| Project/Area Number |
11650339
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
電子デバイス・機器工学
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| Research Institution | Yamagata University |
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Principal Investigator |
OKUYAMA Katsuro Yamagata University, faculty of engineering, professor, 工学部, 教授 (70007011)
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| Co-Investigator(Kenkyū-buntansha) |
OKUYAMA Sumio Yamagata University, faculty of engineering, reserch assist, 工学部, 助手 (10224180)
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| Project Period (FY) |
1999 – 2000
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| Project Status |
Completed (Fiscal Year 2000)
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| Budget Amount *help |
¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 2000: ¥400,000 (Direct Cost: ¥400,000)
Fiscal Year 1999: ¥2,600,000 (Direct Cost: ¥2,600,000)
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| Keywords | hydrogen / gas sensor / palladium / expansion / cantilever / silver / platinum / 白金 |
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| Research Abstract |
The use of a PdAg alloy film instead of a pure Pd film in the Pd coated cantilever hydrogen gas sensor was found last year to be efficient in improving both the sensitivity and the measurable hydrogen pressure range. The defect of the PdAg alloy film, however, was the degradation of the response speed during storage in air.
1.By analyzing PdAg alloy surface using Auger electron spectroscopy (AES), the slow response speed to hydrogen was found to be due to contamination of the PdAg surface by sulfur.
2.In order to avoid the surface contamination by sulfur, the surface of the PdAg/glass cantilever was covered with a Pd thin film. The response time to 0.1 Torr hydrogen was 1/4 shorter (10 min) than the PdAg/glass cantilever without the Pd top film. The Pd top layer was analyzed by AES, and sulfur was still existing on the Pd surface.
3.For a further improvement of the response time, a Pt thin top layer was employed. The response time to 0.1 Torr hydrogen was shortened to 5 min.
4.The sensing system of the cantilever deflection was improved. Last year, we made a detection system of the cantilever deflection using the focus-servo mechanism of a compact disc (CD) system. However, it needed human aid to move an actuator in the system. By replacing the human operation in the system with a one-chip type microcomputer (PIC16F877), a full automatic deflection-detecting system was realized.
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