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SOI基板上温度無依存波長多重光回路に関する研究

Research Project

Project/Area Number 11J08863
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section国内
Research Field Electron device/Electronic equipment
Research InstitutionTokyo Institute of Technology

Principal Investigator

渥美 裕樹  東京工業大学, 大学院理工学研究科(工学系), 特別研究員(DC1)

Project Period (FY) 2011 – 2013
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 2013: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2012: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2011: ¥700,000 (Direct Cost: ¥700,000)
Keywords温度無依存波長フィルタ / シリコンフォトニクス / ベンゾシクロブテン(BCB) / 環境耐性 / 波長トリミング / スロット導波路
Research Abstract

本年度は、デバイスのシステム応用に向けて重要な課題である環境耐性に関する評価、向上技術の開拓を行った。本研究で用いているポリマー材料であるベンゾシクロプテン(BCB)は、大気中の水分を吸収し屈折率が変化することが知られている。一般的にWDM通信においてはフィルタ波長を固定にする必要があり、吸湿性は大きな課題となる。今回、恒温恒湿器下での劣化試験を行った。また、吸湿保護技術としてフッ化樹脂であるCYTOP(旭硝子製)を検討した。CYTOP (CTL-809A)は、プラスチック光ファイバ材料として用いられるなど光学材料として実績があり、BCBの吸湿率0.2%以下と比較して、0.01%以下と防湿性に優れている。恒温恒湿下試験では温度30℃、湿度80%の恒温恒湿器内に投入し、吸湿による波長シフト時間依存性を評価した。その結果、いずれの構造においても吸湿による長波長シフトが観測されたが、BCBは150時間以降も波長シフトし続けるのに対し、CYTOPではおよそ0.15nm程度の波長シフトで飽和する結果が得られ、BCB埋め込み比べて波長シフト量は約1/4に改善した。また、昨年度確立した紫外線照射による波長トリミング技術に関しても、BCB上CYTOPの二重構造にする事で適用可能である事が分かった。さらに本年度は課題最終年度として、これまでの温度無依存波長フィルタに関わる技術を集積し、2重リング構造を用いた4波長の温度無依存WDMフィルタの試作を行った。波長トリミング前では共振波長のずれにより、波長フィルタ特性が得られなかったが、各リング共振器に所望量の照射を行う事で、各チャネルの切り分けを実現した。以上の成果をもちまして、WDM通信用温度無依存波長フィルタの実現に必要な要素技術の開発、それらを融合したデバイス開発一連のプロセスを確立し、本成果は工学上ならびに工業上、社会に大きく貢献するものと考えている。

Strategy for Future Research Activity

(抄録なし)

Report

(3 results)
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (17 results)

All 2014 2013 2012 2011

All Journal Article (8 results) (of which Peer Reviewed: 8 results) Presentation (9 results)

  • [Journal Article] Arnorphous-Silicon Inter-Layer Grating Couplers with Metal Mirrors toward 3D Interconnection2014

    • Author(s)
      J. Kang, Y. Atsumi, Y. Hayashi, J. Suzuki, Y. Kuno, T. Amemiya, N. Nishiyama, S. Arai
    • Journal Title

      Journal of Selected Topics in Quantum Electronics

      Volume: 20(印刷中) Issue: 4 Pages: 1-6

    • DOI

      10.1109/jstqe.2014.2300058

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 50 Gbps data transmission through amorphous silicon interlayer grating couplers2014

    • Author(s)
      J. Kang, Y. Atsumi, YHayashi, J. Suzuki, Y. Kuno, T. Amemiya, N. Nishiyama, S. Arai
    • Journal Title

      Applied Physics Express

      Volume: 7 Issue: 3 Pages: 032202-032202

    • DOI

      10.7567/apex.7.032202

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low Threshold Current Density Operation of a GaInAsP/Si Hybrid Laser Prepared by Low-Temperature N_2 Plasma Activated Bonding2013

    • Author(s)
      Y. Hayashi, R. Osabe, K. Fukuda, Y. Atsumi, J. Kang, N. Nishiyama, S, Arai
    • Journal Title

      Jpn. J. appl. Phys.

      Volume: 52 Issue: 6R Pages: 060202-060202

    • DOI

      10.7567/jjap.52.060202

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simultaneous retrieval of fluidic refractive index and surface adsorbed molecular film thickness using silicon wire waveguide biosensors2012

    • Author(s)
      Y. Atsumi. D.-X.Xu, A. Delage, J. H. Schmid, M. Vachon, P. Cheben, S. Janz, N. Nishiyama, S. Arai
    • Journal Title

      Optics Express

      Volume: Vol. 20 Issue: 24 Pages: 26969-26977

    • DOI

      10.1364/oe.20.026969

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-loss GaInAsP wire waveguide on Si substrate with Benzocyclobutene adhesive wafer bonding for membrane photonic circuits2012

    • Author(s)
      J. Lee, Y. Maeda, Y Atsumi, Y. Takino, N. Nishiyama, S. Arai
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: Vol. 51 Issue: 4R Pages: 042201-042201

    • DOI

      10.1143/jjap.51.042201

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Layer-to-Layer Grating Coupler Based on Hydrogenated Amorphous Silicon for Three-Dimensional Optical Circuits2012

    • Author(s)
      J. H. Rang, Y. Atsumi, M. Oda, T. Amemiya, N. Nishiyama, S. Arai
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 51 Issue: 12R Pages: 120203-120203

    • DOI

      10.1143/jjap.51.120203

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Athermal Wavelength Filters toward Optical Interconnection to LSIs2012

    • Author(s)
      Y.Atsumi, M.Oda, J.H.Kang, N.Nishiyama, S.Arai
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E95-C Issue: 2 Pages: 229-236

    • DOI

      10.1587/transele.E95.C.229

    • NAID

      10030609915

    • ISSN
      0916-8524, 1745-1353
    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-loss Amorphous Silicon Multilayer Waveguides Vertically Stacked on Silicon-on-Insulator Substrate2011

    • Author(s)
      J.H.Kang, Y.Atsumi, M.Oda, T.Amemiya, N.Nishiyama, S.Arai
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: Vol.50 Issue: 12R Pages: 120208-120208

    • DOI

      10.1143/jjap.50.120208

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Minituarization of Exposure Area for Electron Beam Lithography using Proximity Effect Correction toward Si Optical Circuits2013

    • Author(s)
      Y. Atsumi, N. Taksatorn, Y. Miyamoto, N. Nishiyama, S. Arai
    • Organizer
      The 26th Conf. on Microprocesses and Nanotechnology (MNC 2013)
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2013-11-06
    • Related Report
      2013 Annual Research Report
  • [Presentation] Evaluation of Humidity Protection for Athermal Si-slot Wavelength Flters Embedded with Polymer2013

    • Author(s)
      Y. Atsumi, J. Kang, Y. Hayashi, J. Suzuki, N. Nishiyarna, S Arai
    • Organizer
      IEICE Soiety Conf. 2013
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2013-09-17
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ultraviolet-induced Wavelength Trimming of BCB-buried Athermal Si Slot Wavelength Filters2013

    • Author(s)
      Y. Atsumi, T. Sifer, J. Kang, Y. Hayashi, N. Nishiyama, S, Arai
    • Organizer
      The 10th Conf. on Lasers and Electro-Optics Pacific Rim (CLEO-PR 2013)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2013-07-03
    • Related Report
      2013 Annual Research Report
  • [Presentation] Wavelength Trimming of Athermal Si Slot Wavelength Filters using Deep-ultraviolet Exposure2012

    • Author(s)
      Y. Atsumi, T. Sifer, J. Kang, N. Nishiyama, S. Arai
    • Organizer
      OSA Integrated Photonics Research (IPR-2012)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2012-12-04
    • Related Report
      2012 Annual Research Report
  • [Presentation] Differentiation between Changes in Liquid Refractive Index and Surface Adsorbed Molecular Thickness using SOI Wire Waveguide Ring Resonator Biosensor Arrays2012

    • Author(s)
      Y. Atsumi, D-X. Xu, A. Delage, J. Schmid, M. Vachon, P. Cheben, S. Janz, N. Nishiyama, S. Arai
    • Organizer
      OSA Integrated Photonics Research (IPR-2012)
    • Place of Presentation
      Colorado Springs, USA
    • Year and Date
      2012-06-18
    • Related Report
      2012 Annual Research Report
  • [Presentation] ブロッホ波干渉型低損失連結クロス導波路の作製評価2012

    • Author(s)
      渥美裕樹
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-18
    • Related Report
      2011 Annual Research Report
  • [Presentation] Athermal Wavelength Filters toward Photonic Integrated Circuits2011

    • Author(s)
      Y.Atsumi
    • Organizer
      The 1st International Symposium on Photonics and Electronics Convergence, ISPEC2011
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2011-11-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] Wide-Gap Athermal Si-Slot Mach-Zhender Interferometer Embedded with Benzocyclobutene2011

    • Author(s)
      Y.Atsumi
    • Organizer
      The 8th Int.Conf, on Group IV Photonics
    • Place of Presentation
      London, UK
    • Year and Date
      2011-09-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] 幅広ギャップ構造を有する温度無依存BCB埋め込みSiスロット型リング共振器2011

    • Author(s)
      渥美裕樹
    • Organizer
      第72回秋季応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-09-02
    • Related Report
      2011 Annual Research Report

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Published: 2011-12-12   Modified: 2024-03-26  

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