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超高分解能走査型非線形誘電率顕微鏡法を用いた強誘電体中のドメイン構造の解析

Research Project

Project/Area Number 12134201
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionTohoku University

Principal Investigator

長 康雄  東北大学, 電気通信研究所, 教授 (40179966)

Co-Investigator(Kenkyū-buntansha) 小田川 裕之  東北大学, 電気通信研究所, 助手 (00250845)
Project Period (FY) 2000 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥29,000,000 (Direct Cost: ¥29,000,000)
Fiscal Year 2003: ¥9,800,000 (Direct Cost: ¥9,800,000)
Fiscal Year 2002: ¥9,900,000 (Direct Cost: ¥9,900,000)
Fiscal Year 2001: ¥9,300,000 (Direct Cost: ¥9,300,000)
Keywords走査型非線形誘電率顕微鏡 / 強誘電体 / ドメイン / 走査プローブ顕微鏡 / 原子分解能 / 温度可変型SNDM / 超高密度強誘電体記録 / 高次非線形誘電率顕微法 / サブナノスケール分解能
Research Abstract

前年度,ナノ分極ドットの高速反転特性および分極反転のリアルタイム計測によるAnti-Parallel分極反転現象を報告したが,そのいずれも厚い試料に対して平行平板電極を用いて行われた従来の報告とは矛盾するものであった.そこで今回薄片化した一致溶融組成LiTaO_3(CLT)を試料に用い,その分極反転特性の電界及び膜厚依存性を調べ,CLTにおいてもナノセカンドの分極反転が可能である裏付けを得た.またリアルタイム計測法を用いて分極反転現象をより詳細に調べ,分極反転する領域が通常の円形ではなく,ある条件が揃うとリング状になる場合があることを見出した.
次に高次走査型非線形誘電率顕微鏡法用い強誘電体表面に吸着している水の層の変化及び表面常誘電層を観測した.即ち,吸着層である水のSNDM信号への影響を明らかにするため,真空中で試料の温度を変化し測定することが出来る「温度制御型走査型非線形誘電率顕微鏡」を用い,実験及び有限要素法による計算によって水の存在を検証した.
また,強誘電体記録用大面積薄膜媒体として,PbTiO_3薄膜を水熱合成法により作製し単結晶に近い膜を得,そこに半径9.8nmのナノドメインドットを形成することに成功した.
最後にLiTaO_3単結晶媒体においても大面積記録媒体を作製した.即ち,従来の試料作製法では,実用上十分な面積を有する記録媒体を作製することは困難であった.そこで今回新たに,分極制御ウェットエッチング(polarization controlled wet etching ; PCWE)法によって大面積記録媒体を作製するプロセスを開発しこれを用いた実記録のビット誤り率を計測した.

Report

(4 results)
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (36 results)

All Other

All Publications (36 results)

  • [Publications] Y.Cho: "Terabit inch^<-2> ferroelectric data storage using scanning nonlinear dielectric microscopy nanodomain engineering system"Nanotechnology. 14. 637-642 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Matsuura: "Observation of domain walls in PbZr_<0.2>Ti_<0.8>O_3 thin film using scanning nonlinear dielectric microscopy"Appl.Phys.Lett. 83・13. 2650-2652 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Odagawa: "Three Dimensional Polarization Direction Measurement Using Scanning Nonlinear Dielectric Microscopy with Rotating Electric Field"Journal of Korean Physical Society. 42. S1169-S1173 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takeshi Morita: "Observation of Antiparallel Polarization Reversal Using a Scanning Nonlinear Dielectric Microscope"Jpn.J.Appl.Phys. 42・9B. 6214-6217 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Yoshiomi Hiranaga: "Ultrahigh-Density Ferroelectric Data Storage Using Scanning Nonlinear Dielectric Microscopy"Jpn.J.Appl.Phys. 42・9B. 6050-6054 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Yasuo Cho: "Scanning Nonlinear Dielectric Microscopy :"Overview -A High Resolution Tool for Observing Ferroelectric Domains and Nano-domain Engineering-"Journal of the Korean Ceramic Society. 40・11. 1047-1057 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Kenjiro Fujimoto: "High-speed switching of nanoscale ferroelectric domains in congruent single-crystal LiTaO_3"Appl.Phys.Lett.. 83・25. 5265-5267 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takeshi Morita: "Polarization reversal anti-parallel to the applied electric field observed using a scanning nonlinear dielectric microscopy"Appl.Phys.Lett.. 84・2. 257-259 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] YASUO CHO: "Advances in IMAGING and ELECTRON PHYSICS, Volume 127"Academic Press. 407 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 長 康雄: "ナノテクノロジー大事典"工業調査会. 989 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 長 康雄: "強誘電体メモリーの新展開"シーエムシー出版. 134 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Matsuura: "Observation of ferroelectric nano-domains using scanning nonlinear dielectric imaging and piezoresponse imaging"Applied Surface Science. 188. 421-424 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Koya Ohara: "Quantitative measurement of linear dielectric constant using scanning nonlinear dielectric microscopy with electro-conductive cantilever"Jpn.J.Appl.Phys.. 41-7B. 4961-4964 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Hiroyuki Odagawa: "Nanoscale measurement techniques of three-dimensional ferroelectric polarization using scanning nonlinear dielectric microscopy"Ferroelectrics. 268. 149-154 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yasuo Cho: "Study on the periodically poled LiNbO_3 for high performance QPM devices using scanning nonlinear dielectric microscopy"Ferroelectrics. 273. 223-228 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yasuo Cho: "Study on surface layer formed on LiNbO3 single crystal using higher order nonlinear dielectric microscopy"Ferroelectrics. 269. 207-212 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Noriaki Okazaki: "Development of scanning microwave microscope with high-throughput characterization of combinatorial dielectric materials"Applied Surface Science. 189. 222-226 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yasuo Cho: "Tbit/inch^2 Ferroelectric Data Storage Based on Scanning Nonlinear Dielectric Microscopy"Appl.Phys.Lett.. 81・23. 4401-4403 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Koya Ohara: "Quantitative Measurement of Dielectric Properties Using Scanning Nonlinear Dielectric Microscopy with Electo-conductive Cantilever"Integrated Ferroelectrics. 50. 209-217 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yoshiomi Hiranaga: "NANO-SIZED INVERTED DOMAIN FORMATION IN STOICHIOMETRIC LiTaO3 SINGLE CRYSTAL USING SCANNING NONLINEAR DIELECTRIC MICROSCOPY"Integrated Ferroelectrics. 49. 203-209 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yasuo Cho: "Scanning Nonlinear Dielectric Microscopy -A high resolution tool for observing ferroelectric domains and nano-domain engineering -"Integrated Ferroelectrics. 50. 189-198 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Kazuya Terabe: "Microscale to nanoscale ferroelectric domain and surface engineering of a near-stoichiometric LiNbO_3 crystal"Appl.Phys.Lett.. 82・3. 433-435 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 長 康雄: "非線形誘電率顕微鏡を用いたドメイン構造観察"機能材料. 22・12. 12-17 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 長 康雄: "走査型非線形誘電率顕微鏡による強誘電ドメインの観測"まてりあ. 41・12. 852-853 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Matsuura: "Measurement of the Ferroelectric Domain Distributions Using Nonlinear Dielectric Response and Piezoelectric Response"Jpn. J. Appl. Phys.. 40・5B. 3534-3537 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 長 康雄: "超高分解能走査型非線形誘電率顕微鏡"応用物理. 71-1. 62-65 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Cho: "New Functions of Scanning Nonlinear Dielectric Microscopy ~Higher-Order Measurement and Vertical Resolution~"Jpn. J. Appl. Phys.. 40・5B. 3544-3548 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Cho: "Scanning nonlinear dielectric microscopy study on periodically poled LiNbO3 for high-performance quasi-phase matching devices"Appl. Phys. Lett.. 79・18. 2955-2957 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Cho: "Higher Order Nonlinear Dielectric Microscopy"Appl. Phys. Lett.. 79・23. 3842-3844 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Odagawa: "Measuring of ferroelectoric polarization component parallel to the surface by scanning nonlinear dielectric microscopy"Appl. Phys. Lett.. (in press). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Yasuo Cho: "New Functions of Scanning Nonlinear Dielectric Microscopy"Japanese Journal of Applied Physics. Vol.40,No.5B(in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Yasuo Cho: "Scanning Nonlinear Dielectric Microscopy for Investigation of nano-sized Ferroelectric Domains and Local Crystal Anisotropy"Ferroelectrics. (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Yasuo Cho: "Scanning Nonlinear Dielectric Microscopy with Nanometer Resolution"Journal of the European Ceramic Scociety. (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Cho: "Theory of Scanning Nonlinear Dielectric Microscopy and Application to Quantitative Evaluation"Journal of the European Ceramic Scociety. (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Odagawa: "Theoretical and Experimental study on Nanoscale ferroelectric Domain Measurement Using Scanning Nonlinear Dielectric Microscopy"Japanese Journal of Applied Physics. Vol.39 No.9B. 5719-5722 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Odagawa: "Simultaneous Observation of Nano-Sized Ferroelectric Domains and Surface Morphology Using Scanning Nonlinear Dielectric Microscopy"Surface Science. Vol.463. L621-L625 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2001-04-01   Modified: 2018-03-28  

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