| Project/Area Number |
11792001
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| Research Category |
Grant-in-Aid for University and Society Collaboration
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| Allocation Type | Single-year Grants |
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| Research Field |
固体物性Ⅰ(光物性・半導体・誘電体)
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| Research Institution | NARA INSTITUTE OF SCIENCE AND TECHNOLOGY (NAIST) |
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Principal Investigator |
KANEMITSU Yoshihiko NAIST, Materials Science, Associate Professor, 物質創成科学研究科, 助教授 (30185954)
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| Co-Investigator(Kenkyū-buntansha) |
NAGAMURA Toshihiko Unisoku Co., Ltd., R&D Laboratory, Conductor, 研究開発部, 部長(研究職)
KUSHIDA Takashi NAIST, Materials Science, Professor, 物質創成科学研究科, 教授 (00013516)
HATTORI Ken NAIST, Materials Science, Associate Professor, 物質創成科学研究科, 助教授 (00222216)
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| Project Period (FY) |
1999 – 2001
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| Project Status |
Completed (Fiscal Year 2001)
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| Budget Amount *help |
¥7,300,000 (Direct Cost: ¥7,300,000)
Fiscal Year 2001: ¥7,300,000 (Direct Cost: ¥7,300,000)
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| Keywords | scanning microscope / Auger analysis / tunneling microscope / focused ion beam / near field microscope / 走査型顕微鏡 / 表面構造 / 電子エネルギー分析器 |
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| Research Abstract |
In this research we have developed a new-type small-sized surface analyzer which includes two important and indispensable functions for surface analysis and observation : Auger element analysis and scanning tunneling microscopy (STM). To produce such an analyzer, we have proposed a special STM tip working as an electron source for the excitation of core electrons at the surface, with an energy analyzer for Auger electrons emitted from the surface, on the basis of an STM equipment. Actually we have designed and produced such a system. For the special tip, we have succeeded to prepare the tip with the shield function (and also the Wehnelt function) which can eliminate the effect of the strong electric field formed by the tip bias-voltage (the usual problem), after the repetition of calculations and tip-trials using software programs for the electron orbital analysis, the focused ion beam facility, and so on. For the electron energy analyzer, the cylindrical-mirror type was adopted because of the advantage in the signal-to-noise ratio rather than the retardation-grid type. Using the cylindrical-mirror analyzer located behind the special tip we confirmed that Auger electrons from sample surfaces can be detected at the accurate kinetic energies. Moreover, we also confirmed the atomic resolution of the STM itself. Furthermore, we found the progress of the spatial resolution for the Auger electron spectroscopy by the addition of the lens electrode around the tip using the calculation. From these results, we have succeeded to develop a prototype system of "the small-sized scanning tunneling microscope with Auger-electron analyzer".
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