer Capacitors"Korean J. Ceramics. 5・[4]. 353-356 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] K. Hirata: "Preparation and Characterization of Highly Proton-Conductive Composites Composed of SiO_2-P_2O_5 Gel and Styrene-Ethylene-Buthylene-Styrene Elastomer"J. Sol-Gel Sci. Tech.. 17・[1]. 61-69 (2000)

    • Related Report
      1999 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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