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Development of diffracted electron spectroscopy in RHEED and its application to structural and morphological study on crystal surface

Research Project

Project/Area Number 11650034
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionDaido Institute of Technology

Principal Investigator

HORIO Yoshimi  Daido Institute of Technology, Engineering, Associate Professor, 工学部, 助教授 (00238792)

Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2001: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 2000: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1999: ¥1,600,000 (Direct Cost: ¥1,600,000)
KeywordsRHEED / energy filter / inelastic scattering / retarding field analyzer / energy lost electron / surface plasmon loss / エネルギーフィルタ
Research Abstract

Newly improved energy-filtered reflection high-energy electron diffraction apparatus has been constructed, which is combined with energy-loss measurement system using channeltron detector, high frequency modulation of retarding voltage and lock-in amplifier. The modulation amplitude with frequency of ω is superimposed on the retarding voltage. Transmitted electron beam passing through the energy filter is detected by the movable channeltron. The amplified electron beam current is finally inputted to lock-in amplifier. When the signal component of frequency ω is outputted from the lock-in amplifier, the energy-differentiated spectra, conventional energy loss spectra, are directly obtained.
Using this apparatus, energy loss spectra of specularly reflected electron beam have been measured for Si(111)7x7 surface and In over-layer on it. The obtained results are summarized as follows. 1. For Si(111)7x7 surface, the averaged number of surface plasmon excitations changes in proportion to 1/sin θ /where θ denotes the glancing angle. It has been confirmed that the experimentally obtained coefficient of 1/sin θ nearly agree with the theoretical value calculated by Lucas. 2. Especially, it has been found for the first time that the number of surface plasmon excitations abnormally increases at θ = 4° for [11-2] azimuth due to diffraction condition. 3. Surface plasmon energy of Si, 11.7 eV, hardly changes even for 1 monolayer coverage of In. Over 1 monolayer, the energy value gradually decrease and becomes constant value of 10.4 eV, at about 30A deposition thickness. The energy value is still larger than the surface plasmon energy of In, 8.9 eV, and nearly corresponds to the middle of Si and In surface plasmon energies, which is considered to be strongly influenced by the interface region between Si and In.
The EF-RHEED apparatus combined with the energy loss measurement system will become powerful tool for unknown inelastic scattering field in RHEED.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] Y.Horio: "Different Growth Modes of Al on Si(111)7x7 and Si(111)√<3>x√<3>-Al Surfaces"Jpn.J.Appl.Phys.. 38. 4881-4886 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Hara et al.: "Effect of Surface Plasmons on Energy Filtered RHEED Rocking Curves from a Si(111)-7x7 Surface"Phys.Stat.Sol.(a). 176. 925-936 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Horio: "Study of Surface Structural Analysis for Selective Atoms by Electron Wave Field of RHEED"Bulletin of Daido Institute of Technology. 35. 125-128 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Horio: "Surface Morphology of Growing Al on Si(111)7x7 and Si(111)√<3>x√<3>-Al Substrates by Reflection High-Energy Electron Diffraction"Jpn.J.Appl.Phys.. 39. 4374-4375 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Horio et al.: "Observation of CaF_2 Growth on Si(111)7x7 Surface by RHEED"J.Surf.Sci.Soc.Jpn.. 21. 473-480 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Horio: "Structural Study of Al Deposited Surface on Si(111)√<3>x√<3>-Al"Appl.Surf.Sci.. 169/170. 104-108 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Horio: "Surface Step Information of Vicinal Si(001) in EF-RHEED Pattern"J.Surf.Sci.Soc.Jpn.. 22. 522-529 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Horio et al.: "AFM Observation of the Surface Morphology of CaF_2 Film Grown on Si(111)7x7 Substrate"J.Surf.Sci.Soc.Jpn.. 22. 552-560 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Horio et al.: "Observation of Triangular Terraces and Triangular Craters of CaF_2 Film on Si(111) Substrate"Appl.Surf.Sci.. (in printing).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Horio: "Correlated Thermal Diffuse Scattering in Energy-Filtered RHEED pattern"Bulletin of Daido Institute of Technology. 37. 87-90 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 水町浩: "表面処理技術ハンドブック"エヌ・ティー・エス. 949 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Horio: "Different Growth Modes of Al on Si(111)7x7 and Si(111)√<3>x√<3>-Al Surfaces"Jpn. J. Appl. Rhys.. 38-8. 4881-4886 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Hara et al.: "Effect of Surface Plasmons on Energy Filtered RHEED Rocking Curves from a Si(111)-7x7 Surface"Phys. Stat. Sol. (a). 176. 925-936 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Horio: "Study of Surface Structural Analysis for Selective Atoms by Electron Wave Field of RHEED"Bulletin of Daido Institute of Technology. 35. 125-128 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Horio: "Surface Morphology of Growing Al on Si(111)7x7 and Si(111)√<3>x√<3>-Al Substrates by Reflection High-Energy Electron Diffraction"Jpn. J. Appl. Phys.. 39-7B. 4374-4375 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Horio et al.: "Observation of CaF_2 Growth on Si(111)7x7 Surface by RHEED"J. Surf. Sci. Soc. Jpn.. 21-8. 473-480 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Horio: "Structural Study of Al Deposited Surface on Si(111)√<3>x√<3>-Al"Appl. Surf. Sci.. 169/170. 104-108 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Horio: "Surface Step Information of Vicinal Si(001) in EF-RHEED Pattern"J. Surf. Sci, Soc. Jpn.. 22-8. 522-529 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Horio et al.: "AFM Observation of the Surface Morphology of CaF_2 Film Grown on Si(111)7x7 Substrate"J. Surf. Sci, Soc. Jpn.. 22-9. 552-560 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Horio et al.: "Observation of Triangular Terraces and Triangular Craters of CaF_2 Film on Si(111) Substrate"Appl. Surf. Sci.. (in printing).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Horio: "Correlated Thermal Diffuse Scattering in Energy-Filtered RHEED pattern"Bulletin of Daido Institute of Technology. 37. 87-90 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 堀尾吉巳, 佐藤誓一: "Si(111)7x7基板上に成長するCaF_2薄膜表面形態のAFM観察"表面科学. 22・9. 552-560 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Horio, S.Satoh: "Observation of Triangular Terraces and Triangular Craters of CaF_2 Film on Si(111) Substrate"Appi. Surf. Sci.. (in printing).

    • Related Report
      2001 Annual Research Report
  • [Publications] 堀尾吉巳: "エネルギーフィルター型RHEED図形内の振動相関熱散漫散乱"大同工業紀要. 37. 87-90 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Horio: "Surface Morphology of Growing Al on Si(111)7x7 and Si(111)√3x√3-Al Substrates by Reflection High-Energy Electron Diffraction"Jpn.J.Appl.Phys.. 39・7B. 4374-4375 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 堀尾吉巳: "Si(111)7x7表面上のCaF_2成長のRHEED観察"表面科学. 21・8. 473-480 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 堀尾吉巳: "微傾斜Si(001)表面からのEF-RHEED図形"大同工業大学紀要. 36. 113-118 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Horio: "Structural study of Al deposited surface on Si(111)√3x√3-Al"Appl.Surf.Sci.. 169-170. 104-108 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 水町浩: "表面処理技術ハンドブック"エヌ・ティー・エス. 949 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Horio: "Surface Morphology of Growing Al on Si(111)7x7 and Si(111)√<3>x√<3>-Al Substrates by Reflection High-Energy Electron Diffraction"Jpn.J.Appl.Phys.,in printing..

    • Related Report
      1999 Annual Research Report
  • [Publications] Y.Horio: "Structural Study of Al Deposited Surface on Si(111)√<3>x√<3>-Al"accepted in Appl.Surf.Sci..

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Hara,K.Watanabe,T.Horio and I.Hashimoto: "Effect of Surface Plasmon on Energy Filtered RHEED Rocking Curves from a Si(111)-7x7 Surface"Phys.Status Solidi A. 176. 925-936 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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