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レーザー・プラズマハイブリッドCVDによる高配向超電導膜の高速合成

Research Project

Project/Area Number 11F01375
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section外国
Research Field Inorganic materials/Physical properties
Research InstitutionTohoku University

Principal Investigator

後藤 孝  東北大学, 金属材料研究所, 教授

Co-Investigator(Kenkyū-buntansha) ZHAO Pei  東北大学, 金属材料研究所, 外国人特別研究員
ZHAO Pei  東北大学, 金属材料研究所, 外国人特別研究員
Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 2013: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2012: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2011: ¥400,000 (Direct Cost: ¥400,000)
KeywordsCVD / 高温超電導酸化物 / プラズマプロセス / 厚膜 / 電気伝導特性
Research Abstract

超電導機器の実用化に向けて、臨界電流密度の向上と超電導線材の作製コスト削減の両立が求められており、新しい超電導層の合成プロセスの開発が求められている。超電導体は、コイルや撚り線の形で使用することから、テープ状の線材として製造されるが、優れた超電導特性を得るためには、下地層および超電導層を、テープ基材上に結晶方位を揃えて成長させる必要がある。本研究では、高強度レーザーを援用した化学気相析出法を用いて、CeO_2下地層およびYBa_2Cu_3O_<7-δ>超電導層を合成する。本年度は、高い配向性を有する下地層および優れた超電導臨界電流密度を示す高温酸化物超電導体の合成プロセスを開発することを目的とした。
単結晶基板上にα軸に配向したCeO_2単結晶厚膜の合成に成功した。TEM観察においては、膜中に粒界は認められず、原子レベルで整合した界面を有していた。CeO_2単結晶厚膜は、高い透明性を示した。
さらに、原料供給系および原料の噴霧・気化器とレーザーCVDを組み合わせてYBa_2Cu_3O_<7-δ>沁膜を合成した。原料には、各金属のβ-ジケトン錯体をテトラヒドロフラン溶液に所定のモル比で混合したものを用いた。無脈動液体搬送ポンプを用いて加熱容器へ搬送して気化させることによって、精密に組成を制御した。本手法により合成したc軸配向YBa_2Cu_3O_<7-δ>膜は、実用レベルの高い超電導臨界電流密度2.7MA/cm^2を示した。TEM観察においては、膜中にらせん転位および積層欠陥の生成が認められた。これらの微細な欠陥構造は、超電導電流に対してピン止め効果を示すことで、臨界電流密度の向上に寄与したものである。

Strategy for Future Research Activity

(抄録なし)

Report

(3 results)
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (19 results)

All 2014 2013 2012 2011 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results) Presentation (8 results) (of which Invited: 4 results) Remarks (3 results)

  • [Journal Article] Effect of deposition temperature on the orientation and electrical properties of Y Ba_2Cu_3O_<7-δ> films prepared by laser CVD using liquid-source evaporation2014

    • Author(s)
      P. Zhao, A. Ito, T. Goto
    • Journal Title

      Ceramics International

      Volume: 40 Issue: 1 Pages: 2057-2061

    • DOI

      10.1016/j.ceramint.2013.07.118

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of (100) CeO_2 and (110) YBa_2Cu_3O_<7-δ>s films by laser chemical vapor deposition2014

    • Author(s)
      P. Zhao, A. Ito, T. Goto
    • Journal Title

      Ceramics International

      Volume: 40 Pages: 605-609

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Orientation control and electrical properties of YBa_2Cu_3O_<7-δ> deposited onto CeO_2 buffer films by laser chemical vapor deposition using liquid source precursors2014

    • Author(s)
      P. Zhao, A. Ito, T. Goto
    • Journal Title

      Thin Solid Films

      Volume: (掲載決定) Pages: 92-96

    • DOI

      10.1016/j.tsf.2014.05.040

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-J_c YBa_2Cu_3O_<7-δ> superconducting film grown by laser-assisted chemical vapor deposition using a single liquid source and its microstructure2013

    • Author(s)
      P. Zhao, A. Ito, T. Kato, D. Yokoe, T. Hirayama, T. Goto
    • Journal Title

      Superconductor Science and Technology

      Volume: 26 Issue: 9 Pages: 95016-95016

    • DOI

      10.1088/0953-2048/26/9/095016

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Laser chemical vapor deposition of single-crystalline transparent CeO_2 films2013

    • Author(s)
      P. Zhao, A. Ito, T. Goto
    • Journal Title

      Surface Coatings and Technology

      Volume: 235 Pages: 273-276

    • DOI

      10.1016/j.surfcoat.2013.07.048

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Rapid deposition of YBCO films by laser CVD and effect of lattice mismatch on their epitaxial growth and critical temperature2013

    • Author(s)
      P. Zhao, A. Ito, T. Goto
    • Journal Title

      Ceramics International

      Volume: Volume39(Issue7, September 2013) Issue: 7 Pages: 7491-7497

    • DOI

      10.1016/j.ceramint.2013.02.098

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-speed growth of YBa2Cu3O7-δ superconducting films on multilayer-coated Hastelloy C276 tape by laser-assisted MOCVD2013

    • Author(s)
      P. Zhao, A. Ito, T. Kato, D. Yokoe, T. Hirayama, T. Goto
    • Journal Title

      Superconductor Science and Technology

      Volume: 26 Issue: 5 Pages: 55020-55020

    • DOI

      10.1088/0953-2048/26/5/055020

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ternary Phase Relation on Preparation of YBa_2Cu_3O_<7-δ> Films by Laser CVD2011

    • Author(s)
      P.Zhao, A.Ito, R.Tu, T.Goto
    • Journal Title

      Key Engineering Materials

      Volume: 484 Pages: 183-187

    • DOI

      10.4028/www.scientific.net/kem.484.183

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Laser Chemical Vapor Deposition for High-J_c YBa_2Cu_3O_<7-δ> films2014

    • Author(s)
      A. Ito, P. Zhao, T. Goto
    • Organizer
      Electronic Materials and Applications 2014 (EMA2014)
    • Place of Presentation
      Orlando, USA
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Preparation of CeO2 and YBCO superconducting films by laser CVD2013

    • Author(s)
      Pei Zhao
    • Organizer
      Japan-Russia CVD Workshop
    • Place of Presentation
      東北大学金属材料研究所
    • Year and Date
      2013-03-09
    • Related Report
      2012 Annual Research Report
  • [Presentation] High-speed preparation of (100)-oriented CeO2 films on Hastelloy C276 tape by laser chemical vapor deposition using single liquid source2013

    • Author(s)
      Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto
    • Organizer
      第51回セラミックス基礎科学討論会
    • Place of Presentation
      仙台国際センター
    • Year and Date
      2013-01-09
    • Related Report
      2012 Annual Research Report
  • [Presentation] High-speed preparation of superconducting YBCO film by laser CVD2013

    • Author(s)
      T. Goto, P. Zhao, A. Ito
    • Organizer
      10th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 10)
    • Place of Presentation
      Coronado, USA
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] High-speed Deposition of Superconducting Film by Laser Chemical Vapor Deposition2013

    • Author(s)
      T. Goto, P. Zhao, A. Ito
    • Organizer
      9th World Congress of Chemical Engineering Incorporating 15th Asian Pacific Confederation of Chemical Engineering Congress (WCCE)& APCChE 2013)
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] High-speed Deposition of Superconductor Film on a Metal Tape by Laser Chemical Vapor Deposition2013

    • Author(s)
      T. Goto, P. Zhao, A. Ito
    • Organizer
      Materials Science & Technology 2013 (MS & T13)
    • Place of Presentation
      Quebec, Canada
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Preparation of c-axis-oriented YBa_2Cu_3O_<7-δ> films by laser chemical vapor deposition using single liquid source2012

    • Author(s)
      P.Zhao, A.Ito, R.Tu, T.Goto
    • Organizer
      日本セラミックス協会2012年年会
    • Place of Presentation
      京都大学
    • Year and Date
      2012-03-19
    • Related Report
      2011 Annual Research Report
  • [Presentation] Preparation of c-axis-oriented YBa_2Cu_3O_<7-δ> film on Hastelloy C276 tape by laser chemical vapor deposition using a liquid source2011

    • Author(s)
      P.Zhao, A.Ito, R.Tu, T.Goto
    • Organizer
      The 4^<th> International Symposium on Functional Materials (ISFM2011)
    • Place of Presentation
      東北大学
    • Year and Date
      2011-08-05
    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.rpip.tohoku.ac.jp/seeds/profile/175/

    • Related Report
      2013 Annual Research Report
  • [Remarks]

    • URL

      http://www.rpip.tohoku.ac.jp/seeds/profile/175/

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.rpip.tohoku.ac.jp/seeds/profile/175/

    • Related Report
      2011 Annual Research Report

URL: 

Published: 2011-12-22   Modified: 2024-03-26  

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