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Development of nm-scale soft-X-ray spectroscopy electron microscope and its application to BN materials

Research Project

Project/Area Number 12440079
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 固体物性Ⅰ(光物性・半導体・誘電体)
Research InstitutionTohoku University

Principal Investigator

TERAUCHI Masami  Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, Professor, 多元物質科学研究所, 教授 (30192652)

Co-Investigator(Kenkyū-buntansha) SAITOH Koh  Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, Research Associate, 多元物質科学研究所, 助手 (50292280)
TSUDA Kenji  Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, Associate Professor, 多元物質科学研究所, 助教授 (00241274)
Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥14,800,000 (Direct Cost: ¥14,800,000)
Fiscal Year 2002: ¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2001: ¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2000: ¥8,600,000 (Direct Cost: ¥8,600,000)
KeywordsSof-X-ray spectroscopy / Transmission electron microscope / BN / DOS of valence bands / loco-regional / カーボンナノチューブ / cubic BN / wurtzite BN / 電子系励起状態
Research Abstract

We have developed a high energy-resolution soft-X-ray spectrometer for a transmission electron microscope to obtain the information of the density of states(DOS)of the valence band (occupied states) from identified small specimen areas
The spectrometer was composed of varied-line-spacing(VLS)gratings and a CCD detector. An energy range from 60eV to 1200eV was accessible by using two VLS gratings, which have line densities of 1200 and 2400 lines/mm. the size of the CCD detector was 27.6x27.6mm2,which corresponds to a collection angle of 6.5x10.^<-4>sr. By introducing X-ray reflection flat mirrors, spectral intensity was improved by 2.2 times. Thus, the effective collection angle of the spectrometer was 1.4x10.^<-3>sr. Energy resolutions of this spectrometer for Si L-emission(〜100eV),B K-emission(〜180eV)and Cu L-emission(〜930eV)were evaluated to be 0.1,0.4 and 1.4eV, respectively.This spectrometer successfully obtained the DOS of the valence band from specified amall specimen areas of h,c,w-BN,α, βboron, Si, carbon allotropes and quasicrystals
We have been designing a new VLS grating to improve the energy resolution with a help of another Grant-in-Aid for Scientific research(B). The new spectrometer will give us an energy resolution of about 0.7eV at 1000eV

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (28 results)

All Other

All Publications (28 results)

  • [Publications] M.Terauchi: "Development of A High Energy-resolution Soft-X-ray Spectrometer for A Transmission Electron Microscope"Microscopy and Microanalysis. suppl 2. 644-645 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.-K.Hong: "Control of crystal polarity in a wurtzite crystal : ZnO films grown by plasma-assisted molecular-beam epitaxy on GaN"Phys.Rev.B. 65. 115331-1-115331-10 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Ohtake: "Strain-induced surface segregation in In0.5Ga0.5As/GaAs heteroepitaxy"Applied Physics Letters. 80・21. 3931-3933 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 寺内正己: "EELSで何が分かるのか?"日本結晶学会誌. 44・5. 277-283 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 寺内正己: "EELSを用いた電子構造解析"日本結晶学会誌. 44・6. 347-354 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Tanaka: "Convergent-Beam Electron Diffraction IV"JEOL-Maruzen. 352 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M,Terauchi, M,Kawana: "Development of A High Energy-resolution Soft-X-ray Spectrometer for A Transmission Electron Microscope"Microscopy & Microanalysis. 12,supple.2. 644-645 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Ohtake, M.Ozeki, M.Terauchi, F.Sato, M.Tanaka: "Strain-indused surface segregation in In0.5Ga0.5As/GaAs heteroepitaxy"Applied Physics Letters. 180,Number 21. 3931-3933 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.-K.Hong, T.Hanada, H.J.KO, Y.Chen, T.Yao, D.Imai, K.Araki, M.Shinohara, K.Saitoh, M.Terauchi: "Control of crystal polarity in a wurtzite crystal:ZnO films grown by plasma-assisted molecular-beam epitaxy on GaN"Phys,Rev.B. 65. 115331-1-10 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Terauchi: "Electron Energy-Loss Spectroscopy Based on Transmission Electron Microscope"Journal of the Crystallographic Society of Japan. 44 Number 5. 277-283 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Terauchi: "Electronic Structure Analyses by Electron Energy-Loss Spectroscopy"Journal of the Crystallographic Society of Japan. 44 Number 6. 347-354 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Tanaka, M.Terauchi, K.Tsuda, K.Saitoh: "Convergrnt-Beam Electron Diffraction IV"JEOL-Maruzen. Tokyo. 352 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Terauchi: "Development of A High Energy-resolution Soft-X-ray Spectrometer for A Transmission Electron Microscope"Microscopy and Microanalysis. 8・suppl2. 622-623 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.-K.Hong: "Control of crystal polarity in a wurtzite crystal : Zn0 films grown by plasma-assisted molecular-beam epitaxy on GaN"Phys. Rev. B. 65. 115331-1-115331-10 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.Ohtake: "Strain-induced surface segregation in In0.5Ga0.5As/GaAs heteroepitaxy"Applied Physics Letters. 80・21. 3931-3933 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 寺内正己: "EELSで何が分かるのか?"日本結晶学会誌. 44・5. 277-283 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 寺内正己: "EELSを用いた電子構造解析"日本結晶学会誌. 44・6. 347-354 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Tanaka: "Convergent-Beam Electron Diffraction IV"JEOL. 352 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Terauchi: "Development of a sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope"Journal of Electron Microscopy. 50・2. 101-104 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Terauchi: "A sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope to obtain the density of states of the valance band"Microscopy & Microanalysis. 7・suppl.2. 228-229 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 寺内正己: "電子顕微鏡によるナノ領域の価電子帯DOS測定法の開発"固体物理. 36・5. 29-34 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Komoda: "Selective excitation of a symmetric interface plasmon mode in two close planar SiO_2/Si interface observed by electron energy-loss spectroscopy"Jpn. J. App. Phys.. 40・7. 4512-4515 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Terauchi: "High Energy-Resolution EELS Study of the Electronic Structure of Boron Nitride Cones"American Institute of Physics. CP590. 133-136 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Terauchi: "Development of a sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope"J.Electron Microsc.. 50・2(印刷中). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 寺内正己: "電子顕微鏡用軟X線分光器の製作"東北大学 科学計測研究所報告. 49・1. 61-66 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Terauchi: "Production of zigzag-type BN Nanotubes and BN Cones by Thermal Annealing"Chemical Physics letters. 324・7. 359-364 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Tsuda: "Distinction of Space Groups(I23 & I213)and(I222 & I212121)Using Coherent Convergent-Beam Electron Diffraction"Acta Cryst.. A56・4. 359-369 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Saitoh: "Distinction between the space groups having rotation screw axes, which are combined with 2 fold rotation axes, using the coherent convergent-beam electron diffraction method"Acta Cryst.. A57・2(印刷中). (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2020-05-15  

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