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Fabrication of noble nano-reaction field by synchrotron radiation etching and characterization by STM

Research Project

Project/Area Number 12440202
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機能・物性・材料
Research InstitutionOkazaki National Research Institutes

Principal Investigator

URISU Tsuneo  Okazaki National Research Institutes, Institute for Molecular Science, Department of Vacuum UV Photo-science, Professor, 分子科学研究所, 教授 (50249950)

Co-Investigator(Kenkyū-buntansha) NONOGAKI Youichi  Okazaki National Research Institutes, Institute for Molecular Science, Department of Vacuum UV Photo-science, Research associate, 分子科学研究所, 助手 (40300719)
Project Period (FY) 2000 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2003: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2002: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2001: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 2000: ¥12,100,000 (Direct Cost: ¥12,100,000)
KeywordsSynchrotron radiation etching / nano-reaction field / self-assembling reaction / bio-sensor / channel protein / undulator / STM / lipid bilayer / 自己組織化反応 / 放射光 / エッチング / シリコン / 自己組織有機単分子膜 / SAM / 生体膜 / ナノイメージング / 水素 / 自己組織単分子膜 / 自己組織化現象 / 赤外反射吸収分光 / ダイポールダイポールカップリング効果
Research Abstract

The research was carried out considering the following items as the main targets; (a) measurements of the excitation energy dependence of the synchrotron radiation (SR) etching, (b) development of nano-structure fabrication techniques using SR-etching, and (c) development of the suitable application of these techniques. The following results have been obtained.
(1)Construction of undulator beam line as the special experimental station for in-situ STM observations.:
During the remodeling of IMS-UVSOR machine for improving to the higher generation, the STM-undulator beam line BL-7U and the ultra high vacuum STM apparatous were designed and constructed. The developments were completed at 2003 and opened to the experimental use. It was found that Si-H bonds are cut by the SR irradiation. This is interesting since the Si-H on Si(100) surface is known to be inert for the SR irradiations.
(2)Proposal of new idea of bio-nano-reaction field and new science and technology field of "molecular commun … More ication".
We proposed a new supported membrane bio-sensor, which are made by integrating the lipid bilayer containing channel proteins on the Si surface with nano-structure, and several elementary process techniques necessary to fabricate this device ; nano-structure fabrication technique of Si surface, area selective surface chemical modification techniques such as -CH_3 and -COOH modifications, deposition technique of lipid bilayer using vesicle fusion, etc. have been almost completely developed. This device is considered as the receiver of the signal-carrying molecules in the life information transmission system. Based on this idea, we proposed a new science and technology field "molecular communication".
(3)Development and application of the technique of infrared reflection absorption spectroscopy using a buried metal layer substrate (BML-IRRASS),
We applied the BML-IRRAS to the investigation of oxidation reactions of Si(100) surface using H atoms and H_2O, and found new vibration bands of 3 pairs of doublet, which are assigned to several SiH_2 species with different level of Si back bond oxidations. Based on these results, important unique characteristics of BML-IRRAS ; high sensitivity and high resolution in the wide frequency region including the finger print regions, and selection rule for the transition moment perpendicular to the surface, were clearly certified for the first time. We also found that the BML-IRRAS is especially useful for the observation of bio-materials immobilized on the solid surfaces. Less

Report

(5 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (76 results)

All Other

All Publications (76 results)

  • [Publications] Hideyuki Noda: "Initial statge of hydrogen etching of Si surfaces investigated by infrared reflection absorption spectroscopy"Jpn.J.Appl.Phys.. 39. 6985-6989 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Noritaka Takezoe: "Design and construction of UVSOR-BL4A2 beam line for nano-structure processing"Nucl.Instrum.Methods. A467. 1279-1281 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yoichi Nonogaki: "STM observation of surface nanostructures on Si(111) formed after synchrotron radiation stimulated cleaning"Transactions MRS Japan. 26. 751-754 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yoichi Nonogaki: "Nanostructure formation on Si(111) surface assisted by synchrotron radiation illumination -Characterization by scanning tunneling microscopy-"J.Electron Spectroscopy. 119. 241-246 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tsuneo Urisu: "Device and material processes using synchrotron radiation - from micron to nanometers-"J.Jpn.Soci.Synchrotorn Rad.Res. 14. 112-115 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Zhi-Hong Wang: "IR linewidth broadening at nearly ideal H-termination region on Si(100) surfaces"Surf.Sci.. 502-503. 86-90 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Sam Dylan More: "Influence of substrate roughness on the formation of aliphatic self-assembled monolayers(SAMs) on silicon(100)"Jpn.J.Appl.Phys.. 41. 4390-4394 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Zhi-Hong Wang: "Hydrogen diffusion and chemical reactivity with water on nearly ideally H-terminated Si(100) surface"Jpn.J.Appl.Phys.. 41. 4390-4394 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Sam Dylan More: "Hydrophobic/hydrophilic interactions of cytochrome C with functionalized self-assembled monolayers on silicon"Surf.Sci.. 532-535. 993-998 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Zhi-Hong Wang: "Three pairs of doublet bands assigned to SiH_2 scissoring modes observed in H_2O-induced oxidation of Si(100) surfaces"Phys.Rev.. B69. 045309-045315 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Changshun Wang: "Patterning SiO_2 thin films using synchrotron radiation stimulated etching with a Co contact mask"J.Vac.Sci.Technol.. B21. 818-822 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Shusaku Yamamura: "Fabrication of CoSi_2-Buried-Metal-Layer Si Substrates for Infrared Reflection Absorption Spectroscopy by Wafer-Bonding"Jpn.J.Appl.Phys.. 42. 3942-3945 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Changshun Wang: "Synchrotron radiation stimulated etching SiO_2 thin films with a Co contact mask for the area-selective deposition of self-assenbled monolayer"Jpn.J.Appl.Phys.. 42. 4016-4019 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Kanbara: "N-channel field effect transistors with fullerene thin films and their application to a logic gate circuit"Chem.Phys.Lett. 379. 223-229 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Morio Takizawa: "Deposition of DPPC monolayers by Langmuir-Blodget method on SiO_2 surfaces covered by octadecyltrichlorosilane self-assembled monolayer islands"Chem.Phys.Lett.. 385. 220-224 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Hidekazu Watanabe: "Theoretical analysis of the oxygen insertion process in the oxidation reactions of H_2O+H/Si(100) and 2H+H_2O/Si(110) : a molecular orbital calculation and an analysis of tunneling reaction"Chem.Phys.Lett.. 383. 523-527 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Satoshi Fujiki: "Scanning tunneling microscopy of Dy@C82 and Dy@C60 adsorbed on Si(111)-(7x7) surfaces"Phys.Rev.. B69. 045415-1-045415-5 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yan-Jun Li: "Deposition of 10-undecenoic acid self-assembled layers on H-Si(111) surfaces studied with AFM and FT-IR"Appl.Surf.Sci.. (in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Ryugo Tero: "Deposition of phospholipid layers on SiO_2 surface modified by hydrophobic SAM islands"Appl.Surf.Sci.. (in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yong-Hoon Kim: "Characterization of dipalmitoylphosphatidylcholine (DPPC)/cholesterol Langmuir-Blodgett monolayers by AFM and FT-IR"Jpn.J.Appl.Phys.. (in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Md.Mashiur Rahman: "Shrinking of spin-on-glass films induced by synchrotron radiation and its application to three-dimensional microfabrications"Jpn.J.Appl.Phys.. (in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yan Jun Li: "Structure and Deposition Mechanism of 10-Undecenoic Acid Self-assembled Layers on H-Si(111) Surfaces Studied by AFM and FT-IR"Jpn.J.Appl.Phys.. 43(in printing). (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tsuneo Urisu: "Photochemical and Photoetching Process, Chemical Application of Synchrotron Radiation"Wood Scientific. (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tsuneo Urisu: "Synchrotron Radiation Etching and Application to Nanostructure Fabrications, Encyclopedia of Nanoscience and Nanotechnology"American Scientific Publishes. (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 宇理須 恒雄: "4・4ナノエッチングプロセス、ナノテクノロジーハンドブック"(株)オーム社. 929(6) (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Hideyuki Noda: "Initial statge of hydrogen etching of Si surfaces investigated by infrared reflection absorption spectroscopy"Jpn.J.Appl.Phys.. 39. 6985-6989 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Noritaka Takezoe: "Design and construction of UVSOR-BL4A2 beam line for nano-structure processing"Nucl.Instrum.Methods.. A467 Part2. 1279-1281 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yoichi Nonogaki: "STM observation of surface nanostructures on Si(111) formed after synchrotron radiation stimulated cleaning"Transactions MRS Japan. 26. 751-754 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yoichi Nonogaki: "Nanostructure formation on Si(111) surface assisted by synchrotron radiation illumination -Characterization by scanning tunneling microscopy-"J.Electron Spectroscopy. 119. 241-246 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tsuneo Urisu: "Device and material processes using synchrotron radiation -from micron to nanometers-"J.Jpn.Soci.Synchrotorn Rad.Res.. 14. 112-115 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Zhi-Hong Wang: "IR linewidth broadening at nearly ideal H-termination region on Si(100) surfaces"Surf.Sci.. 502-503. 86-90 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Sam Dylan More: "Influence of substrate roughness on the formation of aliphatic self assembled monolayers(SAMs) on silicon (100)"Jpn.J.Appl.Phys.. 41. 4390-4394 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Zhi-Hong Wang: "Hydrogen diffusion and chemical reactivity with water on nearly ideally H-terminated Si(100) surface"Jpn.J.Appl.Phys.. 41. 4275-4278 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Sam Dylan More: "Hydrophobic/hydrophilic interactions of cytochrome C with functionalized self-assembled monolayers on silicon"Surf.Sci.. 532-535. 993-998 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Zhi-Hong Wang: "Three pairs of doublet bands assigned to SiH_2 scissoring modes observed in H_2O-induced oxidation of Si(100) surfaces"Phys.Rev.. B69. 045309-045315 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Changshun Wang: "Patterning SiO_2 thin films using synchrotron radiation stimulated etching with a Co contact mask"J.Vac.Sci.Technol.. B21. 818-822 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Shusaku Yamamura: "Fabrication of CoSi_2-Buried-Metal-Layer Si Substrates for Infrared Reflection Absorption Spectroscopy by Wafer-Bonding"Jpn J.Appl.Phys.. 42. 3942-3945 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Changshun Wang: "Synchrotron radiation stimulated etching SiO_2 thin films with a Co contact mask for the area selective deposition of self-assenbled monolayer"Jpn.J.Appl.Phys.. 42. 4016-4019 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Kanbara: "N-channel field effect transistors with fullerene thin films and their application to a logic gate circuit"Chem.Phys.Lett.. 379. 223-229 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Morio Takizawa: "Deposition of DPPC monolayers by Langmuir-Blodget method on SiO_2 surfaces covered by octadecyltrichlorosilane self-assembled monolayer islands"Chem.Phys.Lett.. 385. 220-224 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Hidekazu Watanabe: "Theoretical analysis of the oxygen insertion process in the oxidation reactions of H_2O+H/Si(100) and 2H+H_2O/Si(100): a molecular orbital calculation and an analysis of tunneling reaction"Chem.Phys.Lett.. 383. 523-527 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Satoshi Fujiki: "Scanning tunneling microscopy of Dy@C82 and Dy@C60 adsorbed on Si(111)-(7x7) surfaces"Phys Rev.. B69. 045415-1-045415-5 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yan-Jun Li: "Deposition of 10-undecenoic acid self-assembled layers on H-Si (111) surfaces studied with AFM and FT-IR"Appl.Surf.Sci.. (in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Ryugo Tero: "Deposition of phospholipid layers on SiO_2 surface modified by hydrophobic SAM islands"Appl.Surf.Sci.. (in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yong-Hoop Kim: "Characterization of dipalmitoylphosphatidylcholine (DPPC)/cholesterol Langmuir-Blodgett monolayers by AFM and FT-JR"Jpn.J.Appl.Phys. (in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Md.Mashiur Rahman: "Shrinking of spin-on-glass films induced by synchrotron radiation and its application to three-dimensional microfabrications"Jpn.J.Appl.Phys.. (in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yan Jun Li: "Structure and Deposition Mechanism of 10-Undecenoic Acid Self-assembled Layers on H-Si (111) Surfaces Studied by AFM and FT-IR"Jpn.J.Appl.Phys.. 43(in printing). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Sam Dylan More: "Hydrophobic/hydrophilic interactions of cytochrome C with functionalized self-assembled monolayers on silicon"Surf.Sci.. 532-535. 993-998 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Changshun Wang: "Patterning SiO_2 thin films using synchrotron radiation stimulated etching with a Co contact mask"J.Vac.Sci.Technol.. B21. 818-822 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Shusaku Yamamura: "Reflection absorption spectroscopy using CoSi_2 buried metal layer substrate made by wafer-bonding"Jpn J.Appl.Phys.. 42. 3942-3945 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Changshun Wang: "Synchrotron radiation stimulated etching SiO_2 thin films with a Co contact mask for the area-selective deposition of self-assembled monolayer"Jpn.J.Appl.Phys.. 42. 4016-4019 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Kanbara: "N-channel field effect transistors with fullerene thin films and their application to a logic gate circuit"Chem.Phys.Lett.. 379. 223-229 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Zhi-Hong Wang: "Three pairs of doublet bands assigned to SiH_2 scissoring modes observed in H_2O-induced oxidation of Si(100) surfaces"Phys.Rev.. B69. 045309-045315 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Morio Takizawa: "Deposition of DPPC monolayers by Langmuir-Blodget method on SiO_2 surfaces covered by octadecyltrichlorosilane self-assembled monolayer islands"Chem.Phys.Lett.. 385. 220-224 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Ryugo Tero: "Deposition of phospholipid layers on SiO_2 surface modified by alkyl-SAM islands"Appl.Surf.Sci.. in printing. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Yan-Jun Li: "Deposition of undecenoic acid self-assembled monolayers on H-Si (111) surfaces studied by AFM"Appl.Surf.Sci.. in printing. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Md.Mashiur Rahman: "Shrinking of spin-on-glass films induced by synchrotron radiation and its application to the 3-D microfabrications"Jpn.J.Appl.Phys.. in printing. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Yong-Hoon Kim: "Characterization of dipalmitoylphosphatidylcholine (DPPC)/cholesterol Langmuir-Blodgett monolayers investigated by AFM and FT-IR"Jpn.J.Appl.Phys.. in printing. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 宇理須 恒雄: "ナノテクノロジーハンドブック(4-4、ナノエッチングプロセス)"オーム社. 929(6) (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Zhi-Hong Wang: "IR linewidth broadening at nearly ideal H-termination region on Si(100) surfaces"Surf. Sci.. 502-503. 86-90 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Sam Dylan More: "Influence of substrate roughness on the formation of aliphatic self-assembled monolayers(SAMs) on silicon(100)"Jpn. J. Appl. Phys.. 41. 4390-4394 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Zhi-Hong Wang: "Hydrogen diffusion and chemical reactivity with water on nearly ideally H-terminated Si(100) surface"Jpn. J. Appl. Phys.. 41. 4275-4278 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Sam Dylan More: "Hydrophobic/hydrophilic interactions of cytochrome C with functionalized self-assembled monolayers on silicon"Surf. Sci.. (印刷中). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Changshun Wang: "Patterning SiO_2 thin films using synchrotron radiation stimulated etching with a Co contact mask"J. Vac. Sci. Technol.. B(印刷中). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Shusaku Yamamura: "Infrared reflection absorption spectroscopy using CoSi_2 buried metal layer substrates made by wafer-bonding"Jpn J. Appl. Phys.. (印刷中). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Noritaka Takezoe, 他: "Design and construction of UVSOR-BL4A2 beam line for nano-structure processing"Nucl. Instrum. Methods. A467Part2. 1279-1281 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Yoichi Nonogaki 他: "STM observation of surface nanostructures on Si(111) formed after synchrotron radiation stimulated cleaning"Transactions MRS Japan. 26. 751-754 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Yoichi Nonogaki 他: "Nanostructure formation on Si(111) surface assisted by synchrotron radiation illumination-Characterization by scanning tunneling microscopy-"J. Electron spectroscopy. 119. 241-246 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Tsuneo Urisu 他: "Device and material processes using synchrotron radiation-from micron to nanometers-"J. Jpn. Soci. Synchrotorn Rad. Res. 14. 112-115 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Zhi-Hong Wang: "IR linewidth broadening at nearly ideal H-termination region on Si(100) surfaces"Surf. Sci. (印刷中). (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Yongli Gao: "Scanning Tunneling Microscopy Study of Surface Morphology of Si(111) after Synchrotron Radiation Stimulated Desorption of SiO_2"J.Vac.Sci.Technol. A18. 1153-1157 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Yongli Gao: "Scanning Tunneling Microscopy Study of Si(111)Surface Morphology after Removal of SiO_2 by Synchrotron Radiation Illumination,"Appl.Phys.Lett.. 76. 1392-1394 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Yoichi Nonogaki: "SR-stimulated etching and OMVPE growth for semiconductor nanostructure fabrication"Mat.Sci.Eng. B74. 7-11 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Yoshihiro Kobayashi: "Control of surface composition on Ge/Si(001)by atomic hydrogen irradiation,"Surf.Sci. 436. 9-14 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] Hideyuki Noda: "Assignments of bending and stretching vibrational spectra and mechanisms of thermal decomposition of SiH_2 on Si(100)surfaces"Chem.Phys.Lett. 326. 163-168 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Hideyuki Noda: "Initial statge of hydrogen etching of Si surfaces investigated by infrared reflection absorption spectroscopy.,"Jpn.J.Appl.Phys. (発表予定).

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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