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Micro corrdinate measuring machine for micro mechanism using parallel kinematics

Research Project

Project/Area Number 11650151
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 設計工学・機械要素・トライボロジー
Research InstitutionShizuoka University

Principal Investigator

OIWA Takaaki (2000)  Faculty of Engineering, Shizuoka University, Associate Professor, 工学部, 助教授 (00223727)

大岩 孝彰 (1999)  静岡大学, 工学部, 助教授 (11223727)

Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 2000: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 1999: ¥3,100,000 (Direct Cost: ¥3,100,000)
Keywordscoordinate measuring machine / parallel mechanism / micro machine part / inch-worm mechanism / マイクロマシン / 熱変位補正 / 回転誤差補正 / リンク配置 / 弾性ヒンジ
Research Abstract

This study proposed a new coordinate measuring machine (CMM) based on a parallel mechanism instead of XYZ mechanism. Because the conventional CMM using XYZ mechanism consisting of three mutually orthogonal slide mechanism is not suitable for measurement with nano-order accuracy. This CMM is suited for precision measurement of the geometrical deviations of the micro parts with three dimensional profile because the parallel mechanism has a number of advantages as follows. The motion error of the moving platform has little effect on the measured value, because the measuring point is in sensitive directions of the scale units. The truss structure has a high stiffness because its members are subjected to very few bending force. The systematic error produced by each of the scales is averaged with the other two. The small inertial mass enables high moving speed. First, we performed the link configuration design using the error analysis by singular value decomposition. Obtained link configuration improves the moving accuracy and the measuring resolution. Moreover, we have designed the strut consisting of the prismatic joint, linear scale unit and the actuator. The inch-worm mechanism using piezoelectric actuators has been employed as the actuator of the strut. The strut has been expanded and contracted by the inch-worm mechanism under the load of 4 N.In addition, full-close-controlled positioning using the scale unit has been performed. The settling time for 10 micrometer positioning was less than 0.1 second.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] 大岩孝彰,平野正和: "パラレルメカニズムを用いた精密運動機構-リンク配置の最適設計-"精密工学会誌. 65巻10号. 1425-1429 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 大岩孝彰,大多和毅: "パラレルメカニズムを用いた精密運動機構(続報)-試作機の性能評価-"精密工学会誌. 66巻2号. 277-281 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 大岩孝彰,松永高宏: "ねじり型弾性ヒンジに関する研究"精密工学会誌. 66巻6号. 955-959 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 大岩孝彰,山口浩希: "パラレルメカニズムを用いた三次元座標測定機(第3報)-アッベの原理-"精密工学会誌. 66巻9号. 1378-1382 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 大岩孝彰,馬場周平: "パラレルメカニズムを用いた三次元座標測定機(第4報)-試作機の開発-"精密工学会誌. 66巻11号. 1711-1715 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takaaki OIWA and Masakazu HIRANO: "Six Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism-Link Layout Design-"Journal of the Japan Society for precision Engineering. Vol.65, No.10. 1425-1429 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takaaki OIWA and Takeshi OOTAWA: "Six Degree-of-Freedom Fine Motion Mechanism using Parallel Mechanism (2nd Report) -Performance Test-"Journal of the Japan Society for precision Engineering. Vol.66, No.2. 277-281 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takaaki OIWA and Takahiro MATSUNAGA: "A Study on Torsional Elastic Hinge"Journal of the Japan Society for precision Engineering. Vol.66, No.6. 955-959 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takaaki OIWA and Kouki YAMAGUCHI: "Coordinate Measuring Machine using Parallel Mechanism (3rd Report) -Abbe's Principle-"Journal of the Japan Society for precision Engineering. Vol.66, No.9. 1378-1382 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takaaki OIWA and Shuhei BABA: "Coordinate Measuring Machine using Parallel Mechanism (4th Report) -Development of Trial Measuring Machine-"Journal of the Japan Society for precision Engineering. Vol.66, No.11. 1711-1715 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 大岩孝彰,平野正和: "パラレルメカニズムを用いた精密運動機構-リンク配置の最適設計-"精密工学会誌. 65巻10号. 1425-1429 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大岩孝彰,大多和毅: "パラレルメカニズムを用いた精密運動機構(続報)-試作機の性能評価-"精密工学会誌. 66巻2号. 277-281 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大岩孝彰,松永高宏: "ねじり型弾性ヒンジに関する研究"精密工学会誌. 66巻6号. 955-959 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大岩孝彰,山口浩希: "パラレルメカニズムを用いた三次元座標測定機(第3報)-アッベの原理-"精密工学会誌. 66巻9号. 1378-1382 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大岩孝彰,馬場周平: "パラレルメカニズムを用いた三次元座標測定機(第4報)-試作機の開発-"精密工学会誌. 66巻11号. 1711-1715 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大岩孝彰,松永高宏: "ねじり型弾性ヒンジに関する研究"精密光学会誌. (未定).

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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