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Microfabrication of Semiconductor Surface by Photoelectrochemical Etching Technique

Research Project

Project/Area Number 11650843
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 工業物理化学
Research InstitutionGIFU UNIVERSITY

Principal Investigator

SUGIURA Takashi  Fuculty of Engineering GIFU UNIVERSITY Associate Proffesor, 工学部, 助教授 (40171144)

Co-Investigator(Kenkyū-buntansha) MINOURA Hideki  Fuculty of Engineering GIFU UNIVERSITY Proffesor, 工学部, 教授 (40021612)
Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2000: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 1999: ¥2,600,000 (Direct Cost: ¥2,600,000)
Keywordstitanium dioxide / photoelectrochemical etching / nano-porous structure / photoetching / grain boundary / surface tailoring / selective etching / エッチングサイト選択性
Research Abstract

The photoelectrochemical etching (photoetching) of a TiO_2 electrode in sulfuric acid solution generates nano-structured surface (named "nano-honeycomb" structure). Another interesting finding is its potential dependent etching site selectivity, i.e., a preferential photoelectrochemical dissolution of grain bulk for a sintered pellet TiO_2 electrode under weak anodic polarization (upward band bending), which results in the formation of a "skeleton" structure consisting of only grain boundaries. The latter must offer a possibility of characterize grain boundaries, which are known to play a crucial role in some ceramic devices.
In the present work, we report more detailed characterization of grain boundary of a sintered pellet TiO_2 as well as the size control of the "nano-honeycomb". Varying the photoetching conditions such as photoetching time, photoetching potential and light intensity did not change the size of a "nano-honeycomb", suggesting that its size is a reflection of the intrinsic property of the TiO_2 used. Modifying the properties of TiO_2 would change it. Actually upon increasing the donor density of a TiO_2 electrode by reducing it in H_2 atmosphere, the size of the "nano-honeycomb" decreased. For a TiO_2 electrode with a donor density of the order of 10^<21> cm^<-3>, the size amounts to 30 nm. The formation of such a fine structure will find useful applications to various devices such as (photo) catalysts, sensors and dye-sensitized solar cells.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (6 results)

All Other

All Publications (6 results)

  • [Publications] Takashi Sugiura: "Microstructual Obsevation of Photoelectrochemically Tailored Nano-Honeycomb TiO_2"Electrochemistry. 67・12. 1234-1236 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 箕浦秀樹,杉浦隆: "ナノハニカム構造を有する酸化チタン表面の創製"表面. 38・6. 297-305 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takashi Sugiura: "Microstructual Obsevation of Photoelectrochemically Tailored Nano-Honeycomb TiO_2"Electrochemistry. 67. 1234-1236 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Takashi Sugiura: "Evolution of Nano-Honeycomb Structure on Titanium Dioxide Surface"Reviews and Topics on Surface Science & Technology Avant-grade. 38. 297-305 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 箕浦秀樹,杉浦隆: "ナノハニカム構造を有する酸化チタン表面の創製"表面. 38・6. 297-305 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Takashi Sugiura: "Microstructual Observation of Photoelectro chemically Tailored Nano-Honeycomb TiO_2"Electrochemistry. 67・12. 1234-1236 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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