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Research on a functional inverter discharge plasma and a deposition of low frictional thin films for metal mechanical parts

Research Project

Project/Area Number 11558053
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field プラズマ理工学
Research InstitutionOsaka University

Principal Investigator

GOTO Seiichi  Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (90029140)

Co-Investigator(Kenkyū-buntansha) KIUCHI Masato  Osaka National Research Institute, Senior Researcher, 材料物理部, 主任研究官
YOSHIMURA Satoru  Graduate School of Engineering, Osaka University Research Associate, 大学院・工学研究科, 助手 (40294029)
SUGIMOTO Satoshi  Graduate School of Engineering, Osaka University, Associate Professor, 大学院・工学研究科, 助教授 (70187665)
NAKAJIMA Yuji  Nippon Aluminium, Assistant Manager, 技術研究所, 主任
KIDA Takehisa  Koyo Seiko Co., Ltd., Research, 総合技術研究所, 研究員
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥9,300,000 (Direct Cost: ¥9,300,000)
Fiscal Year 2000: ¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 1999: ¥6,200,000 (Direct Cost: ¥6,200,000)
Keywordssurface treatment / process plasma / low friction film / inverter / diamond thin films / tribology / pulsed glow plasma / ion assist / ダイヤモンド薄膜 / イオンアシスト
Research Abstract

An inverter-direct-driving technique has been introduced to a dc glow discharge system in a middle background pressure resion (10^1〜10^3 Pa) obtained with rotary pumps. Because the plasma produced with the developed system has the similar properties as those of dc plasmas basically, we can utilize simple discharge electrodes such as parallel plates that would be extended for large area processing in a low cost. In addition, the plasma driven by the bipolar pulses from the inverter circuit has a charge-up cancellation function that is advantageous to isolated surface treatments.
We have obtained the following results from this research.
1.We produced an Ar plasma at a pressure of 100 Pa between a pair of parallel-plate electrodes. The peak plasma density and temperature were 1〜6×10^<10> cm^<-1> and 2〜6 eV, which indicates that this discharge can be applicable to practical surface treatment and film deposition.
2.Using an asynchronous high-voltage alternating pulsing mode, we have improved the adhesion property of a sputtering thin film under the above middle pressure region.
Next, a diamond-like carbon (DLC) film deposition experiment has been performed. The DLC films have deposited on SUS304 and Si (100) substrates under a pressure of 100〜600Pa (methane) at a deposition rate of 1.5μm/h. The basic characteristics of the DLC films have been estimated with film thickness measurement, micro Vickers hardness test, AFM, FTIR, and Raman Scattering Spectroscopy. As a practical result of a sliding test, we have also observed the decrease of the kinetic friction coefficient between metal parts coated with the DLC films.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (43 results)

All Other

All Publications (43 results)

  • [Publications] 木内正人: "有機ケイ素イオンビームを用いたSiCの高速成膜"第15回イオン注入表層処理シンポジウム予稿集. 71-72 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Kiuchi: "Production of organosilicon ions for SiC epitaxy"Review of Scientific Instruments. Vol.71. 1157-1159 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Matsumoto: "Deposition of cubic-SiC thin films on Si (111) using the molecular ion beam technique"Mat.Res.Soc.Symp.Proc.. Vol.585. 165-169 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 木内正人: "低エネルギーイオンビーム堆積法におけるビームの質の検討"第16回イオン注入表層処理シンポジウム予稿集. 85-88 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Matsumoto: "Growth of 3C-SiC thin films on Si (100) by molecular ion beam deposition"Abstracts of the International Symposium on Surface and Interface. 70-70 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Sugimoto: "Inverter plasma discharge system"Surface and Coatings Technology. Vol.136. 65-68 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Takechi: "Operational Parameter Effects on Inverter Plasma Performance"Surface and Coatings Technology. Vol.136. 69-72 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] N.Murakami: "Analysis of hydrophile process of polymer surface with inverter plasma"Surface and Coatings Technology. Vol.136. 265-268 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Kiuchi: "Ion assisted deposition of copper using inverter plasma"Surface and Coatings Technology. Vol.136. 273-275 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 武智誠次: "インバーター電源生成プラズマのラングミュアプローブ測定"J.Vac.Soc.Jpn.(真空). Vol.44(印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 木内正人: "イオンアシスト蒸着のためのインバータープラズマ装置"J.Vac.Soc.Jpn.(真空). Vol.44(印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 木内正人: "イオンビームに含まれる中性粒子の計測器の試作"J.Vac.Soc.Jpn.(真空). Vol.44(印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Takechi: "Characteristics of an inverter power discharge for plasma production"Proceedings of the 25th International Conference on Phenomena in Ionized Gases. (印刷中). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Kiuchi: "Production of organosilicon ions for SiC epitaxy"Review of Scientific Instruments. Vol.71. 1157-1159 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Matsumoto: "Deposition of cubic-SiC thin films on Si (111) using the molecular ion beam technique"Mat.Res.Soc.Symp.Proc.. Vol 585. 165-169 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Matsumoto: "Growth of 3C-SiC thin films on Si (100) by molecular ion beam deposition"Abstracts of the International Symposium on Surface and Interface. 70-70 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Kiuchi: "Detection of beam quality in low-energy ion beam deposition"Proceedings of the Sixteenth Symposium on Surface Layer Modification by Ion Implantation.. 85-88 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] "Inverter plasma discharge system"Surface and Coatings Technology. Vol.136. 65-68

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] "Operational Parameter Effects on Inverter Plasma Performance"Surface and Coatings Technology. Vol.136. 69-72

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] "Analysis of hydrophile process of polymer surface with inverter plasma"Surface and Coatings Technology. Vol.136. 265-268

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] "Ion assisted deposition of copper using inverter plasma"Surface and Coatings Technology. Vol.136. 273-275

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Takechi: "Langmuir probe characteristics in a plasma produced by an inverter power supply"J.Vac.Soc.Jpn.. Vol.44 (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Kiuchi: "Inverter plasma apparatus for ion-assisted deposition"J.Vac.Soc.Jpn.. Vol.44 (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Kiuchi: "Production of detectors for high-energy neutrals in ion beams"J.Vac.Soc.Jpn.. Vol.44 (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Takechi: "Characteristics of an inverter power discharge for plasma production"Proceedings of the 25th International Conference on Phenomena in Ionized Gases.. (in press). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 木内正人: "有機ケイ素イオンビームを用いたSiCの高速成膜"第15回イオン注入表層処理シンポジウム予稿集. 71-72 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Kiuchi: "Production of organosilicon ions for SiC epitaxy"Review of Scientific Instruments. Vol.71,No.2. 1157-1159 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Matsumoto: "Deposition of cubic-SiC thin films on Si (111) using the molecular ion beam technique"Mat.Res.Soc.Symp.Proc.. Vol.585. 165-169 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 木内正人: "低エネルギーイオンビーム堆積法におけるビームの質の検討"第16回イオン注入表層処理シンポジウム予稿集. 85-88 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Sugimoto: "Inverter plasma discharge system"Surface and Coatings Technology. Vol.136. 65-68 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Kiuchi: "Ion assisted deposition of copper using inverter plasma"Surface and Coatings Technology. Vol.136. 273-275 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Takechi: "Operational Parameter Effects of Inverter Plasma Performance"Surface and Coatings Technology. Vol.136. 69-72 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] N.Murakami: "Analysis of hydrophile process of polymer surface with inverter plasma"Surface and Coatings Technology. Vol.136. 265-268 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 武智誠次: "インバーター電源生成プラズマのラングミュアプローブ測定"J.Vac.Soc.Jpn.(真空). Vol.44(掲載予定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 木内正人: "イオンアシスト蒸着のためのインバータープラズ装置"J.Vac.Soc.Jpn.(真空). Vol.44(掲載予定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 木内正人: "イオンビームに含まれる中性粒子の計測器の試作"J.Vac.Soc.Jpn.(真空). Vol.44(掲載予定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Takechi: "Characteristics of an inverter power discharge for plasma production"Proceedings of the 25th International Conference on Phenomena in Ionized Gases. (掲載予定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Sugimoto: "Inverter plasma discharge system"Abstracts of fifth International Workshop on Plasma-Based Ion Implantation. (to appear in Surf. Coat. Tech.). 27 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M. Kiuchi: "Ion assisted deposition of copper using inverter plasma"Abstracts of fifth International Workshop on Plasma-Based Ion Implantation. (to appear in Surf. Coat. Tech.). 18 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S. Takechi: "Operational Parameter Effects on Inverter Plasma Performance"Abstracts of fifth International Workshop on Plasma-Based Ion Implantation. (to appear in Surf. Coat. Tech.). 17 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] N. Murakami: "Analysis of hydrophile process of polymer surface with inverter plasma"Abstracts of fifth International Workshop on Plasma-Based Ion Implantation. (to appear in Surf. Coat. Tech.). 11 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 小寺富士: "高出力イオン源用大電力半導体スイッチによるコンデンサー駆動電源の開発"高温学会誌. 25・6. 318-324 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 竹内孝江: "Ab initio molecular orbital study of the electron affinity of boron clusters"Nucl. Instrum. Meth. Phys. Res.. B 153. 298-301 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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