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Study for the Radial Motion Measurement Using the Atom Chase Method in Nano-meter Range

Research Project

Project/Area Number 11650114
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionAkita University

Principal Investigator

OKUYAMA Eiki  Akita Univ., Faculty of Eng., Associate Prof., 工学資源学部, 助教授 (80177188)

Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2000: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1999: ¥1,800,000 (Direct Cost: ¥1,800,000)
Keywordsradial motion / STM / nano-meter / inverse filtering / inverse matrix
Research Abstract

The purpose of this research is to develop a novel compact system that can measure the radial motion with high accuracy.
In this system, a table rotates around an axis slowly, just like a roundness measurement system. A lattice is placed near the center of the table and an atom near the center of the rotation axis is chased by a STM.
At first, the STM to chase the motion of the atom was made. The next, 3-point method to measure the radial motion was developed.
The Summary is as follows ;
1. The STM was made and the sample lattice was measured. The system can measure the surface profile with sub-nano-meter order.
2. The novel 3-point method with the weighting addition and the inverse filtering for the radial motion measurement was proposed.
3. The novel 3-point method with the inverse matrix method for the roundness and the radial motion measurement was proposed.
4. Useful range of the cross-correlation to define the sensor setting angle of 3-pont method was shown.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] Eiki OKUYAMA: "The Roundness Measurement and the Radial Motion Measurement Based on the 3-point Method Using the Inverse Filtering"Proceedings of SPIE. Vol.4222. 427-431 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 奥山栄樹: "3点法におけるセンサ位置算出に関する研究"精密工学会東北支部学術講演会講演論文集. 61-62 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 奥山栄樹: "真円度形状測定と軸の回転精度測定のための3点法への逆行列法の適用について"精密工学会誌. 掲載待ち.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Eiki OKUYAMA: "The Roundness Measurement and the Radial Motion Measurement Based on the 3-point Method Using the Inverse Filtering"Proceedings of SPIE. Vol.4222. 427-431 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Eiki OKUYAMA: "Study for the Calculation of the sensor setting angle of 3-point method"Proceedings of JSPE Tohoku Region. 61-62 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Eiki OKUYAMA: "Inverse Matrix Method for the Roundness Measurement and the Radial Motion measurement based on the 3-point Method"Journal of JSPE. (Now, on Publishing).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] EiKi OKDYAMA: "The Roundness Measurement and the Radial Motion Measurement Based on the 3-point Method Vsing the Inverse Filtering"Proceedings of SPIE. Vol.4222. 427-431 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 奥山栄樹: "3点法におけるセンサ位置算出に定する研究"精密工学会東北支部学術講演会講演論文集. 61-62 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 奥山栄樹: "真円度形状測定と軸の回転精度測定のための3点法への逆行列法の適用について"精密工学会誌. (掲載待ち).

    • Related Report
      2000 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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