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High Brightness Electron Source Array and Its Development to Vacuum Microelectronics (Summary)

Research Project

Project/Area Number 12135101
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionOsaka University

Principal Investigator

TAKAI Mikio  Osaka University, Research Center for Materials Science at Extreme Conditions, Professor, 極限科学研究センター, 教授 (90142306)

Co-Investigator(Kenkyū-buntansha) ADACHI Hiroshi  Muroran Institute of Technology, Department of Electrical, Electronic Engineering, Professor, 工学部, 教授 (80005446)
YAMAMOTO Shigehiko  University of Tsukuba, Institute of Applied Physics, Professor, 物理工学系, 教授 (60251039)
ISHIKAWA Junzo  Kyoto University, Department of Electronic Science and Engineering, Professor, 工学研究科, 教授 (80026278)
MIMURA Hidenori  Shizuoka University, Research Institute of Electronics, Professor, 電子工学研究所, 教授 (90144055)
梶原 和夫  ソニー, テクニカルサポートセンター, 主幹研究員
Project Period (FY) 2000 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥5,600,000 (Direct Cost: ¥5,600,000)
Fiscal Year 2003: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 2002: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 2001: ¥1,600,000 (Direct Cost: ¥1,600,000)
KeywordsVacuum microelectronics / Laser Cleaning / Transition metal nitride and carbide cathodes / Nano-sized electron source / Field emitter array / Electron emission / Low energy spread / Field emission / 電界放出電子源 / 電子源の高輝度化 / 電子源の安定化 / FED / ディスプレイ / 陰極材料
Research Abstract

1)As new cathode materials for field emitter arrays, transition metal nitride (HfN, TaN, NbN) and carbide (HfC, WC, VC, ZrC, CrC) have been investigated, in which NbN was found to be the most stable cathode material among investigated materials.
2)Nanometer-sized field emitters could be fabricated using focused ion and electron beams (dual beams) in a same chamber by introducing metal-organic reaction gas species. A nano-gapped split emitter has been fabricated using beam induced processes for possible electron beam interference measurement.
3)UV (ultra-violet) laser irradiation over Si or Spindt-type field emitter arrays was found to improve the electron emission behavior, where laser photons desorb the water components adsorbed in the air. UV laser treatment of carbon nanotube (CNT) cathodes was found to increase the electron emission by 4 orders of magnitude. The field emission from CNT cathodes was found to stable even at a vacuum of 10^<-4> Pa.
4)Through the precise investigation of … More local work function and surface modification by molecular beams, surface reaction controls via work functions were found possible.
5)The stability and emission percentage of Spindt-type field emitters were investigated using a field emission microscope. The percentage of active micro tips were found to be increased up to 90% by a gas ambient emission.
6)The energy spread of field emitted electrons has been investigated. Resonant tunneling emitters using GaAs/AlAs quantum structures have been fabricated. The energy spreads of 0.4 and 0.8 eV were obtained for n-and -type Si, respectively.
7)An emission current of more than 1 mA could be obtained for a single crystalline Si lateral emitter with a nano gap.
8)Single and poly-crystalline diamonds were fabricated on Si emitters for high brightness field emitters. A coating of thin poly crystalline diamond film on Si emitter was found to improve the emission behavior, while a single crystalline diamond coating resulted in poor electron emission.
9)Electron emission due to a GaAs Gunn effect for micro-and milli-meter wavelength application was observed. Smith-Purcell radiation in a visible-to-near infrared wavelength was observed for the low energy field emitted electron beam passing close to a grating. A miniature sized pulsed X-ray source was fabricated and a time-resolved X-ray radiography with a time resolution of 10 us was demonstrated. Less

Report

(5 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (113 results)

All Other

All Publications (113 results)

  • [Publications] A.Seidl: "Accuracy Problems in Simulation of Field Emitter Devices Using Finite Elements"J.Computational Physics. 166. 159-164 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Ochiai: "Wedge Emitter Fabrication Using Focused Ion Beam"J.Vac.Sci.Technl.. B19,No.3. 904-906 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Ochiai: "Fabrication Process of Field Emitter Arrays Using Focused Ion and Electron Beam Induced Reaction"J.Vac.Sci.Technl.. B19,No.3. 933-935 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Sawada: "Emission Site Control in Carbon Nanotube Filed Emitters by Focused Ion and Laser Beam Irradiation"J.Vac.Sci.Technol.. B21. 362-365 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] W.Jarupoonphol: "Prototyping of Field emitter Array Using Focused Ion and Electron Beams"Jpn.J.Appl.Phys.. 41. 4311-4313 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] W.Zhao: "Field Emission Characteristics of Screen-Printed Carbon Nanotube After Laser Irradiation"Jpn.J.Appl.Phys.. 41. 4314-4316 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Takai: "Processing of Vacuum Microelectronic Devices by Focused Ion Beam"Appl.Phys.. A76. 1007-1012 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] W.Jarupoonphol: "Optimization of Pt Tip Field Emitter Array Fabricated Using Focused Ion and Electron Beams"J.Vac.Sci.Technol.. B21. 1598-1601 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Relationships among physical parameters required to give a linear relation between intercept and slope of Fowler-Nordheim plot"Ultramicroscopy. 89(1-3). 63-67 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Relationship between work function and noise power of field emitters Use of S-K chart for evaluation of work function"Journal of Vacuum Science and Technology B. 19(3). 992-994 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Fabrication of gated niobium nitride field emitter array"Journal of Vacuum Science and Technology. 19(4). 1373-1376 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Ion beam assisted deposition of tantalum nitride thin films for vacuum microelectronics devices"Surface and Coatings Technology. 158-159C. 728-730 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "In situ analyzer of field electron emission properties : Fowler-Nordheim plotter and Seppen-Katamuki plotter"Journal of Vacuum Science and Technology B. 21(4). 1524-1527 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Measurement of work function of transition metal nitride and carbide thin films"Journal of Vacuum Science and Technology B. 21(4). 1607-1611 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Formation and control of stoichiometric hafnium nitride thin films by direct sputtering of hafnium nitride target"Japanese Journal of Applied Physics Part 2. 42(7A). L778-L780 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Y.Liao: "Field electron emission from nanostructured heterogeneous HfNxOy films"Applied Physics Letters. 83(8). 1626-1628 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Sasaki, Y.Yamada, Y.Ogiwara, S.Yagyu, S.Yamamoto: "Moire-like contrast in the local tunneling barrier height image of monolayer graphite on Pt(111)"Phys.Rev.B. 61. 15653-15656 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Ozeki, J.Itoh, S.Yamamoto: "Visualizing the interrelation between surface topograph and surface potential by means of a scanning Maxwell stress microscope"Jpn.J.Appl.Phys.. 39. 5261-5262 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Yagyu, T.Hiraoka, Y.Kino, S.Yamamoto: "Time of flight analysis on direct inelastic collision processes of CH_4 molecules at a Pt(111) surface"Appl.Surf.Sci.. 165. 217-223 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Yamada, Y.Motoyama, Y.Ikarashi, M.Sasaki, J.Itoh, S.Yamamoto: "Ion irradiation effect on the microscopic potential distribution of MgO surface"Jpn.J.Appl.Phys.. 39. 6000-6003 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Yagyu, Y.Kino, T.Hiraoka, M.Sasaki, S.Yamamoto.: "Molecular beam studies on inelastic collision processes of methane molecules at a Pt(111) surface"Appl.Surf.Sci. 169/170. 122-126 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Tomii, T.Kondo, S.Yagyu, S.Yamamoto: "Speed distribution of C_2H_6 molecular beam scattered through chattering collision on a LiF(001)surface"J.Vac.Sci.Technol.. A19. 675-680 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Nakane, H.Adachi: "Study on local stability of field emitter arrays by using an emission microscope"Journal of Vacuum Science and Technology. Vol.B18(2). 1003-1005 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Saitho, H.Nakane, H.Adachi: "Field electron emission from W covered with In"Journal of Vacuum Science and Technology. vol.B18(2). 1093-1096 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Nakane, H.Adachi: "Emission stability of FEA microtips"Journal of SID. Vol.8. 237-240 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Kawata, H.Nakane, H.Adachi: "Study on the atomic configuration for low-energy electron diffraction analysis on ZrO/W(100)."Journal of Vacuum Science and Technology. Vol.B19(1). 55-56 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Miyamoto, H.Nakane, H.Adachi: "Emission Stability of a FEA Observed by an Emission Microscope"Journal of Vacuum Science and Technology. Vol.B21(1). 436-439 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Nakane, J.P.Dupin, Vu Thien Binh: "Emission Characteristics of Ultra-thin Layer Solid-state Emitters, Temperature and Thickness"Journal of Vacuum Science and Technology. Vol.B21・no.4. 1616-1617 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] V.Ichizli et al.: "Field emission from porous (100) GaP with modified morphology"App.Phys.Lett.. 79. 4016-4019 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Ishizuka et al.: "Laser-assisted electron emission from gated field-emitters"Nuclear Instr.Meth.Phys.Resear.A. 483. 305-309 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Shimawaki et al.: "A monolithic field emitter array with a junction field effect transistor"IEEE Trans.Electron Devices. 49. 1665-1668 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] P.Minh et al.: "Carbon nanotube on a Si tip for electron field emitter"Jpn.J.Appl.Phys.. 41. L1409-L1411 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Mimura et al.: "Emission characteristics of a GaAs wedge emitter monolithically fabricated with an air bridge and a cantilever anode"J.Vac.Sci.Tech.B. 21. 471-473 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Matsumoto et al.: "Point x-ray source using graphite nanofibers and its application to x-ray radiography"Appl.Phys.Lett.. 82. 1637-1639 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Mimura et al.: "Growth of a sub-micron single diamond particle on a Si tip and its field emission characteristic"Jpn.J.Appl.Phys.. 42. 4048-4050 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Hasegawa et al.: "Fabrication of a GaAs emitter with a high aspect ratio for generation of prebunched electron beam using Gunn effect"Jpn.J.Appl.Phys.. 42. 4051-4053 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Mimura et al.: "Electron emission from porous silicon planar emitters"J.Vac.Sci.Tech.B. 21. 1612-1615 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Shimawaki et al.: "Submicron poly-Si gate Si field-emitter array for generation of a collimated electron beam"J.Vac.Sci.Tech.B. 21. 1594-1597 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Seidl, M.Takai: "Accuracy Problems in Simulation of Field Emitter Devices Using Finite Elements"J. Computational Physics. 166. 159-164 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Ochiai, A.Sawada, H.Noriyasu, M.Takai, A.Hosono, S.Okuda: "Wedge Emitter Fabrication Using Focused Ion Beam"J. Vac. Sci. Technol.. B19, No.3. 904-906 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Ochiai, O.Yavas, M.Takai, A.Hosono, S.Okuda: "Fabrication Process of Field Emitter Arrays Using Focused Ion and Electron Beam Induced Reaction"J. Vac. Sci. Techno.. B19, No.3. 933-935 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Sawada, M.Iriguchi, W.J.Zhao, C.Ochiai, M.Takai: "Emission Site Control in Carbon Nanotube Filed Emitters by Focused Ion and Laser Beam Irradiation"J. Vac. Sci. Technol.. B21. 362-365 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] W.Jarupoonphol, C.Ochiai, M.Takai, A.Hosono, S.Okuda: "Prototyping of Field emitter Array Using Focused Ion and Electron Beams"Jpn. J. Appl. Phys.. 41. 4311-4313 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] W.Zhao, A.Sawada, M.Takai: "Field Emission Characteristics of Screen-Printed Carbon Nanotube After Laser Irradiation"Jpn. J. Appl. Phys.. 41. 4314-4316 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Takai: "Processing of Vacuum Microelectronic Devices by Focused Ion Beam"Appl. Phys.. A76. 1007-1012 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] W.Jarupoonphol, K.Murakami, K.Sakata, M.Takai, A.Hosono, S.Okuda: "Optimization of Pt Tip Field Emitter Array Fabricated Using Focused Ion and Electron Beams"J. Vac. Sci. Technol.. B21. 1598-1601 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Relationships among physical parameters required to give a linear relation between intercept and slope of Fowler-Nordheim plot"Ultramicroscopy. 89(1-3). 63-67 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Relationship between work function and noise power of field emitters : Use of S-K chart for evaluation of work function"J. Vac. Sci. Technol.. B19(3). 992-994 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Fabrication of gated niobium nitride field emitter array"J. Vac. Sci. Technol.. B19(4). 1373-1376 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Ion beam assisted deposition of tantalum nitride thin films for vacuum microelectronics devices"Surface and Coatings Technology. 158-159C. 728-730 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "In situ analyzer of field electron emission properties : Fowler-Nordheim plotter and Seppen-Katamuki plotter"J. Vac. Sci. Technol.. B21(4). 1524-1527 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Measurement of work function of transition metal nitride and carbide thin films"J. Vac. Sci. Technol.. B21(4). 1607-1611 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Gotoh: "Formation and control of stoichiometric hafnium nitride thin films by direct sputtering of hafnium nitride target"Japan. J. of Appl. Phys. Part 2. 42(7A). L778-L780 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Y.Liao, Y.Gotoh: "Field electron emission from nanostructured heterogeneous HfNxOy films"Appl. Phys, Lett.. 83(8). 1626-1628 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Sasaki, Y.Yamada, Y.Ogiwara, S.Yagyu, S.Yamamoto: "Moire-like contrast in the local tunneling barrier height image of monolayer graphite on Pt (111)"Phys. Rev.. B61. 15653-15656 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Ozeki, J.Itoh, S.Yamamoto: "Visualizing the interrelation between surface topograph and surface potential by means of a scanning Maxwell stress microscope"Jpn. J. Appl. Phys.. 39. 5261-526 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Yagyu, T.Hiraoka, Y.Kino, S.Yamamoto: "Time of flight analysis on direct inelastic collision processes of CH4 molecules at a Pt (111) surface"Appl. Surf. Sci.. 165. 217-223 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Yamada, Y.Motoyama, Y.Ikarashi, M.Sasaki, J.Itoh, S.Yamamoto: "Ion irradiation effect on the microscopic potential distribution of MgO surface"Jpn. J. Appl. Phys.. 39. 6000-6003 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Yagyu, Y.Kino, T.Hiraoka, M.Sasaki, S.Yamamoto: "Molecular beam studies on inelastic collision processes of methane molecules at a Pt (111) surface"Appl. Surf. Sci.. 169/170. 122-126 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Tomii, T.Kondo, S.Yagyu, S.Yamamoto: "Speed distribution of C_2H_6 molecular beam scattered through chattering collision on a LiF (001) surface"J. Vac. Sci. Technol.. A19. 675-680 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Nakane, H.Adachi: "Study on local stability of field emitter arrays by using an emission microscope"J. Vac. Sci. Technol.. B18(2). 1003-1005 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Saitho, H.Nakane, H.Adachi: "Field electron emission from W covered with In"J. Vac. Sci. Technol.. B188(2). 1093-1096 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Nakane, H.Adachi: "Emission stability of FEA microtips"J. of SID. Vol.8. 237-240 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Kawata, H.Nakane, H.Adachi: ""Study on the atomic configuration for low-energy electron diffraction analysis on ZrO/W (100)"J. Vac. Sci. Technol.. B19(1). 55-56 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Miyamoto, H.Nakane, H.Adachi: "Emission Stability of a FEA Observed by an Emission Microscope"J. Vac. Sci. Technol.. B21, no.1. 436-439 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Nakane, J.P.Dupin, Vu Thien Binh: "Emission Characteristics of Ultra-thin Layer Solid-state Emitters, Temperature and Thickness"J. Vac. Sci. Technol.. B21, no.4. 1616-1617 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] V.Ichizli: "Field emission from porous (100) GaP with modified morphology"App. Phys. Lett. 79. 4016-4019 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Ishizuka: "Laser-assisted electron emission from gated field-emitters"Nuclear Instr. Meth. Phys. Resear.. A483. 305-309 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Shimawaki: "A monolithic field emitter array with a junction field effect transistor"IEEE Trans. Electron Devices. 49. 1665-1668 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] P.Minh: "Carbon nanotube on a Si tip for electron field emitter"Jpn. J. Appl. Phys.. 41. L1409-L1411 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Mimura: "Emission characteristics of a GaAs wedge emitter monolithically fabricated with an air bridge and a cantilever anode"J. Vac. Sci. Tech.. B21. 471-473 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Matsumoto: "Point x-ray source using graphite nanofibers and its application to x-ray radiography"Appl. Phys. Lett.. 82. 1637-1639 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Mimura: "Growth of a sub-micron single diamond particle on a Si tip and its field emission characteristic"Jpn. J. Appl. Phys.. 42. 4048-4050 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Hasegawa: "Fabrication of a GaAs emitter with a high aspect ratio for generation of prebunched electron beam using Gunn effect"Jpn. J. Appl. Phys.. 42. 4051-4053 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Mimura: "Electron emission from porous silicon planar Emitters"J. Vac. Sci. Tech.. B21. 1612-1615 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Shimawaki: "Submicron poly-Si gate Si field-emitter array for generation of a collimated electron beeam"J. Vac. Sci. Tech.. B21. 1594-1597 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Kanazawa: "Wavelength Dependence of UV Laser Cleaning for Silicon Field Emitter Arrays"Jpn.J.Appl.Phys.. 42,No.6B. 4041-4043 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Murakami: "Fabrication of Nano Electron Source Using Beam Assisted Process"Jpn.J.Appl.Phys.. 42,No.6B. 4037-4040 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Gotoh: "Measurement of work function of transition metal nitride and carbide thin films"J.Vac.Sci.Technol.. B21. 1607-1611 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Gotoh: "Formation and control of stoichiometric hafnium nitride thin films by direct sputtering of hafnium nitride target"Jpn.J.Appl.Phys.. 42. L778-L780 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] N.Miyamoto: "Emission Stability of a FEA Observed by an Emission Microscope"J.Vac.Sci.Technol.. B21. 436-439 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Nakane: "Emission Characteristics of Ultra-thin Layer Solid-state Emitters, Temperature and Thickness"J.Vac.Sci.Technol.. B21. 1616-1617 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Mimura: "Growth of a sub-micron single diamond particle on a Si tip and its field emission characteristic"Jpn.J.Appl.Phys.. 42. 4048-4050 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Matsumoto: "Point x-ray source using graphite nanofibers and its application to x-ray radiography"Appl.Phys.Lett.. 82. 1637-1639 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Kondo: "Molecular beam study of CH4 oxidation on a Pt(111)-(2x2)-O surface"J.Chem.Phys.. 118. 760-767 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] A.Sinsarp: "Microscopic study of the work function reduction induced by Cs-adsorption"Jpn.J.Appl.Phys.. 42. 4882-4886 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] A.Sawada: "Emission Site Control in Carbon Nanotube Filed Emitters by Focused Ion and Laser Beam Irradiation"J. Vac. Sci. Technol.. B21. 362-365 (2002)

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      2002 Annual Research Report
  • [Publications] W.Jarupoonphol: "Prototyping of Field Emitter Array Using Focused Ion and Electron Beams"Jpn. J. Appl. Phys.. 41. 4311-4313 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] W.Zhao: "Field Emission Characteristics of Screen-Printed Carbon Nanotube After Laser Irradiation"Jpn. J. Appl. Phys.. 41. 4314-4316 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Gotoh: "Ion Beam Assisted Deposition of Tantalum Nitride Thin Films for Vacuum Microelectronics Devices"Surface and Coatings Technology. 158-159C. 728-730 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Gotoh: "Preparation and Evaluation of Transition Metal Nitride and Carbide Thin Films for Field Emission Cathode"IDW'02, FED4-6, December 4-6, 2002, Hiroshima. 1081-1084 (2002)

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      2002 Annual Research Report
  • [Publications] Y.Yamada: "STM/Local Tunneling Barrier Height Studies on the Cs Adsorption on a Pt(111) Surface"Jpn. J. Appl. Phys.. 41. 5003-5007 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Kondo: "Dissociative Chemisorption of CH4 on a Cesiated Pt(111) Surface Studied by Supersonic Molecular Beam Scattering Techniques"J. Chem. Phys.. 116. 7673-7684 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Miyamaoto: "Emission Stability of a Field Emitter Array Observed by an Emission Microscope"J. Vac. Sci. Technol.. B21. 436-439 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Nakane: "Magnifying Observation of FEAs by Using PEEM Optics"Technical Report of IEICE. 102. 43-46 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Matsumoto: "Point X-Ray Source Using Graphite Nanofibers and Its Application to X-Ray Radiography"Appl. Phys. Lett.. 82. 1637-1639 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Mimura: "Emission Characteristics of a GaAs Wedge Emitter Monolithically Fabricated with an Air Bridge And a Cantilever Anode"J. Vac. Sci. Technol.. B21. 471-473 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] C.Ochiai: "Fabrication Process of Field Emitter Arrays Using Focused Ion and Electron Beam Induced Reaction"J. Vac. Sci. Technol.. B19. 933-935 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Gotoh: "Relationship between work function and noise power of field emitters : Use of S-K chart for evaluation of work function"J. Vac. Sci. Technol.. B19-3. 992-994 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Gotoh: "Fabrication of gated niobium nitride field emitter array"J. Vac. Sci. Technol.. B19-4. 1373-1376 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Kondo: "Rainbow scattering of CH4 and C2H6 molecular beams from a LiF(001) surface : Dependence on incident kinetic energy and molecular anisotoropy"J. Vac. Sci. Technol.. A19. 2468-2470 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Kondo: "Dynamics and thermal stability of Cs super-structures on a Pt(111)surface"J. Vac. Sci. Technol.. A19. 2866-2869 (2001)

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      2001 Annual Research Report
  • [Publications] 安達 洋: "電解放射顕微鏡を用いた電界放射陰極列の電子放射特性の測定"表面科学. Vol.23. 18-23 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] V.Ichizli: "Field emission frpmporous (100) GaP with modified morphology"App. Phys. Lett.. 4016-4019 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] C.Ochiai: "Proc. of the 13th Intern. Conf. On Ion Implantation Technology(IIT2000)"Ion Beam Processing of Metal Gated Field Emitter Arrays. 821-824 (2000)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Mimura: "GaAs Lateral Field Emitters for Generation of Modulation Beam using Gunn Effect"J.Vac.Sci.Technl.. (in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 三村: "半導体エミッタからの電子放射特性"電子情報通信学会論文誌. J83-C. 673-680 (2000)

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      2000 Annual Research Report
  • [Publications] A.Seidl: "Accuracy Problems in Simulation of Field Emitter Devices Using Finite Elements"J.Computational Physics. 166. 159-164 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] C.Ochiai: "Fabrication Process of Field Emitter Arrays Using Focused Ion and Electron Beam Induced Reaction"J.Vac.Sci.Technl.. B19(in press). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Gotoh: "Relationship Between Work Function and Current Fluctuation of Field Emitters : Use of S-K Chart for Evaluation of Work Function"J.Vac.Sci.Technl.. B19(in press).

    • Related Report
      2000 Annual Research Report
  • [Publications] S.Yagyu: "Molecular Beam Studies on Inelastic Collision Processes of Methane Molecules at a Pt (111) Surface"Appl.Surf.Sci.. (in press). (2001)

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      2000 Annual Research Report
  • [Publications] T.Tomii: "Speed Distribution of C2H6 Molecular Beam Scattered Through Chattering Collision on a LiF (001) Surface"J.Vac.Sci.Technl.. (in press). (2001)

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      2000 Annual Research Report
  • [Publications] H.Nakane: "Influence of Gases on FEA Observed by an Emission Microscope"Appl.Surf.Sci.. (in press). (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2001-04-01   Modified: 2018-03-28  

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