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Study of shock wave generations using laser irradiation in jet flows for the purpose of developing debris removal method in semiconductor etching process.

Research Project

Project/Area Number 11650163
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Fluid engineering
Research InstitutionTohoku University

Principal Investigator

SAITOU Tsutomu  Institute of Fluid Science, Tohoku University, Associate Professor, 流体科学研究所, 助教授 (00302224)

Co-Investigator(Kenkyū-buntansha) TAKAYAMA Kazuyoshi  Institute of Fluid Science, Tohoku University, Professor, 流体科学研究所, 教授 (40006193)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2000: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 1999: ¥2,400,000 (Direct Cost: ¥2,400,000)
KeywordsSemiconductor manufacturing equipment / Dust removal / Shock wave / Micro explosives / Optical visualization / Two phase flow / Unstructured grid CFD / Adaptive grid CFD / 衝撃波 / ダスト / 高速噴流
Research Abstract

In the etching process of silicon wafers in semiconductor manufacturing industry, debris is generated and sticks to the wafer. The debris damages the submicron-scale electric circuits and the productivity of manufacturing devices is much reduced.
Many different cleaning techniques of such debris were tried in the past with some success but still a much more efficient method is to be developed.
This research proposal is to study if a method combining a high-speed gas jet and shock waves works well for cleaning debris by using experiments and numerical analysis.
In the fiscal year of 1999, a method of generating shock waves by a few milligrams of explosives and the technique of optical visualization (shadow graph, holographic interferometry, color shrielen, etc.) are developed. With the development, it became possible to observe shock wave phenomena in the range of few centimeters with good reproducibility.
For the numerical simulations, we developed a 2-dimensional unstructured unsteady CFD code that can treat moving boundary and applied it for the problem of flows around a rotating cylinder.
In the fiscal year of 2000, a new idea of generating non-steady flows on the solid wall using a high-speed rotor was tried. For the numerical simulations, a computer program for calculating dusty-gas flows is developed and applied to some practical problems.
As described above, the project progressed as planned and the results are presented at appropriate conferences and meetings. as well as in scientific journals.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (31 results)

All Other

All Publications (31 results)

  • [Publications] G.Jagadesh,O.Onodera,T.Ogawa,K.Takayama,Z.Jiang: "Study of micro-shock waves generated inside a fluid jet impinging on plane wall"AIAA Journal. Vol.39,No3. 424-430 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Jagadeesh,K.Takayama: "Holographic interferometric observation of micro-shock wave and supersonic jet interaction"Proceedings of Forun on High speed Jet Flows VII. FEDSM-2001. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Jagadeesh,T.Mizukaki,O.Onodera,T.Ogawa,K.Takayama: "Visualization of spherical micro-shock waves using double exposure holographic interferometry"Proceedings of the 9^<th> International Symposium on Flow Visualization. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Jagadeesh,O.Onodera,T.Ogawa,K.Takayama: "Visualizaing micro-air blasts using double exposure holographic interferometry"Proceedings of ICHSPP24. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Sun,K.Yada,G.Jagadeesh,O.Onodera,T.Ogawa,K.Takayama: "Study of shock wave interaction with a rotating cylinder"Proceedings of ICHSPP24. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Shibasaki,S.Sibasaki.G.Jagadeesh,M.Sun,K.Takayama: "Development of a high-speed cilinder rotor device for industrial applications of shock waves"23^<rd> International Symposium on Shock Waves. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Saito,P.Voinovich,E.Timofeev,K.Takayama: "Development and application of high-resolution adaptive numerical techniques in Shock Wave Research Center"23^<rd> International Symposium on Shock Waves. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Saito,K.Takayama: "Oblieque shock reflections in a dusty gas"the 23^<rd> International Symposium on Shock Waves 23. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Saito,P.Voinovich,E.Timofeev,K.Takayama: "Development and application of high-resolution adaptive numerical techniques in Shock Wave Research Center"Godunov Methods : Theory and applications", Edited Reviewer, E.F.Toro (Ed.). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Jagadeesh,Z.Jiang,O.Onodera,T.Ogawa,K.Takayama: "Experimental investigation of micro-shock waves generated inside a fluid jet impinging on plane wall"AIAA Journal. 2000-09 34. (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 矢田和之,孫明宇,高山和喜: "回転円柱をすぎる衝撃波の反射形態に関する実験的数値解析的研究"第49回理論応用力学講演会講演論文集. 369-370 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 矢田和之,G.Jagadeesh,孫明宇,小野寺収,小川俊宏,高山和喜: "回転する円柱を過ぎる衝撃波の反射"高速度撮影とフォトニクスに関するシンポジウム講演論文集. 255-258 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Jagadesh, O.Onodera, T.Ogawa, K.Takayama, Z.Jiang: "Study of micro-shock waves generated inside a fluid jet impinging on plane wall"AIAA Journal. Vol.39, No.3. 424-430 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Jagadeesh, K.Takayama: "Holographic interferometric observation of micro-shock wave and supersonic interaction"Proceedings of Forun on High speed Jet Flows VH. FEDSM-2001. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Jagadeesh, T.Mizukaki, O.Onodera, T.Ogawa, K.Takayama: "Visualization of spherical micro-shock waves using double exposure holographic interferometry"Proceedings of the 9^<th> International Symposium on Flow Visualization. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Jagadeesh, O.Onodera, T.Ogawa, K.Takayama: "Visualizaing micro-air blasts using double exposure holographic interferometry"Proceedings of ICHSPP24. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Sun, K.Yada, G.Jagadeesh, O.Onodera, T.Ogawa, K.Takayama: "Study of shock wave interaction with a rotating cylinder"Proceedings of ICHSPP24. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Shibasaki, S.Sibasaki, G.Jagadeesh, M.Sun, K.Takayama: "Development of a high-speed cilinder rotor device for industrial applications of shock waves"23^<rd> International Symposium on Shock Waves. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Saito, P.Voinovich, E.Timofeev, K.Takayama: "Development and application of high-resolution adaptive numerical techniques in Shock Wave Research Center"23^<rd> International Symposium on Shock Waves. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Saito, K.Takayama: "Oblieque shock reflections in a dusty gas"23^<rd> International Symposium on Shock Waves 23. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] T.Saito, P.Voinovich, E.Timofeev, K.Takayama: "Development and application of high-resolution adaptive numerial techniques in Shock Wave Research Center"Godunov Methods : Theory and applications", Edited Reviewer, E.F.Toro (Ed.). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] G.Jagadeesh, Z.Jiang, O.Onodera, T.Ogawa, K.Takayama: "Experimental investigation of micro-shock waves generated inside a fluid jet impinging on plane wall"AIAA Journal. 2000-0934. (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] K.Yada, M.Sun, K.Takayama: "Experimental and numerical studies of shock wave reflections on rotating cylinder K.Yada, G.Jagadeesh"Proceedings of the 49^<th> Theoretical and Applied Mechanics. 369-370 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] M.Sun, O.Onodera, T.Ogawa, K.Takayama: "Shock wave reflections on rotating cylinder"Proceedings of the High-speed Photography and Photonics. 255-258 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Hosseini,S.H.R.,Hirano,T.,Onodera,O.and Takayama,K.: "Study of weak underwater shock waves generated by Ho:YAG pulse laser beam"Journal Acoust.Soc.Am.(139th Meeting ASA). Vol.107,No.5. 2256 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Hosseini,S.H.R.,Hirano,T.,Onodera,O.and Takayama,K.: "Study of Ho:YAG laser generated underwater shock waves and cavity bubble for revascularization therapy"Advances in Bioengineering,T.A.Conway (ed),2000 ASME Int.Mech.Eng.Congress. Vol.48. 171 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Hosseini,S.H.R.,Hirano,T.,Onodera,O.and Takayama,K.: "Interaction of shock waves with cavitation bubble : Application of Ho:YAG pulse laser irradiation for cerebral thrombolysis"Journal Acoust.Soc.Am.(140th Meeting ASA/NOIS CON 2000). Vol.108,No.5. 2518 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 高山和喜: "衝撃波の医療応用と脳神経血管内治療"第16回日本脳神経血管内治療学会. 110 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] G.Jagadeesh,T.Mizukaki,K.Takayama: "From Micro-Explosion to Macro Explosions-Apolot Study"第49回理論応用力学講演会講演論文集. 399-400 (2000)

    • Related Report
      1999 Annual Research Report
  • [Publications] G.Jagadeesh,M.Sun,K.Takayama: "Aerodynamics of high speed rotors"JSME 77th Fluids Eng. Div. Cof.. 615-616 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] M.Sun,K.Takayama: "Numerical and experimental Study of shock wave interection with a rotating cylinder"Proc. of the 22nd ISSW. 143-180 (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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