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Improvement of Resolution of a Electron Microscope by Means of Correction of Spherical Aberration Using a Foil Lens

Research Project

Project/Area Number 11650055
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionNagoya University

Principal Investigator

HANAI Takaaki  Nagoya University, Graduate School of Engineering, Lecturer (00156366)

Co-Investigator(Kenkyū-buntansha) TANAKA Shigeyasu  Nagoya University, Graduate School of Engineering, Research Associate (70217032)
MUROOKA Yoshie  Nagoya University, Graduate School of Engineering, Research Associate (40273263)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2000: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1999: ¥2,500,000 (Direct Cost: ¥2,500,000)
KeywordsFoil Lens / Spherical Aberration / Correction / Electron Lens / Electron Microscopy / Resolution / 球面収差補正 / 対物レンズ / 5次球面収差 / 高分解能 / 超高分解能
Research Abstract

1. Development of a foil lens for the objective lens of a transmission electron microscope (TEM).
In order to design the foil lens which enables us to correct the spherical aberration at a lower electrostatic field than 120 kV/mm, that is the known limit of self-supporting of the foil electrode, optical characteristics of the foil lens were numerically studied. It was found that that the correction is achieved by locating the foil lens at the position 3.6 mm lower from the center of the gap of the objective polepieces. The spherical aberration is corrected at the foil lens voltage of 550 V when the distance of the aperture and foil electrodes. An improved side-entry type foil lens was developed based on the calculation. The foil lens holder has the thickness of 1.7 mm, 0.3 mm thinner than previous one.
2. Observation of crystal lattice images with the improved foil lens.
The foil lens was incorporated with a commercial TEM and the images of Au fine particles were observed at the accelerating voltage of 200 kV. At the foil lens voltage of 300 V, (111) lattice images were observed at nearly in-focus condition where the contrast of the Fresnel fringe was weak. Such reduction of aretefacts shows an effect of correction of spherical aberration.
3. Measurements of spherical aberration of the corrected objective lens.
The spherical aberration was measured with a newly developed method, in which the spherical aberration coefficient and the defocus are simultaneously determined from the deviation of the dark-field TEM images of Au particles from the corresponding bright-field image. It was shown that the improved foil lend yields smaller spherical aberration coefficients than the previous one at the same foil lens voltage.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (22 results)

All 2000 Other

All Journal Article (10 results) Publications (12 results)

  • [Journal Article] Defect structure in selective area growth GaN pyramid on (111)Si substrate.2000

    • Author(s)
      田中成泰
    • Journal Title

      Applied Physics Letters 76

      Pages: 2701-2703

    • NAID

      120000979659

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Journal Article] As-quenched arc products by pulse-discharge.2000

    • Author(s)
      室岡義栄
    • Journal Title

      Microscopy and Microanalysis 6(suppl. 2)

      Pages: 54-55

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Journal Article] Pulse-arc system for investigation of initial fullerene deposition.2000

    • Author(s)
      室岡義栄
    • Journal Title

      Microscopy and Microanalysis 6(suppl. 2)

      Pages: 52-53

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Journal Article] Electron beam-induced chemical reactions of single crystal calcium floride by time-resolved EELS2000

    • Author(s)
      室岡義栄
    • Journal Title

      Microscopy and Microanalysis 6(suppl. 2)

      Pages: 144-145

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Journal Article] Angular-resolved electron-energy-loss-spectroscopy of perovskite mansaneese oxide.2000

    • Author(s)
      室岡義栄
    • Journal Title

      Microscopy and Microanalysis 6(suppl. 2)

      Pages: 202-203

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Journal Article] Defect structure in selective area growth GaN pyramid on (111)Si substrate.2000

    • Author(s)
      Shigeyasu Tanaka
    • Journal Title

      Applied Physics Letters 76

      Pages: 2701-2703

    • NAID

      120000979659

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Journal Article] As-quenched arc products by pulse-discharge.2000

    • Author(s)
      Yoshie Murooka
    • Journal Title

      Microscopy and Microanalysis 6, suppl. 2

      Pages: 54-55

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Journal Article] Pulse-arc system for investigation of initial fullerene deposition.2000

    • Author(s)
      Yoshie Murooka
    • Journal Title

      Microscopy and Microanalysis 6, suppl. 2

      Pages: 52-53

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Journal Article] Electron beam-induced chemical reactions of single crystal calcium floride by time-resolved EELS.2000

    • Author(s)
      Yoshie Murooka
    • Journal Title

      Microscopy and Microanalysis 6, suppl. 2

      Pages: 144-145

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Journal Article] Angular-resolved electron-energy-loss-spectroscopy of perovskite manganeese oxide.2000

    • Author(s)
      Yoshie Murooka
    • Journal Title

      Microscopy and Microanalysis 6, suppl. 2

      Pages: 202-203

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 花井孝明: "Maximum Entropy Restoration of Electron Microscope Images with a Random-Spatial-Distribution Constraint (印刷中)"Scanning Electron Microscopy. 11・suppl.. 377-388 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 田中成泰: "Transmission Electron Microscopy Study of Selective Area Growth of GaN on (111) Si Using AlGaN as an lntermediate Layer"Proc.3rd Int.Workshop on Nitride Semiconductors. 300-303 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] "As-quenched Arc Products by Pules-Discharg"Microscopy & Microanalysis 2000. 6・suppl.2. 54-55 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 室岡義栄: "Electron Bcam-Induced Chemical Reactions of Single Crystal Calcium Floride by Time-Resolved EELS"Microscopy & Microanalysis 2000. 6・suppl.2. 144-145 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 室岡義栄: "Angular-Resolved Electron-Energy-Loss-Spectroscopy of Perovskite Manganeese Oxide "Microscopy & Microanalysis 2000. 6・suppl.2. 202-203 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 田中成泰: "Defect Structure in Selective Area Growth GaN Pyramid on (111) Si Substrate"Applied Phisics Letters. 76・1. 2701-2703 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] 花井孝明: "Maximum Entropy Restoration of Electron Microscope Images with a Random-Spatial-Distribution Constraint (印刷中)"Scanning Electron Microscopy. Suppl.11. 377-388 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 田中成泰: "Defect structure in selective area growth GaN pyramid on (111)Si substrate (発表予定)"Applied Phisics Letters. (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 室岡義栄: "As-quenched arc products by pulse-discharge"Microscopy & Microanalysis 2000. (発表予定). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 室岡義栄: "Pulse-arc system for investigation of initial fullerene deposition"Microscopy & Microanalysis 2000. (発表予定). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 室岡義栄: "Electron beam-induced chemical reactions of single crystal calcium floride by time-resolved EELS"Microscopy & Microanalysis 2000. (発表予定). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] 室岡義栄: "Angular-resolved electron-energy-loss-spectroscopy of perovskite manganeese oxide"Microscopy & Microanalysis 2000. (発表予定). (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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