INO Shozo Faculty of Engineering, Utsunomiya University, Professor, 工学部, 教授 (70005867)
TAKAOKA Tsuyoshi Research Institute for Scientific Measurements, Tohoku University, Assistant, 科学計測研究所, 助手 (90261479)
KUSUNOKI Isao Research Institute for Scientific Measurements, Tohoku University, Professor, 科学計測研究所, 教授 (30025390)
|Budget Amount *help
¥13,700,000 (Direct Cost: ¥13,700,000)
Fiscal Year 2000: ¥6,900,000 (Direct Cost: ¥6,900,000)
Fiscal Year 1999: ¥6,800,000 (Direct Cost: ¥6,800,000)
Ino, one of the investigators on this project, discovered that an X-ray resonance line emitted from a metal thin film with only a layer, at the total-reflection angle, can be detected on observing the pattern of reflection high-energy electron diffraction (RHEED). He named the new surface analysis method "RHEED - Total-Reflection Angle X-ray Spectroscopy (RHEED-TRAXS)". The RHEED-TRAXS is a powerful method to observe RHEED pattern and to analyze the stoichiometry of the surface simultaneously. Moreover, it is a useful method to analyze the depth profile of thin films by changing the incident angle of the electron and the extraction angle of the X-ray. The purpose of this project is to develop the RHEED-TRAXS at the soft X-ray region, i.e., "RHEED - Total-Reflection Angle Soft X-ray Spectroscopy (RHEED-TRASXS)", to show the usefulness of this method for chemical analysis of surface, and to suggest the practical use of RHEED-TRASXS.
In 1999, We produced a prototype soft X-ray spectrometer in our machine shop. In this spectrometer, aberration-corrected concave grating with curved and variable spacing grooves was used to split the fluorescent X-ray lines. The splitted X-rays were detected by a multi-channel plate to change the X-ray signal into the visible light. The visible light was detected by a CCD camera out of the vacuum chamber through a viewing port. On the prototype spectrometer system, however, the signal was to weak to detect. Therefore, we planned to make an improved spectrometer to put a CCD camera into the vacuum, detecting the X-rays by the CCD camera directly.
In 2000, We bought the CCD camera available to put in vacuum. We produced the modified spectrometer, using the CCD camera in vacuum, also in our machine shop. The modification brought us better S/N ratios of the spectrum. However, bremsstrahlung was overlapped with the spectrum. To conquer the bremsstrahlung will enable us to put the RHEED-TRASXS to practical use.