| Project/Area Number |
11650114
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Akita University |
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Principal Investigator |
OKUYAMA Eiki Akita Univ., Faculty of Eng., Associate Prof., 工学資源学部, 助教授 (80177188)
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| Project Period (FY) |
1999 – 2000
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| Project Status |
Completed (Fiscal Year 2000)
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| Budget Amount *help |
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2000: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 1999: ¥1,800,000 (Direct Cost: ¥1,800,000)
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| Keywords | radial motion / STM / nano-meter / inverse filtering / inverse matrix |
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| Research Abstract |
The purpose of this research is to develop a novel compact system that can measure the radial motion with high accuracy.
In this system, a table rotates around an axis slowly, just like a roundness measurement system. A lattice is placed near the center of the table and an atom near the center of the rotation axis is chased by a STM.
At first, the STM to chase the motion of the atom was made. The next, 3-point method to measure the radial motion was developed.
The Summary is as follows ;
1. The STM was made and the sample lattice was measured. The system can measure the surface profile with sub-nano-meter order.
2. The novel 3-point method with the weighting addition and the inverse filtering for the radial motion measurement was proposed.
3. The novel 3-point method with the inverse matrix method for the roundness and the radial motion measurement was proposed.
4. Useful range of the cross-correlation to define the sensor setting angle of 3-pont method was shown.
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