ウォータジェットと集束イオンビームとを併用した広スケールレンジ3次元微細形状創成

• Project/Area Number: 12305012
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: 機械工作・生産工学
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 伊東 誼 東工大, 工学部, 教授 (60016441)
• Project Period (FY): 2000
• Project Status: Completed (Fiscal Year 2000)
• Budget Amount: ¥21,800,000 (Direct Cost: ¥21,800,000); Fiscal Year 2000: ¥21,800,000 (Direct Cost: ¥21,800,000)