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Development of high precise coordinate measurement system using piezo-drive high-speed scanners

Research Project

Project/Area Number 11650118
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionNagaoka University of Technology

Principal Investigator

KYUSOJIN Akira  Nagaoka University of Technology, Engineering, Professor, 工学部, 教授 (20016661)

Co-Investigator(Kenkyū-buntansha) ISOBE Hiromi  Nagaoka University of Technology, Engineering, Associate researcher, 工学部, 助手 (60272861)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2000: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 1999: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsLaser tracking / Piezoelectric actuator / Micro positioning / Spatial coordinate measurement / Triangulation / Positioning in multi degrees-of freedom / 三角測量 / 微動ステージ
Research Abstract

As the first of all step of 3-D coordinates measurement, the one degree of freedom coarse motion unit was developed for one dimensional coordinate measurement in a wide range. Measurement system using the coarse motion unit was made and measuring accuracy of the system was done in one dimensional coordinate. Then, characteristic evaluation of corner cube was carried out first of all in this study. The following was confirmed : laser beam dispersion and lowering of the strength at time edge portion. Using this result, mirror control, which did not use the department, was conducted in respect of corner cube. Next, distance L was proofreaded to mirror and target. It was proven that the calibration was possible in 0.35mm error (0.035%) for about L=1000mm. And, the laser beam direction in the setting was calibrated. The rotation of the tracking station coordinate was obtained from the absolute coordinate of the coordinate measuring machine. Therefore the possibility of relative position identification method in using two tracking stations by this was found. Two-dimensional spatial coordinate measurements in the wide XY plane using this measuring system were carried out. The possibility of the practical application of three dimensional space coordinate measurement using the coarse and fine motion laser tracking station was found.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (4 results)

All Other

All Publications (4 results)

  • [Publications] 磯部浩已: "圧電素子駆動レーザトラッキングステーションを用いた高精度空間座標測定システムの開発(第1報)-微動トラッキングステーションの開発と性能評価-"精密工学会誌. 第66巻第5号. 751-756 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Hiromi Isobe, Kouhei Yoshii, Shinji Uchida and Akira Kyusojin: "Development of high accuracy spatial coordinate system using laser tracking station actuated by PZT (1st Report)-Development and verification of Fine motion tracking station-"Journal of Japan Society for Precision Engineering. 66(5). 751-756 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 磯部浩已: "圧電素子駆動レーザトラッキングステーションを用いた高精度空間座標測定システムの開発(第1報)-微動トラッキングステーションの開発と性能評価-"精密工学会誌. 第66巻第5号. 751-756 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 森脇三造: "粗微動レーザトラッキングステーションを用いた高精度空間座標測定システムの開発-第3報 粗動レーザトラッキングステーションの開発-"1999年度精密工学会秋季大会学術講演会講演論文集. 634 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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