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Development of Total-Reflection Angle Soft X-ray Spectroscopy combined with RHEED

Research Project

Project/Area Number 11559002
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section展開研究
Research Field 広領域
Research InstitutionTohoku University

Principal Investigator

TAKAMI Tomohide  Research Institute for Scientific Measurements, Tohoku University, Assistant, 科学計測研究所, 助手 (40272455)

Co-Investigator(Kenkyū-buntansha) INO Shozo  Faculty of Engineering, Utsunomiya University, Professor, 工学部, 教授 (70005867)
TAKAOKA Tsuyoshi  Research Institute for Scientific Measurements, Tohoku University, Assistant, 科学計測研究所, 助手 (90261479)
KUSUNOKI Isao  Research Institute for Scientific Measurements, Tohoku University, Professor, 科学計測研究所, 教授 (30025390)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥13,700,000 (Direct Cost: ¥13,700,000)
Fiscal Year 2000: ¥6,900,000 (Direct Cost: ¥6,900,000)
Fiscal Year 1999: ¥6,800,000 (Direct Cost: ¥6,800,000)
KeywordsRHEED / Soft X-ray spectroscopy / Total-reflection angle / Surface analysis
Research Abstract

Ino, one of the investigators on this project, discovered that an X-ray resonance line emitted from a metal thin film with only a layer, at the total-reflection angle, can be detected on observing the pattern of reflection high-energy electron diffraction (RHEED). He named the new surface analysis method "RHEED - Total-Reflection Angle X-ray Spectroscopy (RHEED-TRAXS)". The RHEED-TRAXS is a powerful method to observe RHEED pattern and to analyze the stoichiometry of the surface simultaneously. Moreover, it is a useful method to analyze the depth profile of thin films by changing the incident angle of the electron and the extraction angle of the X-ray. The purpose of this project is to develop the RHEED-TRAXS at the soft X-ray region, i.e., "RHEED - Total-Reflection Angle Soft X-ray Spectroscopy (RHEED-TRASXS)", to show the usefulness of this method for chemical analysis of surface, and to suggest the practical use of RHEED-TRASXS.
In 1999, We produced a prototype soft X-ray spectrometer in our machine shop. In this spectrometer, aberration-corrected concave grating with curved and variable spacing grooves was used to split the fluorescent X-ray lines. The splitted X-rays were detected by a multi-channel plate to change the X-ray signal into the visible light. The visible light was detected by a CCD camera out of the vacuum chamber through a viewing port. On the prototype spectrometer system, however, the signal was to weak to detect. Therefore, we planned to make an improved spectrometer to put a CCD camera into the vacuum, detecting the X-rays by the CCD camera directly.
In 2000, We bought the CCD camera available to put in vacuum. We produced the modified spectrometer, using the CCD camera in vacuum, also in our machine shop. The modification brought us better S/N ratios of the spectrum. However, bremsstrahlung was overlapped with the spectrum. To conquer the bremsstrahlung will enable us to put the RHEED-TRASXS to practical use.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] 高見知秀: "多重双晶粒子表面に有機分子が吸着した集合体 -多重双晶粒子ミセル-"表面科学. 20. 220-227 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami: "RHEED and AFM studies of homoepitaxial diamond thin film on C(001) substrate produced by microwave plasma CVD"Diamond and Related Materials. 8. 701-704 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami: "Diamond thin film grown homoepitaxially on diamond (001) substrate by microwave plasma CVD method studied by reflection high-energy electron diffraction and atomic force microscopy"Surface Science. 440. 103-115 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami: "Homoepitaxial diamond (001) thin film studied by reflection high-energy electron diffraction, contact atomic force microscopy, and scanning tunneling microscopy"Journal of Vacuum Science and Technology B. 18. 1198-1202 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami: "Reaction of Si(111) Surface with Acetone"Thin Solid Films. 376. 89-98 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami: "RHEED and STM study of a homoepitaxial diamond (001) thin film produced by microwave plasma CVD"New Diamond and Frontier Carbon Technology. 10. 329-337 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami et al.: "Composites Comprised of Multiplytwinned particles and Organic Molecules Adsorbed on the Particles Surface -Multiply-twinned Particle Micelle-"HYOMEN KAGAKU. 20 (in Japanese). 220-227 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami et al.: "RHEED and AFM studies of homoepitaxial diamond thin film on C (001) substrate produced by microwave plasma CVD"Diamond and Related Materials. 8. 701-704 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami et al.: "Diamond thin film grown homoepitaxially on diamond (001) substrate by microwave plasma CVD method studied by reflection high-energy electron diffraction and atomic force microscopy"Surface Science. 440. 103-115 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami et al.: "Homoepitaxial diamond (001) thin film studied by reflection high-energy electron diffraction, contact atomic force microscopy, and scanning tunneling microscopy"Journal of Vacuum Science and Technology B. 18. 1198-1202 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami et al.: "Reaction of Si (111) Surface with Acetone"Thin Solid Films. 376. 89-98 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Takami et al.: "RHEED and STM study of a homoepitaxial diamond (001) thin film produced by microwave plasma CVD"New Diamond and Frontier Carbon Technology. 10. 329-337 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] I.Kusunoki et al.: "Nitridation of a diamond film using 300-700eV N_2^+ ion beams"Diamond and Related Materials. 9. 698-702 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Takami et al.: "Homoepitaxial diamond (001) thin film studied by reflection high-energy electron diffraction, contact atomic force microscopy, and scanning tunneling microscopy"Journal of Vacuum Science and Technology B. 18. 1198-1202 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Takami et al.: "Reaction of Si (111) Surface with Acetone"Thin Solid Films. 376. 89-98 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Takami et al.: "RHEED and STM study of a homoepitaxial diamond (001) thin film produced by microwave plasma CVD"New Diamond and frontier Carbon Technology. 10. 329-337 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Takami et al.: "Reporton the Studies of the Surfaces of Chemical-Vapor-Deposited Thin Diamond Films Conducted by Reflection High-Energy Electron Diffraction, Atomic Force Microscopy, and Scanning Tunneling Microscopy"東北大学科学計測研究所報告. 48. 19-32 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Takami et al.: "Development of a Back Scattering Reflection High Energy Electron Diffraction (BSRHEED) instrument"東北大学科学計測研究所報告. 48. 33-38 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Takami: "Surface studies of chemical-vapor-deposited diamond thin films, cubic boron nitrode, and graphite by reflection high-energy electron diffraction, atomic force microscopy, and scanning tunneling microscopy"東北大学科学計測研究所報告. 47. 1-16 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 高見知秀: "多重双晶粒子表面に有機分子が吸着した集合体 -多重双晶粒子ミセル-"表面科学. 20. 220-227 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Takami: "RHEED and AFM studies of homoepitaxial diamond thin film on C(001) substrate produced by microwave plasma CVD"Diamond and Related Materials. 8. 701-704 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Nishitani-Gamo: "Surface morphology of homoepitaxially grown (111), (001), and (110) diamond studied by low energy electron diffraction and reflection high-energy electron diffraction"Journal of Vacuum Science and Technology A. 17. 2991-3002 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] I.Kusunoki: "Reaction of a Si(100) surface with a hot C_2H_4 beam"Surface science. 433-435. 167-171 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T.Takami: "Diamond thin film grown homoepitaxially on diamond (001) substrate by microwave plasma CVD method studied by reflection high-energy electron diffraction and atomic force microscopy"Surface Science. 440. 103-115 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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