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Toughening of chemically-vapor deposited diamond by means of active incorporation of carbon allotropes

Research Project

Project/Area Number 11650075
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionTohoku University

Principal Investigator

KAMIYA Shoji  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (00204628)

Co-Investigator(Kenkyū-buntansha) SAKA Masumi  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (20158918)
UMEHARA Noritsugu  Tokyo Metropolitan Inst.Tech., Associate Professor, 工学部, 助教授 (70203586)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2000: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1999: ¥2,300,000 (Direct Cost: ¥2,300,000)
KeywordsCVD diamond / Non-Diamond Carbon / Thin Films / Adhesive Strength / Substrate Bias / Crystalline structure / Toughening
Research Abstract

This research project aimed at toughening of chemically-vapor deposited (CVD) diamond by means of actively incorporating carbon allotropes besides diamond. We studied the following two points and have succeeded to develop CVD diamond with adhesive toughness more than twice as much as that of usual one.
Elucidation and control for the toughening mechanism by means of the incorporation of non-diamond carbon allotropes The relations between deposition condition and crystalline structure, and between crystalline structure and strength were examined for the case of CVD diamond deposited under various conditions. As a result, it is for the first time clarified that non-diamond carbon concentrates on the grain boundaries which results in weaker strength of grain boundaries than that of grains, and that selective fracture of grain boundary dissipates the energy which leads to a higher adhesive toughness for the case of the adequate grain size. On the contrary, it was confirmed that toughness of CVD diamond films monotonically decreases with respect to the increase of non-diamond carbon with finer grain size.
Realization of thin films with higher toughness by means of structure control Application of bias voltage to the substrates, which is an effective method to control the state of crystalline nuclei on the interface of CVD diamond and substrates, was studied. Together with the knowledge on the effect of deposition condition mentioned above, we examined the possibility to optimize the condition to obtain higher toughness. As a consequence, we succeeded to obtain a CVD diamond coating on tungsten carbide cutting tools with the adhesive toughness of 30 J/m^2 which is more than two times of the conventional one being currently used in industry.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (35 results)

All Other

All Publications (35 results)

  • [Publications] 高橋博紀(神谷庄司,坂真澄,阿部博之): "Si基板上の気相合成ダイヤモンドにおける中間SiC層と界面付着強度"日本機械学会平成11年度材料力学部門講演会講演論文集. 99-16. 85-86 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 神谷庄司(井上昭徳,坂真澄,阿部博之): "気相合成法による炭素原子堆積に伴うシリコン基板表面の残留応力に対する分子動力学的考察"日本機械学会第12回計算力学講演会講演論文集. 99-5. 25-26 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya(H.Takahashi,A.Kobayashi,M.Saka and H.Abe): "Fracture strength of chemically vapor deposited diamond on the substrate and its relation to the crystalline structure"Diamond and Related Materials. 9. 1110-1114 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya(H.Takahashi,R.Polini and E.Traversa): "Quantitative determination of the adhesive fracture toughness of CVD diamond to WC-Co cemented carbide"Diamond and Related Materials. 9. 191-194 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] N.Umehara(K.Kato,M.Bai and Y.Miyake): "Effect of internal stress of CNx coating on its wear in sliding friction"Surface and Coating Technology. 113. 233-241 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 神谷庄司(木村浩樹,山辺基一郎,坂真澄,阿部博之): "超硬合金製切削工具上に形成されたダイヤモンドコーティングの破壊じん性の計測"日本機械学会2000年度年次大会講演論文集. 00-1,III. 211-212 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 神谷庄司(井上昭徳,坂真澄,阿部博之): "超硬合金基板上のダイヤモンドコーティングの界面じん性の評価"日本機械学会2000年度年次大会講演論文集. 00-1,III. 213-214 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya(N.Yoshida,Y.Tamura,M.Saka and H.Abe): "Quantitative measurement for the effect of enhanced nucleation on the adhesive strength of diamond coatings"Surface and Coating Technology. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Takahashi(S.Kamiya,M.Saka and H.Abe): "Fracture toughness of the interface between CVD diamond film and silicon substrate in the relation with methane concentration in the source gas mixture"Diamond and Related Materials. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya(H.Takahashi,R.Polini,P.D'Antonio and E.Traversa): "Effect of WC-Co substrate pretreatment and microstructure on the adhesive toughness of CVD diamond"Diamond and Related Materials. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Liu(H.Hanyu,S.Kamiya,A.Inoue): "Pretreatment of WC-Co substrates for the improvement of adhesion of diamond coatings and its quantitative evaluation"Proceedings of international workshop on sensing and evaluation of material systems, August 22, 2000, Sendai,Japan.. 33-39 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Kato(H.Koide,N.Umehara): "Micro-wear properties of carbon nitride coatings"Wear. 238. 40-44 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Takahashi (S.Kamiya, M.Saka and H.Abe): "SiC interlayer and adhesive strength of CVD diamond on silicon substrate"Proceedings of the JSME conference on materials and mechanics. vol.99-16. 85-86 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya (A.Inoue, M.Saka and H.Abe): "A molecular dynamics study of residual stress due to chemical vapor deposition of carbon on silicon substrate surface"Proceedings of the 12th computational mechanics conference JSME. vol.99-5. 25-26 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya (H.Takahashi, A.Kobayashi, M.Saka and H.Abe): "Fracture strength of chemically vapor deposited diamond on the substrate and its relation to the crystalline structure"Diamond and Related Materials. Vol.9. 1110-1114 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya (H.Takahashi, R.Polini and E.Traversa): "Quantitative determination of the adhesive fracture toughness of CVD diamond to WC-Co cemented carbide"Diamond and Related Materials. Vol.9. 191-194 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] N.Umehara (K.Kato, M.Bai and Y.Miyake): "Effect of internal stress on CNx coating on its wear in sliding friction"Surface and Coating Technology. Vol.113. 233-241 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya (H.Kimura, K.Yamanobe, M.Saka and H.Abe): "Measurement of toughness for the diamond coating on WC-Co cutting tool"Proceedings of the JSME annual meeting. Vol.III. 211-212 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya (A.Inoue, M.Saka and H.Abe): "Measurement of adhesive toughness for the diamond coating on WC-Co cutting tool"Proceedings of the JSME annual meeting. Vol.III. 213-214 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya (N.Yoshida, Y.Tamura, M.Sake and H.Abe): "Quantitative measurement for the effect of enhanced nucleation on the adhesive strength of diamond coatings"Surface and Coating Technology. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Takahashi (S.Kamiya, M.Saka and H.Abe): "Fracture toughness of the interface between CVD diamond film and silicon substrate in the relation with methane concentration in the source gas mixture"Diamond and Related Materials. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] S.Kamiya (H.Takahashi, R.Polini, P.D'Antonio and E.Traversa): "Effect of WC-Co substrate pretreatment and microstructure on the adhesive toughness of CVD diamond"Diamond and Related Materials. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] H.Liu (H.Hanyu, S.Kamiya and A.Inoue): "Pretreatment of WC-Co substrates for the improvement of adhesion of diamond coatings and its quantitative evaluation"Proceedings of international workshop on sensisng and evaluation of mateiral systems, August 22,2000, Sendai, Japan. 33-39 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Kato (H.Koide and N.Umehara): "Microwear properties of carbon nitride coatings"Wear. Vol.238. 40-44 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 神谷庄司(木村浩樹,坂真澄,阿部博之): "超硬合金製切削工具上に形成されたダイヤモンドコーティングの破壊じん性の計測"日本機械学会2000年度年次大会講演論文集. No.00-1,Vol.III. 211-212 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 神谷庄司(井上昭徳,坂真澄,阿部博之): "超硬合金基板上のダイヤモンドコーティングの界面じん性の評価"日本機械学会2000年度年次大会講演論文集. No.00-1,Vol.III. 213-214 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Kamiya(N.Yoshida,M.Saka and H.Abe): "Quantitative measurement for the effect of enhanced nucleation on the adhesive strength of diamond coatings"Seventh international conference on plasma surface engineering conference and exhibition,September 17-21,2000,Garmisch-Partenkirchen,Germany.. 276-276 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Takahashi(S.Kamiya,M.Saka and H.Abe): "Fracture toughness of the interface between CVD diamond film and silicon substrate in the relation with methane concentration in the source gas mixture"Diamond and Related Materials. (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Liu(H.Hanyu,S.Kamiya,A.Inoue): "Pretreatment of WC-Co substrates for the improvement of adhesion of diamond coatings and its quantitative evaluation"Proceedings of international workshop on sensing and evaluation of material systems,August 22,2000,Sendai,Japan.. 33-39 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Kato(H.Koide,N.Umehara): "Micro-wear properties of carbon nitride coatings"Wear. Vol.238. 40-44 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 神谷庄司 (高橋博紀、坂真澄、阿部博之): "Si基板上の気相合成ダイヤモンドにおける中間SiC層と界面付着強度"日本機械学会平成11年度材料力学部門講演会講演論文集. 99・16. 85-86 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 神谷庄司 (井上昭徳、坂真澄、阿部博之): "気相合成法による炭素原子堆積に伴うシリコン基板表面の残留応力に対する分子動力学的考察"日本機械学会第12回計算力学講演会講演論文集. 99・5. 25-26 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Kamiya (H.Takahashi,A.Kobayashi,M.Saka and H.Abe ): "Fracture strength of chemically vapor deposited diamond on the substrate and its relation to the crystalline structure"Diamond and Related Materials. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] S.Kamiya (H.Takahashi,R.Polini and E.Traversa): "Quantitative determination of the adhesive fracture toughness of CVD diamond to WC-Co cemented carbide"Diamond and Related Materials. (印刷中). (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] K.Umehara (K.Kato,M.Bai and Y.Miyake): "Effect of internal stress of CNx coating on its wear in sliding friction"Surface and Coating Technology. 113. 233-241 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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