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Progress of a GMR element by the simulation of film formation process and microfabrication

Research Project

Project/Area Number 11650333
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionNihon University

Principal Investigator

ITOH Akiyoshi  Nihon-University, Collage of Science & Technology, Professor, 理工学部, 教授 (60059962)

Co-Investigator(Kenkyū-buntansha) NAKAGAWA Katsuji  Nihon-University, Collage of Science & Technology, Associate Professor, 理工学部, 助教授 (20221442)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2000: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 1999: ¥2,200,000 (Direct Cost: ¥2,200,000)
Keywordsmolecular dynamics method / simulation / superlattice / giant magnet resistance / GMR / CPP-GMR / microfabrication / FIB
Research Abstract

The recording density of HDDs rises at an annual rate of 80 to 100 %. The giant magnetoresistance (GMR) effect in Co/Cu multilayers is one of the important issues for achieving high sensitive magnetic head. It is known that current-perpendicular-to-the-plane (CPP) GMR shows higher MR ratios than current-in-plane (CIP) GMR. It is commonly known that GMR effect depends on the nanostructure at the interface in the superlattice.
(1) For the purpose of clarifying the nanostructure at the surface during the film formation process, we performed molecular dynamics (MD) simulations for the Cu deposition behavior on aCu (111) single crystal substrate. After the deposition of 0.6 Cu atoms monolayer on a single crystal substrate, [ABC] and [AB/A] structures were observed at the surface. With increasing thickness of the deposited layer, [ABC] and [AB/A] structures contacted each other, and stacking faults appeared inside the third deposited layer. Then the grain structure appeared inside the fourth deposited layer merely over the area where the stacking faults were observed inside the third deposited layer. Then, the dependence of the interface structure to the kinetic energies of incident atoms derived from simulations corresponds well to the experimental results of NMR spectram.
(2) We performed micro fabrication of Co/Cu multilayers using a focused ion beam (FIB) etching machine to increase MR ratios by changing the current flow path. Ga contamination of the specimen caused by FIB processing was within 3 nm. As a result, the MR ratio increased from 4.55 % to 8.90%.

Report

(3 results)
  • 2001 Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (8 results)

All Other

All Publications (8 results)

  • [Publications] 梅原弘道: "FIBによる微細加工Co/Cu多層膜のGMR"日本応用磁気学会誌. 25(発表予定). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 井出祐介: "分子動力学法による単結晶基板および多結晶基板上へのCu薄膜積層初期過程の観察"日本金属学会誌. 3(発表予定). 193-197 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Umehara, R. Yatsushiro, S. Yamane, K. Yuasa, K. Nakagawa, and A. Itoh: "GMR in Co/Cu Multilayers Micro fabricated by Focused Ion Beam"J. Magn. Soc. Jpn.. 25 (to be published). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Ide, T. Takahashi, A. Tsukamoto, K. Nakagawa and A. Itoh: "Observation of Film Formation Process on Cu Single Crystal and Poly Crystal Substrate by Molecular Dynamics Simulation"J. Jpn. Inst. Metals.. 3 (to be published). 193-197 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 梅原弘道: "FIBによる微細加工Co/Cu多層膜のGMR"日本応用磁気学会誌. 25(発表予定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 井出祐介: "分子動力学法による単結晶基板および多結晶基板上へのCu薄膜積層初期過程の観察"日本金属学会誌. 3(発表予定). 193-197 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Arata Tsukamoto: "The structure at the interface of Ni/Pd bilayer films with different deposition sequences"IEEE Trans. Magn.. Vol. 35 No. 5. 2998-3000 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Arata Tsukamoto: "The structure at the interface of Ni/Pd Superlattices with different crystal orientation"J. Magn. Magn. Mater.. 198-199. 710-712 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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