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DEVELOPMENT OF ONE-STOP MACHINING SYSTEM AND CORE TECHNOLOGIES FOR LARGE-DIAMETER Si WAFER BEING POTENTIALLY USED FROM YEAR 2003

Research Project

Project/Area Number 11792007
Research Category

Grant-in-Aid for University and Society Collaboration

Allocation TypeSingle-year Grants
Research Field 機械工作・生産工学
Research InstitutionIBARAKI UNIVERSITY

Principal Investigator

EDA Hiroshi  Ibaraki University, Faculty of Engineering, Professor, 工学部, 教授 (60007995)

Co-Investigator(Kenkyū-buntansha) NAKANO Hirotami  Ibaraki University, Faculty of Engineering, Lecturer, 工学部, 講師 (90257329)
KONDO Ryo  Ibaraki University, Faculty of Engineering, A/Prof., 工学部, 助教授 (90186867)
ZHOU Libo  Ibaraki University, Faculty of Engineering, A/Prof., 工学部, 助教授 (90235705)
WATANABE Kazushi  Hitachi Via Mechanics Pte. Ltd., Vice chief engineer, 副技師長
SHIMIZU Jun  Ibaraki University, Faculty of Engineering, Research Associate, 工学部, 助手 (40292479)
Project Period (FY) 1999 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥8,200,000 (Direct Cost: ¥8,200,000)
Fiscal Year 2001: ¥8,200,000 (Direct Cost: ¥8,200,000)
KeywordsSilicon wafer / Giant magnetostrictive material / Ultraprecision positioner / Alignment control / Fixed abrasives / Grinding / 局所クリーンルーム / 省エネ
Research Abstract

This research project has developed an integrated manufacturing system for φ300mm silicon wafer, using fixed abrasive instead of conventional free slurry, to provide a totally integrated solution for achieving the surface roughness R_a < 1nm(R_y < 5〜6nm) and the global flatness < 0.2μm/φ300mm. In addition to the space saving, this integrated system also significantly reduces the total energy consumption by 70%, compared with the current process used for φ200mm Si wafer. Four core technologies : the hybrid process mechanics, the GMM (giant magnetostrictive material) actuated positioning/alignment device and the ecologically friendly coolant circulation system have been developed in this research. The results obtained are summarized as follows ;
The grinding system has two degrees of freedom. The work spindle moves along X-direction, while the wheel spindle moves along Z-direction. Aerostatic bearings are applied to the spindles and other guideways so that no contact is made between the c … More ounterparts. By disengaging the lead screw nut, the Z-axis table is floating in nature, and movable by a low friction pneumatic cylinder. This function creates a constant grinding force/pressure as low as 20gf/cm^2, and offers a polishing-like condition for the final finish. In order to achieve ductile mode grinding and improve the global flatness, a positioning and alignment mechanism is particularly developed for the work spindle. There are two sets of plates (600x600mm) installed between the work spindle and the X-axis table. The bottom plate is used for alignment, while the top plate for positioning. Powered by GMM actuators, the device is able to offer 6.25 Å step response at the payload of 750kgf, while to align the work spindle against the grinding wheel at the resolution of 10^<-2> seconds over the range of ± 1.5 degrees.
Most of the silicon grinding system utilizes the plunge method to keep the contact area unchanged and thereby to deliver a stable grinding performance throughout the grinding process. As a result, the cutting path formed in the wafer center is much denser than that at the fringe. A kinematical analysis has been done in this research and the results lead to 1) the criteria for speed ratio combination to improve the surface roughness, 2) a proper alignment between the wheel and wafer to effectively reduce the profile error, 3) an optimal wheel geometry to attain a consistent cutting path density.
In order to completely remove the subsurface damage, the project team is further developing a new process called as "CMG ; chemo-mechanical grinding", in which, the chemically active additives is applied to the mechanical grinding process. In addition to the surface roughness enhancement, the dislocation at the wafer subsurface finished by CMG process is significantly reduced to 1/30 as compared to the conventional precision grinding. Less

Report

(4 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • 1999 Annual Research Report
  • Research Products

    (101 results)

All Other

All Publications (101 results)

  • [Publications] 江田 弘, 山本佳男: "超磁歪アクチュエータ・センサ"計測と制御. 38・3. 197-201 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘: "感性と科学・技術の水際線-砥粒加工とトライボロジ(第1部)"砥粒加工学会誌. 43・4. 151-155 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘: "セレンディピティと科学・技術の水際線-砥粒加工とトライボロジ(第2部)"砥粒加工学会誌. 43・6. 254-257 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘: "科学技術とフィランスロピー-砥粒加工とトライボロジ(第3部)"砥粒加工学会誌. 43・8. 360-363 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘: "生体・生命と宇宙フロンティからの帰納システム-砥粒加工とトライボロジ(第4部)"砥粒加工学会誌. 43・10. 425-428 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 清水 淳, 江田 弘, 大村悦二: "宇宙環境下における飛しょう体鏡面劣化現象のシミュレーション(第1報)-損傷過程の原子挙動と損傷に及ぼす表面性状の影響-"精密工学会誌. 66・4. 624-629 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Zhou, Y.Yamamoto, T.Ishikawa, T.Kawakami, J.Shimizu: "Development of Micro-manipulation for Operation in Scanning Electron Microscope"Int.J.Manufacturing Science & Technology. 2・2. 107-113 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, T.Mori, Y.Okada, L.Zhou, J.Shimizu: "Powder Metallurgic Giant Magnetostriction Materials and Application in Space Structure"Int.J.Manufacturing Science & Technology. 2・2. 127-133 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Ii, H.Eda, T.Imai, M.Nishimura, T.Kawasaki, J.Shimizu, T.Yamamoto, L.Zhou: "Development of High Water-Content Cutting Fluid with a New Concept Fire Prevention and Environmental Protection"Precision Engineering. 24・3. 624-629 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘, 清水 淳: "分子動力学による固体の摩擦・摩耗現象の解析"トライボロジスト. 45・9. 661-666 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] L.Zhou, H.Huang, J.Shimizu, H.Eda: "Automated Robotic System for Jet Engine Overhaul-Process Development and Enhancement for Honeycomb Repair-"精密工学会誌. 66・12. 1895-1900 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘, 周 立波: "超磁歪材料の動向"機械の研究. 52・11. 1142-1128 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘, 周 立波, 守屋光永, 川上辰男, 石川友彦, 山本佳男: "電子顕微鏡内マイクロファブリケーションデバイスの技術開発"精密工学会誌. 67・8. 1284-1288 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Zhou, H.Nakano, R.Kondo, J.Shimizu: "Development of Single Step Grinding System for Large Scale φ300 Si Wafer: A Total Integrated Fixed-Abrasive Solution"Annals of the CIRP. 50・1. 225-228 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘, 周 立波, 中野博民, 近藤 良, 清水 淳, 田島琢二: "大口径φ300mmSiウエハ用超加工機械の開発"精密工学会誌. 67・10. 1693-1697 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 周 立波, 江田 弘, 清水 淳, 西村雅也, 佐川克雄: "電子・磁気・光学基板の脆性-延性モード統合仕上げ加工"砥粒加工学会誌. 45・6. 304-309 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 佐川克雄, 江田 弘, 周 立波, 清水 淳: "φ300Siウエハ超加工機械創作用仕上げ面粗さシミュレーション"砥粒加工学会誌. 45・12. 574-579 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 周 立波, 篠原一宏, 清水 淳, 江田 弘: "大口径シリコンウエハ研削加工における幾何と運動"精密工学会誌. 68・1. 125-129 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, J.Shimizu, L.Zhou: "Development of State-of-Art Devices on the Sub-nanometer Grinding Machine Tool for Optical Glasses"Proc.Int.Conf.ICOSN'99,Yokohama. 344-347 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, J.Shimizu, L.Zhou: "Study on Ultra-Precision Machining of Ceramics for Optical Components"Proc.Int.Conf.ICOSN'99,Yokohama. 420-423 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Chouanine, J.Shimizu, L.Zhou: "Development of System and Key-Components for Ductile Mode Grinding"Proc.Int.Conf.EUSPEN'99. 222-225 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, J.Shimizu, L.Zhou, Y.Takimoto, A.Muroya: "Giant Magnetostrictive Positioner for Single Diamond Turning of Silicon Substrate"Proc.Int.Conf.ICPE-9,Osaka. 187-192 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, T.Mori, L.Zhou, K.Kubota, J.Shimizu: "Powder Metallurgic Giant Magnetostrictive Material and its Applications in Micro-actuator and Micro-sensors"Proc.Int.Conf.Materials and Device Characterization in Micromachining II,SPIE,USA. 114-123 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Zhou, J.Shimizu: "Development of Powder Metallurgic Giant Magnetostrictive Materials and Their Applications"Proc.Int.Conf.AMSMA2000,China. 117-120 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Nakano, M.Kosuge, H.Eda, L.Zhou, J.Shimizu, Y.Tomita: "Novel positioning system usinga giant magnetostriction actuator for ultra precision and high power applications"Proc.Int.Conf.ICEM2000,Finland. 462-466 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Zhou, J.Shimizu, T.Mori: "PM Technology in Giant Magnetostrictive Materials Manufacturing and Application Development"Proc.Int.Conf.PM2000,Kyoto. 1356-1359 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K.Sagawa, H.Eda, L.Zhou, J.Shimizu: "Simulation on High Integrity Surface Generation of φ300 Si Wafer with Fixed-abrasive Solution"Proc.Int.Conf.ICPE-10,Yokohama. 441-445 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Shimizu, H.Eda, L.Zhou: "Molecular Dynamics Simulation on Dependence of Atomic-Scale Stick-Slip Phenomenon upon Probe Tip Shape"Proc.Int.Conf.ICPE-10,Yokohama. 759-763 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Shimizu, L.Zhou, H.Eda: "Simulation Analysis of Contact Process in AFM Surface Observation"Proc.2nd World Tribology Congress,WTC2001,Austria. M-12-22-157-SHIMIZU.pdf (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Shimizu, L.Zhou, A.Muroya, H.Eda: "Simulation and Experimental Analysis of Abrasive Wear in Ultra High-Speed Grinding"Proc.2nd World Tribology Congress,WTC2001,Austria. M-14-04-156-SHIMIZU.pdf (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Zhou, J.Shimizu, M Li: "Development of Newly Conceptualized High Water-Content Lubrication Coolant"Proc.2nd World Tribology Congress,WTC2001,Austria. M-66-03-064-EDA.pdf (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Shimizu, H.Eda, L.Zhou: "Molecular Dynamics Simulation of Solid Surface Image by Atomic Force Microscope"Proc.Int.Workshop TIWSS'2001,Tokyo. 70-74 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Shimizu, L.Zhou, H.Eda: "Molecular Dynamics Simulation of Superspeed Grinding of Ductile Material"Proc.Int.Workshop TIWSS'2001,Tokyo. 75-79 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Kawai, L.Zhou, J.Shimizu, H.Eda: "Research on CMG(Chemo-Mechanical Grinding)"Proc.Int.Conf.ISAAT2001,Korea(Advances in Abrasive Technology IV). 305-308 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Fukuda, L.Zhou, J.Shimizu, H.Eda: "Improvement of Insert Tool Performance with Electrical/Magnetic Treatment"Proc.Int.Conf.ISAAT2001,Korea(Advances in Abrasive Technology IV). 437-440 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Shimizu, H.Eda, L.Zhou, T.Asano, Y.Nakazawa: "Microscopic Analysis of Friction Phenomena in Surface Observation by Atomic Force Microscope"Proc.Int.Conf.ITC2000,Nagasaki. 687-692 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Shimizu, H.Eda, L.Zhou, A.Muroya, Y.Nakazawa: "Microscopic Analysis of Material Deformation in Ultra High-Speed Grinding Process"Proc.Int.Conf.ITC2000,Nagasaki. 769-774 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘, 他多数: "改訂6版 金属便覧(日本金属学会編)"丸善. 1182 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 江田 弘, 周 立波: "ナノ・マイクロマシン技術総覧(分担)"(株)産業技術開発センター(掲載待ち). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda and Y.Yamamoto: "Giant Magnetostrictive Actuator and Sensor"Measurement and control. 38-3(in Japanese). 197-201 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Eda, H. Hamada, Y. Tomita and Y. Yamamoto: "Study on Super-Fine Diamond Cluster with Application to Ultra-Precision Surface Generation"J. of the Balkan Tribological Association. 5-2. 94-104 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Shimizu, H.Eda and E.Ohmura: "Computer Simulation of Degradation for Spacecraft Mirror Surface in Space Environment (1st Report) -Atomic Behavior in Degradation Process and Influence of Surface Profile on Degradation-"J. JSPE. 66-4(in Japanese). 624-629 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Eda, L. Zhou, Y. Yamamoto, T. Ishikawa, T. Kawakami and J. Shimizu: "Development of Micro-manipulation for Operation in Scanning Electron Microscope"Int. J. Manufacturing Science & Technology. 2-2. 107-113 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Eda, T. Mori, Y. Okada, L. Zhou and J. Shimizu: "Powder Metallurgic Giant Magnetostriction Materials and Application in Space Structure"Int. J. Manufacturing Science & Technology. 2-2. 127-133 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Ii, H.Eda, T.Imai, M.Nishimura, T. Kawasaki, J.Shimizu, T.Yamamoto and L.Zhou: "Development of High Water-Content Cutting Fluid with a New Concept Fire Prevention and Environmental Protection"Precision Engineering. 24-3. 624-629 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda and J.Shimizu: "Analysis of Friction and Wear Phenomenon of Solid"J. JAST. 45-9(in Japanese). 661-666 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] L.Zhou, H.Huang, J.Shimizu and H.Eda: "Automated Robotic System for Jet Engine Overhaul-Process Development and Enhancement for Honeycomb Repair -"Int. J. JSPE. 66-12. 1895-1900 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda and L.Zhou: "The Trend of the Giant Magnetostrictive Materials"Science of Machine. 52-11(in Japanese). 1124-1128 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Eda, L. Zhou, M. Mitsunaga, T. Kawakami, T. Ishikawa and Y. Yamamoto: "Development of Micro Fabrication Device for Scanning Electron Microscope"J. JSPE. 67-8(in Japanese). 1284-1288 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Eda, L. Zhou, H. Nakano, R. Kondo and J. Shimizu: "Development of Single Step Grinding System for Large Scale φ300 Si Wafer : A Total Integrated Fixed-Abrasive Solution"Annals of the CIRP. 50-1. 225-228 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Eda, L. Zhou, H. Nakano, R. Kondo, J. Shimizu and T. Tajima: "Development of One-stop Manufacturing System for Large-Sized φ300 mm Si Wafer"J. JSPE. 67-10(in Japanese). 1693-1697 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] L. Zhou, H. Eda, J. Shimizu, M. Nishimura and K. Sagawa: "One-stop Mirror Finishing System for Electronic, Magnetic and Optical Substrates"J. JSGE. 45-6(in Japanese). 304-309 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Sagawa, H. Eda, L. Zhou and J. Shimizu: "Grinding Simulation to Develop Processing Machine for φ300 Si Wafer"J. JSGE. 45-12(in Japanese). 574-579 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] L. Zhou, K. Shinohara, J. Shimizu and H. Eda: "Kinematics of Ultra Precision Grinding for Large Scale Si Wafer"J. JSPE. 68-1(in Japanese). 125-129 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Chouanine, J.Shimizu and L.Zhou: "Development of State-of-Art Devices on the Sub-nanometer Grinding Machine Tool for Optical Glasses"Proc. Int. Conf. ICOSN'99, Yokohama. 344-347 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, J.Shimizu and L.Zhou: "Study on Ultra-Precision Machining of Ceramics for Optical Components"Proc. Int. Conf. ICOSN'99, Yokohama. 420-423 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Chouanine, J.Shimizu and L. Zhou: "Development of System and Key-Components for Ductile Mode Grinding"Proc. Int. Conf. EUSPEN'99 Germany. 222-225 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, J.Shimizu and L.Zhou: "Computer Assisted Modeling and Simulation for Grinding Process"Proc. Int. Conf. EUSPEN'99 Germany. 226-229 (1999)

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      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, J.Shimizu, L.Zhou, Y.Takimoto and A.Muroya: "Giant Magnetostrictive Positioner for Single Diamond Turning of Silicon Substrate"Proc. Int. Conf. ICPE-9, Osaka. 187-192 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, T.Mori, L.Zhou, K.Kubota, and J.Shimizu: "Powder Metallurgic Giant Magnetostrictive Material and its Applications in Micro-actuator and Micro-senscrs"Proc. Int. Conf. Materials and Device Characterization in Micromachining II SPIE, USA. 114-123 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Zhou and J.Shimizu: "Development of Powder Metallurgic Giant Magnetostrictive Materials and Their Applications"Proc. Int. Conf. AMSMA2000, China. 117-120 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Nakano, M.Kosuge, H.Eda, L.Zhou, J.Shimizu and Y.Tomita: "Novel positioning system usinga giant magnetostriction actuator for ultra precision and high power applications"Proc. Int. Conf. ICEM 2000, Finland. 462-466 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] L.Zhou, H.Eda, K.Watanabe, H.Nakano, R.Kondo and J.Shimizu: "Development of One-Stop Machining System for 300mm Silicon Wafer"Proc. 15th ASPE Annual Meeting, USA. 140-143 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Eda, L.Zhou, J.Shimizu and T.Mori: "PM Technology in Giant Magnetostrictive Materials Manufacturing and Application Development"Proc. Int. Conf. PM2000, Kyoto. 1356-1359 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Sagawa, H. Eda, L. Zhou and J. Shimizu: "Simulation on High Integrity Surface Generation of φ300 Si Wafer with Fixed-abrasive Solution"Proc. Int. Conf. ICPE-10, Yokohama. 441-445 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J. Shimizu, H. Eda and L. Zhou: "Molecular Dynamics Simulation on Dependence of Atomic-Scale Stick-Slip Phenomenon upon Probe Tip Shape"Proc. Int. Conf. ICPE-10, Yokohama. 759-763 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J. Shimizu, L. Zhou and H. Eda: "Simulation Analysis of Contact Process in AFM Surface Observation"Proc. 2nd World Tribology Congress, WTC2001, Austria. M-12-22-157-SHIMIZU.pdf (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J. Shimizu, L. Zhou, A. Muroya and H. Eda: "Simulation and Experimental Analysis of Abrasive Wear in Ultra High-Speed Grinding"Proc. 2nd World Tribology Congress, WTC2001, Austria. M-14-04-156-SHIMIZU. Pdf (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Eda, L. Zhou, J. Shimizu and M. Ii: "Development of Newly Conceptualized High Water-Content Lubrication Coolant"Proc. 2nd World Tribology Congress, WTC2001, Austria. M-66-03-064-EDA. Pdf. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J. Shimizu, H. Eda and L. Zhou: "Molecular Dynamics Simulation of Solid Surface Image by Atomic Force Microscope"Proc. Int. Workshop TIWSS'2001, Tokyo. 70-74 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J. Shimizu, L. Zhou and H. Eda: "Molecular Dynamics Simulation of Superspeed Grinding of Ductile Material"Proc. Int. Workshop TIWSS'2001, Tokyo. 75-79 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S. Kawai, L. Zhou, J. Shimizu and H. Eda: "Research on CMG (Chemo-Mechanical Grinding)"Proc. Int. Conf. ISAAT2001, Korea (Advances in Abrasive Technology IV). 305-308 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Fukuda, L. Zhou, J. Shimizu and H. Eda: "Improvement of Insert Tool Performance with Electrical/Magnetic Treatment"Proc. Int. Conf. ISAAT2001, Korea (Advances in Abrasive Technology IV). 437-440 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J. Shimizu, H. Eda, L. Zhou, T. Asano and Y. Nakazawa: "Microscopic Analysis of Friction Phenomena in Surface Observation by Atomic Force Microscope"Proc. Int. Conf. ITC2000, Nagasaki. 687-692 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J. Shimizu, H. Eda, L. Zhou, A. Muroya and Y. Nakazawa: "Microscopic Analysis of Material Deformation in Ultra High-Speed Grinding Process"Proc. Int. Conf. ITC2000, Nagasaki. 769-774 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Eda, et. al.: "6th Edition, Metal Handbook"Maruzen Co.,Ltd.. 1182 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Eda and L. Zhou, et. al.: "Nano/Micromachine Technology Overview"Industrial Technology Development Center, Co.,Ltd. (To be published). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 周立波, 篠原一宏, 清水淳, 江田弘: "大口径シリコンウエハ研削加工における幾何と運動"精密工学会誌. 68・1. 73-77 (2002)

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      2001 Annual Research Report
  • [Publications] 佐川克雄, 江田弘, 周立波, 清水淳: "φ300siウエハ超加工機械創作用仕上げ面粗さシミュレーション"砥粒加工学会誌. 45・12. 574-579 (2001)

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      2001 Annual Research Report
  • [Publications] 江田弘, 周立波, 中野博民, 近藤良, 清水淳, 田島琢二: "大口径φ300siウエハ用超加工機械の開発"精密工学会誌. 67・10. 1693-1697 (2001)

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      2001 Annual Research Report
  • [Publications] 周立波, 江田弘, 清水淳, 西村雅也, 佐川克雄: "電子・磁気・光学基板の脆性-延性モードの統合仕上げ加工"砥粒加工学会誌. 45・6. 244-249 (2001)

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      2001 Annual Research Report
  • [Publications] H.Eda, L.Zhou, H.Nakano, R.Kondo.J.Shimizu: "Development of Single step Grinding System for Large Scale φ300 Si Wafer, -A Total Integrated Fixed-abrasive Solution -"CIRP Annals. 50・1. 225-228 (2001)

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      2001 Annual Research Report
  • [Publications] H.Eda, T.Mori, Y.Okada, L.Zhou, J.Shimizu: "POWDER METALLURGIC GIANT MAGNETOSTRICTION MATERIALS AND APPLICATION IN SPACE STRUCTURE"Int'l Journal for Manufacturing Science and Technology. 12・2. 127-133 (2001)

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      2001 Annual Research Report
  • [Publications] 江田弘, 周立波, 守屋光永, 川上辰男, 石川友彦, 山本佳男: "電子顕微鏡内マイクロファブリケーションデバイスの技術開発"精密工学会誌. 67・8. 52-56 (2001)

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      2001 Annual Research Report
  • [Publications] 江田 弘, 周 立波: "ナノ・マイクロマシン技術総覧(分担)"(株)産業技術サービスセンター(掲載待ち). (2002)

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      2001 Annual Research Report
  • [Publications] H.Eda,T.Mori,L.Zhou,J.Shimizu,H.Nakano,R.Kondo and K.Watanabe: "PM Technology in Giant magnetostrictive Materials Manufacturing and Application Development"Proceedings of 2000 Powder Metallurgy World Conference. +1-+4 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Jun Shimizu,Hiroshi Eda and Libo Zhou,T.Asano and Y.Nakazawa: "Microscopic Analysis of Friction Phenomena in Surface Observation by Atomic Force Microscope"Pro. of Synopses of Int'l Tribology Conference. 454 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Hiroshi Eda,Libo Zhou and Jun Shimizu: "Development of One-Stop Machining System for Φ300 Silicon Wafer"Proceedings of ASPE 2000 Annual Meeting. 140-143 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.li,H.Eda,T.Imai,M Nishimura,T.Kawasaki,J.Shimizu and L.Zhou: "Development of High Water-content Cutting Fluids with a New Concept,-Fire Prevention and Environmental Protection"Precision Engineering. 24・3. 231-236 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Nakano,M.Kosugi,H.Eda,L.Zhou,J.Shimizu and Y.Tomita: "Novel positioning system using a giant magnetostriction actuator for ultra precision and high power applications"Proceedings. of ICEM '2000. 462-466 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Hiroshi Eda Libo Zhou and Jun SHimizu: "Development of Powder Metallurgic Giant Magnetostrictive Materials and Their Applications"Proceedings of AMSMA '2000. 117-120 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Libo Zhou,Hiroshi Eda and Jun Shimizu: "Development of One-Stop Mirror Finishing System for Electronic, Magnetic and Optical Components"Proceedings of AMSMA '2000. 224-228 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Hiroshi Eda and Libo Zhou: "Giant Magnetostrictive Material, Encyclopedia of Smart Material"John Wiley & Sons Inc.(掲載待ち). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Eda,H.Hamada,Y.Tomita and Y.Yamamoto: "Study on Super-Fine Diamond Cluster with Application to Ultra-Precision Surface Generation"Journal of the Balkan Tribological Association. 5・2. 94-104 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Hiroshi Eda,L.Chouanine,Jun Shimizu and Libo Zhou: "Development of System and Key-Components for Ductile Mode Grinding"Proc.EUSPEN'99(GERMANY). 222-225 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Hiroshi Eda,Libo Zhou and Jun Shimizu: "Computer Assisted Modeling and Simulation for Grinding Process"Proc.EUSPEN'99(GERMANY). 226-229 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Hiroshi Eda,L.Chouanine,Jun Shimizu and Libo Zhou: "Development of State-of-Art Devices on the Sub-nanometer Grinding Machine Tool for Optical Glasses"Proc.ICOSN'99. 344-347 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Hiroshi Eda,Jun Shimizu and Libo Zhou: "Study on Ultra-Precision Machining of Ceramics for Optical Components"Proc.ICOSN'99. 420-423 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] Hiroshi Eda,Yoji Tomita,Teruo Mori,Yohji Okada,Jun Shimizu and Libo Zhou: "Research and Development of Smart Giant Magnetostriction Composite Materials Using Powder Metallurgic Technology and Their Applications to Advanced Devices"ICCM-12(FRANCE). 751 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] J.Shimizu,H.Eda,L.Zhou,Y.Takimoto and A.Muroya: "Giant Magnetostrictive Positioner for Single Diamond Turning of Silicon Substrate"Proc.ICPE-9(JAPAN). 187-192 (1998)

    • Related Report
      1999 Annual Research Report
  • [Publications] H.Eda,T.Mori,L.Zhou,K.Kubota,and J.Shimizu: "Powder Metallurgic Giant Magnetostrictive Material and its Applications in Micro-actuator and Micro-sensors"Proc.Materials and Device Characterization in Micromachining II,SPIE(USA). 114-123 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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