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Radiation damage of InGaAs device and its decrease method

Research Project

Project/Area Number 11650727
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Structural/Functional materials
Research InstitutionKumamoto National College of Technology

Principal Investigator

KAZUSADA Shigaki  Kumamoto National College of Technology, Department of Information and Communication Engineering, Associate Professor, 情報通信工学科, 助教授 (50044722)

Co-Investigator(Kenkyū-buntansha) KUDOU Tomohiro  Department of Information and Communication Engineering, Associate Researcher, 情報通信工学科, 助教授 (90225160)
HAYAMA Kiyoteru  Kumamoto National College of Technology, Department of Electronic Engineering,, Associate Researcher, 電子工学科, 助教授 (00238148)
OHYAMA Hidenori  Kumamoto National College of Technology, Department of Electronic Engineering, Professor, 電子工学科, 教授 (80152271)
HAKATA Tetusya  Department of Electronic Control, Associate Researcher, 電子制御工学科, 助教授 (60237899)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2001: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2000: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 1999: ¥1,800,000 (Direct Cost: ¥1,800,000)
KeywordsRadiation damage / High energy particle / Electron / InGaAs HEMT / AlGaAs HEMT / Degradation / Induced lattice defects / Recovery by annealing
Research Abstract

In these days when the use of nuclear reactors, high-energy particle accelerators and artificial satellites expands, the development of semiconductor devices, which can normally operate in a radiation-rich environment, is extensively taking place everywhere. In the project, the degradation of the electrical performance and the generated lattice defects in InGaAs devices, subjected to 1-MeV electrons, 1-MeV fast neutrons, 20-MeV protons and 20-MeV alpha rays, were investigated as a function of fluence and radiation source.
The main conclusions which can be made from the research project :
1. The degradation of the electrical performance of InGaAs devices increases with increasing radiation fluence, while it decreases with increasing germanium content.
2. After irradiation, electron capture levels are observed in InGaAs epitaxial layers which are probably related with a Ga interstitial complex. The electron capture levels, which act as generationrecombination center, are mainly responsible for the degradation of device performance.
3. The electron capture levels induced in Si-doped Ino.49Gao.5lP donor layer of InGaAs HEMT (High Electron Mobility Transistor) are thought to be mainly responsible for the decrease of the drain current and effective mobility due to the donor removal/ 4. The damage coefficient for proton irradiation is nearly the same as for neutron irradiation and is about three orders of magnitude larger than that for electron irradiation. This difference is due to the' different number of knock-on atoms, which is correlated with the difference of mass and the possibility of nuclear collisions for the formation of lattice defects.
5. The degraded performance and induced deep levels recover by thermal annealing.

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (41 results)

All Other

All Publications (41 results)

  • [Publications] H.Ohyama et al.: "20-MeV alpha ray effects in AlGaAs p-HEMTs"proceeding of the 4th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications. 133-138 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Ohyama et al.: "Impact of 20-MeV alpha ray irradiation on the V-band performance of AlGaAs psuedomorphic HEMTs"IEEE Trans. on Nucl. and Sci.. 47. 2546-2550 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Ohyama et al.: "Degradation and recovery of AlGaAs p-HEMTs irradiated by high-energy particles"Microelectron. Reliab.. 41. 79-85 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Ohyama et al.: "Studies of degradation mechnism for InGa_<0.53>As_<0.47> p-i-n photodiodes"proceeding of the RADECS 2000 workshop, Radiation Effects on Components and Systems. 105-109 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Ohyama et al.: "Impact of lattice defects on device performance of AlGaAs/GaAs p-HEMTs"Solid State Phenomena. 78〜79. 319-324 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Ohyama et al.: "Induced lattice defects in InGaAsP laser diodes by high-temperature gamma ray irradiation"Physica B. (掲載予定).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Kudou et al.: "Effect of irradiation in InGaAs photo devices"J. Radioanal Nucl. Chem.. 239. 361-364 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "Radiation damage of In 0.53 Ga 0.47 As photodiodes by high energy particles"Journal of Materials Science. 10. 403-405 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "Radiation damage in InGaP/InGaAs p-HEMTs by 20-MeV alpha rays"Journal of the Korean Physical Society. 35. 272-274 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "Radiation induced lattice defects in InGaAsP laser diodes and their effects on devices performance"Physica B. 273-274. 1031-1033 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Hakata et al.: "lmpact of induced lattice defects on performance degradation of AlGaAs/GaAs p-HEMTs"Physica B. 273-274. 1034-1036 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "Radiation induced lattice defects in InGaP/GaAs p-HEMTs and their effects on device performance"Solid State Phenomena. 69-70. 563-568 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "Impact of neutron irradiation on optical performance of InGaAsP laser diodes"Solid Thin Films. 364. 250-254 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "Radiation damage in AlGaAs/GaAs pseudomorphic HEMTs"proceeding of the Radiation and its Efffects on Components and System RADECS 99, Fontevraud France. 295-299 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Hakata et al.: "Degradation and recovery of AlGaAs/GaAs p-HEMTs by high energy particles"proceeding of the 19th Electronics Materilas Symposium, Izu-Nagaoka Japan. 11-14 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Kudou et al.: "Radiation damage in InGaAs photodides"proceeding of the 20th Electronics Materilas Symposium, Izu-Nagaoka Japan. 19-20 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "20-MeV alpha ray irradiation effects in AlGaAs pseudomorphic HEMTs"proceeding of the Japan-Korea joint workshop on advanced semiconductor processes and equipments, Toyahashi Japan. 89-90 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "20-MeV alpha ray effects in AlGaAs p-HEMTs"proceeding of the 4th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications, Tsukuba Japan. 133-138 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Hakata et al.: "Impact of lattice defects on device performance of AlGaAs/GaAs p-HEMTs"proceeding of the 6th international workshop on beam injection assessment of microstructures in semiconductors, Fukuoka, Japan. 34 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "Impact of 20-MeV alpha ray irradiation on the V-band performance of AlGaAs psuedomorphic HEMTs"IEEE Trans. on Nucl. and Sci.. 47. 2546-2550 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "Degradation.and recovery of AlGaAs p-HEMTs irradiated by high-energy particles"Microelectron. Reliab.. 41. 79-85 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Hakata et al.: "Impact of lattice defects on device performance of AlGaAs/GaAs p-HEMTs"Solid State Phenomena. 78-79. 319-324 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Ohyama et al.: "Induced lattice defects in InGaAsP laser diodes by high-temperature gamma ray irradiation"Physica B. to be published.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Ohyama et al.: "20-MeV alpha ray effects in AlGaAs p-HEMTs"proceeding of the 4th International Wprkshop on Radiation Effects on Semiconductor Devices for Space Applications. 133-138 (2000)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Ohyama et al.: "Impact of 20-MeV alpha ray irradiation on the V-band performance of AlGaAS psuedomorphic HEMTs"IEEE Trans. on Nucl.and Sci.. 47. 2546-2550 (2000)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Ohyama et al.: "Degradation and recovery of AlGaAs p-HEMTs irradiated by high-energy particles"Microelectron. Reliab. 41. 79-85 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Ohyama et al.: "Studies of degradation mechnism for InGa_<0.53>As_<0.47> p-i-n photodiodes"proceeding of the RADECS 2000 workshop, Radiation Effects on Components and_Systems. 105-109 (2000)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Ohyama et al.: "Impact of lattice defects on device performance of AlGaAs/GaAs p-HEMTs"Solid State Phenomena. 78〜79. 319-324 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Ohyama et al.: "Induced lattice defects in InGaAsP laser diodes by high-temperature gamma ray irradiation"Physica B. (掲載予定).

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Ohyama: "20-MeV alpha ray irradiation effects in AlGaAs pseudomorphic HEMTs"proceeding of the Japan-Korea joint workshop on advanced semiconductor processes and equipments, Toyahashi Japan. 89-90 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Onoda,H.Ohyama et al.: "Studies of degradation mechnism for InGa_<0.53>As_<0.47> p-i-n photodiodes"proceeding of the RADECS 2000 workshop, Radiation Effects on Components and Systems, Louvain-la-Neuve Belgium. 105-109 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Ohyama et al.: "20-MeV alpha ray effects in AlGaAs p-HEMTs"proceeding of the 4th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications Tsukuba Japan. 133-138 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Ohyama et al.: "Impact of 20-MeV alpha ray irradiation on the V-band performance of AlGaAs psuedomorphic HEMTs"IEEE Trans.on Nucl.and Sci.. 47. 2546-2550 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Ohyama et al.: "Degradation and recovery of AlGaAs p-HEMTs irradiated by high-energy particles"Microelectron.Reliab.. 41. 79-85

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Ohyama et al.: "Impact of lattice defects on device performance of AlGaAs/GaAs p-HEMTs"Solid State Phenomena. (to be published).

    • Related Report
      2000 Annual Research Report
  • [Publications] H. Ohyama et al.: "Radiation damage of In_<0.53>Ga_<0.47>As photodiodes by high energy particles"Journal of Materials Science. 10. 403-405 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Ohyama et al.: "Radiation damage in InGaP/InGaAs p-HEMTs by 20-MeV alpha rays"Journal of the Korean Physical Society. 10. 335-337 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Ohyama et al.: "Radiation induced lattice defects in InGaAsP laser diodes and their effects on devices performance"Physica B. 273-274. 1031-1033 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] T. Hakata et al.: "Impact of induced lattice defects on performance degradation of AlGaAs/GaAs p-HEMTs"Physica B. 273-274. 1034-1036 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Ohyama et al.: "Radiation induced lattice defects in InGaP/GaAs p-HEMTs and their effects on device performance"Solid State Phenomena. 69-70. 563-568 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] H. Ohyama et al.: "Impact of neutron irradiation on optical performance of InGaAsP laser diodes"Solid Thin Films. 364. 250-254 (2000)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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